US4666291A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Light-exposure apparatus
Assignee: Hitachi Ltd
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Filing: 1986-04-16
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Granted: 1987-05-19
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Expires: 2006-04-16
Abstract
Abstract A light-exposure apparatus which can keep uniform the gap between a mask and a wafer and reduce the density of arrangement of vertical movers adapted to deform the wafer to thereby reduce cost and weight of the apparatus. The apparatus has a thin plate deforming mechanism comprising a chuck platen for holding on its top surface the wafer, the bottom surface of the chuck platen being formed with imperforate slits patterned in the form of a grid composed of a plurality of triangular meshes so that the chuck platen may be deformed along bending lines near the triangular meshes, and a plurality of vertical movers for vertically deforming the individual triangular meshes so as to flatten or deform into a desired shape the wafer.
Inventors
- 👤 Motoya Taniguchi
- 👤 Asahiro Kuni
- 👤 Ryuichi Funatsu
- 👤 Yukio Kembo
- 👤 Akira Inagaki
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-25 21:13
CPC Classifications
G; G03; G03F; G03F9/00; G03F9/70; G03F9/7049; G03F9/7053; G03F7/00; G03F7/70; G03F7/70216; G03F7/703; G03F7/70691; G03F7/707
Claims Analysis
Total Claims: 9
Claim 1
Independent Claim
111 words
A light-exposure apparatus having a thin plate deforming mechanism, said mechanism comprising: a chuck platen for vacuum absorbing to its top surface a thin plate, said chuck platen having its bottom surface formed with imperforate slits patterned in the form of a grid composed of a plurality of meshes so that the chuck platen may be deformed plastically along bending lines near said meshes; and a plurality of vertical movers for vertically deforming the individual meshes so as to deform said thin plate into a desired shape, whereby the gap between another thin plate formed with a pattern and said thin plate to which the pattern is transferred is kept uniform.
Claim 2
Dependent Claim
111 words
A light-exposure apparatus having a thin plate deforming mechanism, said mechanism comprising: a chuck platen for vacuum absorbing to its top surface a thin plate, said chuck platen having its bottom surface formed with imperforate slits patterned in the form of a grid composed of a plurality of meshes so that the chuck platen may be deformed plastically along bending lines near said meshes; and a plurality of vertical movers for vertically deforming the individual meshes so as to deform said thin plate into a desired shape, whereby the gap between another thin plate formed with a pattern and said thin plate to which the pattern is transferred is kept uniform.
Claim 3
Dependent Claim
18 words
A light-exposure apparatus according to claim 1, wherein said slit terminates in a U-shaped or V-shaped top end.
Claim 4
Dependent Claim
32 words
A light-exposure apparatus according to claim 1, wherein said vertical mover has electrodes which make contact with a printed circuit board so as to supply an electrical signal to said vertical mover.
Claim 5
Dependent Claim
12 words
A light-exposure apparatus according to claim 1, wherein said mesh is triangular.
Claim 6
Dependent Claim
80 words
A thin plate deforming mechanism comprising: a chuck platen for vacuum absorbing to its top surface a thin plate, said chuck platen having its bottom surface formed with imperforate slits patterned in the form of a grid composed of a plurality of meshes so that the chuck platen may be deformed along bending lines near said meshes; and a plurality of vertical movers for vertically deforming the individual meshes so as to deform said thin plate into a desired shape.
Claim 7
Dependent Claim
80 words
A thin plate deforming mechanism comprising: a chuck platen for vacuum absorbing to its top surface a thin plate, said chuck platen having its bottom surface formed with imperforate slits patterned in the form of a grid composed of a plurality of meshes so that the chuck platen may be deformed along bending lines near said meshes; and a plurality of vertical movers for vertically deforming the individual meshes so as to deform said thin plate into a desired shape.
Claim 8
Dependent Claim
20 words
A thin plate deforming mechanism according to claim 5, wherein said slit terminates in a U-shaped or V-shaped top end.
Claim 9
Dependent Claim
14 words
A thin plate deforming mechanism according to claim 5, wherein said mesh is triangular.
References Cited (Backward Citations)
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1990-05-18 | 1990-11-17 | 1991-05-19 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1994-05-18 | 1994-11-17 | 1995-05-19 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1998-05-18 | 1998-11-17 | 1999-05-19 | $7700.00 | Window Closed / Lapsed |