US4673589A
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Photoconducting amorphous carbon
Assignee: BP Corp North America Inc
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Filing: 1986-02-18
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Granted: 1987-06-16
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Expires: 2006-02-18
Abstract
Abstract A photoconducting sulfur- and hydrogen-doped amorphous carbon is prepared by deposition from a plasma glow discharge in a gas mixture which comprises at least one hydrocarbon and at least one sulfur source.
Inventors
- 👤 Robert W. Standley
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 04:39
CPC Classifications
H; H10; H10F; H10F71/00; H10F71/10; H10F71/103; C; C23; C23C; C23C16/00; C23C16/22; C23C16/26; G; G03; G03G; G03G5/00; G03G5/02; G03G5/04; G03G5/08; G03G5/082; G03G5/08285; Y; Y02; Y02E; Y02E10/00; Y02E10/50; Y02P; Y02P70/00; Y02P70/50
Claims Analysis
Total Claims: 21
Claim 1
Independent Claim
141 words
A sulfur- and hydrogen-doped amorphous carbon which is prepared by the process which comprises depositing said doped amorphous carbon from a plasma glow discharge in a gas mixture which comprises at least one hydrocarbon and at least one sulfur source, wherein said gas mixture is at a pressure in the range from about 0.001 to about 1 torr, the composition of said gas mixture is adjusted to yield a doped amorphous carbon which has an atom ratio of hydrogen to carbon which is in the range from about 0.1 to about 2.0 and an atom ratio of sulfur to carbon which is in the range from bout 0.005 to about 0.20, said hydrocarbon is selected from the group consisting of volatile hydrocarbons, and said sulfur source is selected from the group consisting of volatile organic and inorganic compounds which contain sulfur.
Claim 2
Dependent Claim
141 words
A sulfur- and hydrogen-doped amorphous carbon which is prepared by the process which comprises depositing said doped amorphous carbon from a plasma glow discharge in a gas mixture which comprises at least one hydrocarbon and at least one sulfur source, wherein said gas mixture is at a pressure in the range from about 0.001 to about 1 torr, the composition of said gas mixture is adjusted to yield a doped amorphous carbon which has an atom ratio of hydrogen to carbon which is in the range from about 0.1 to about 2.0 and an atom ratio of sulfur to carbon which is in the range from bout 0.005 to about 0.20, said hydrocarbon is selected from the group consisting of volatile hydrocarbons, and said sulfur source is selected from the group consisting of volatile organic and inorganic compounds which contain sulfur.
Claim 3
Dependent Claim
17 words
The doped amorphous carbon as set forth in claim 1 wherein said gas mixture additionally comprises hydrogen.
Claim 4
Dependent Claim
25 words
The doped amorphous carbon as set forth in claim 1 wherein said sulfur source is selected from the group consisting of volatile inorganic sulfur compounds.
Claim 5
Dependent Claim
26 words
The doped amorphous carbon as set forth in claim 3 wherein said sulfur source is selected from the group consisting of hydrogen sulfide and sulfur hexafluoride.
Claim 6
Dependent Claim
24 words
The doped amorphous carbon as set forth in claim 1 wherein said hydrocarbon is selected from the group consisting of alkanes, alkenes and alkynes.
Claim 7
Dependent Claim
24 words
The doped amorphous carbon as set forth in claim 5 wherein said hydrocarbon is selected from the group consisting of methane, ethylene and acetylene.
Claim 8
Dependent Claim
44 words
The doped amorphous carbon as set forth in claim 1 wherein the composition of said gas mixture is adjusted to yield an atom ratio of hydrogen to carbon in said doped amorphous carbon which is in the range from about 0.5 to about 1.5.
Claim 9
Dependent Claim
47 words
The doped amorphous carbon as set forth in claim 1 wherein the amount of sulfur source in said gas mixture is adjusted to yield an atom ratio of sulfur to carbon in said doped amorphous carbon which is in the range of about 0.01 to about 0.05.
Claim 10
Dependent Claim
28 words
The doped amorphous carbon as set forth in claim 1 wherein said gas mixture is at a pressure in the range from about 0.005 to bout 0.5 torr.
Claim 11
Independent Claim
155 words
A method for the preparation of a sulfur- and hydrogen-doped amorphous carbon film which comprises: (a) initiating and sustaining a plasma glow discharge in a gas mixture which comprises at least one hydrocarbon and at least one sulfur source, wherein said gas mixture is at a pressure in the range from about 0.001 to about 1 torr, the composition of said gas mixture is adjusted to yield a doped amorphous carbon which has an atom ratio of hydrogen to carbon which is in the range from about 0.1 to about 2.0 and an atom ratio of sulfur to carbon which is in the range from about 0.005 to about 0.20, said hydrocarbon is selected from the group consisting of volatile hydrocarbons, and said sulfur source is selected from the group consisting of volatile organic and inorganic compounds which contain sulfur; and (b) depositing said doped amorphous carbon on a substrate from said plasma glow discharge.
Claim 12
Independent Claim
155 words
A method for the preparation of a sulfur- and hydrogen-doped amorphous carbon film which comprises: (a) initiating and sustaining a plasma glow discharge in a gas mixture which comprises at least one hydrocarbon and at least one sulfur source, wherein said gas mixture is at a pressure in the range from about 0.001 to about 1 torr, the composition of said gas mixture is adjusted to yield a doped amorphous carbon which has an atom ratio of hydrogen to carbon which is in the range from about 0.1 to about 2.0 and an atom ratio of sulfur to carbon which is in the range from about 0.005 to about 0.20, said hydrocarbon is selected from the group consisting of volatile hydrocarbons, and said sulfur source is selected from the group consisting of volatile organic and inorganic compounds which contain sulfur; and (b) depositing said doped amorphous carbon on a substrate from said plasma glow discharge.
Claim 13
Dependent Claim
28 words
The method as set forth in claim 10 wherein said gas mixture additionally comprises at least one gas selected from the group consisting of hydrogen, helium and argon.
Claim 14
Dependent Claim
15 words
The method as set forth in claim 11 wherein said gas mixture additionally comprises hydrogen.
Claim 15
Dependent Claim
23 words
The method as set forth in claim 10 wherein said sulfur source is selected from the group consisting of volatile inorganic sulfur compounds.
Claim 16
Dependent Claim
24 words
The method as set forth in claim 13 wherein said sulfur source is selected from the group consisting of hydrogen sulfide and sulfur hexafluoride.
Claim 17
Dependent Claim
22 words
The method as set forth in claim 10 wherein said hydrocarbon is selected from the group consisting of alkanes, alkenes and alkynes.
Claim 18
Dependent Claim
22 words
The method as set forth in claim 15 wherein said hydrocarbon is selected from the group consisting of methane, ethylene and acetylene.
Claim 19
Dependent Claim
45 words
The method as set forth in claim 10 wherein the amount of sulfur source in said gas mixture is adjusted to yield an atom ratio of sulfur to carbon in said doped amorphous carbon which is in the range from about 0.01 to about 0.05.
Claim 20
Dependent Claim
26 words
The method as set forth in claim 10 wherein said gas mixture is at a pressure in the range from about 0.005 to about 0.5 torr.
Claim 21
Dependent Claim
42 words
The method as set forth in claim 10 wherein the composition of said gas mixture is adjusted to yield an atom ratio of hydrogen to carbon in said doped amorphous carbon which is in the range from about 0.5 to about 1.5.
References Cited (Backward Citations)
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