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US4688940A
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Heterodyne interferometer system
Assignee: Zygo Corp
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Filing: 1985-03-12
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Granted: 1987-08-25
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Expires: 2005-03-12
Abstract
Abstract A heterodyne interferometer system utilizes a single stabilized frequency linearly polarized laser input beam (18) from a light source (10) which is provided to an acousto-optic device (20) along with a frequency stabilized electrical reference signal (32) from an oscillator (30) for transforming the input beam (18) into a pair of orthogonally polarized beams (40,50) differing in frequency by the reference signal frequency prior to providing these beams (40,50) to a polarization type interferometer (70). A mixing polarizer (60) mixes the beams (46,56) after they traverse the interferometer (70) and provides the mixed beams (62,64) to a photoelectric detector (65) where they are utilized to produce an electrical measurement signal (66). This electrical measurement signal (66) is processed in a phase meter/accumulator (68) along with the reference signal (32) to produce an output signal (80) which is the sum of phase difference on a cycle-by-cycle basis between the measurement signal (66) and the reference signal (32). The phase meter/accumulator (68) includes an analog-to-digital converter (83) and a memory register (92) for the previous cycle, with the measurement resolution being determined by the number of bits of the analog-to-digital converter (83).
Inventors
- 👤 Gary E. Sommargren
- 👤 Moshe Schaham
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 11:27
CPC Classifications
G; G01; G01B; G01B9/00; G01B9/02; G01B9/02041; G01B9/02045; G01B9/02001; G01B9/02002; G01B9/02083; G01J; G01J9/00; G01J9/04; G01B2290/00; G01B2290/70
Claims Analysis
Total Claims: 59
Claim 1
Independent Claim
219 words
A heterodyne interferometer system comprising: a light source for providing a linearly polarized single stabilized first frequency optical input beam; means for providing a frequency stabilized reference electrical signal having a second frequency; acousto-optical means coupled to said single input beam providing means and said reference signal providing means for directly transforming said single input beam into a pair of collinear orthogonally polarized beams having associated optical frequencies which differ in frequency from each other by said reference signal second frequency; means coupled to said acousto-optical means and having a fixed length optical path traversed by one of said pair of collinear orthogonally polarized beams and a variable length optical path traversed by said other one of said pair of collinear orthogonally polarized beams for providing interferometric output beams; means coupled to said interferometric output beam providing means for mixing said interferometric output beams; means coupled to said mixing means for providing an electrical measurement signal from said mixed interferometric output beams; and means coupled to said measurement signal providing means and said reference signal providing means for providing an output signal based on a difference in phase between said reference signal and said measurement signal, said phase difference being based on a change in length of said variable length optical path in said interferometric output beam providing means.
Claim 2
Dependent Claim
219 words
A heterodyne interferometer system comprising: a light source for providing a linearly polarized single stabilized first frequency optical input beam; means for providing a frequency stabilized reference electrical signal having a second frequency; acousto-optical means coupled to said single input beam providing means and said reference signal providing means for directly transforming said single input beam into a pair of collinear orthogonally polarized beams having associated optical frequencies which differ in frequency from each other by said reference signal second frequency; means coupled to said acousto-optical means and having a fixed length optical path traversed by one of said pair of collinear orthogonally polarized beams and a variable length optical path traversed by said other one of said pair of collinear orthogonally polarized beams for providing interferometric output beams; means coupled to said interferometric output beam providing means for mixing said interferometric output beams; means coupled to said mixing means for providing an electrical measurement signal from said mixed interferometric output beams; and means coupled to said measurement signal providing means and said reference signal providing means for providing an output signal based on a difference in phase between said reference signal and said measurement signal, said phase difference being based on a change in length of said variable length optical path in said interferometric output beam providing means.
Claim 3
Dependent Claim
33 words
A heterodyne interferometer system in accordance with claim 1, wherein said interferometric output beam providing means is an interferometer, said mixing means mixing said interferometric output beams after they have traversed said interferometer.
Claim 4
Dependent Claim
17 words
A heterodyne interferometer system in accordance with claim 2, wherein said interferometer comprises a polarization type interferometer.
Claim 5
Dependent Claim
28 words
A heterodyne interferometer system in accordance with claim 3, wherein said polarization type interferometer comprises a pair of orthogonally disposed retroreflectors and a polarization beamsplitter optically aligned therewith.
Claim 6
Dependent Claim
22 words
A heterodyne interferometer system in accordance with claim 4, wherein said pair of collinear orthogonally polarized beams are substantially equal in intensity.
Claim 7
Dependent Claim
22 words
A heterodyne interferometer system in accordance with claim 1, wherein said pair of collinear orthogonally polarized beams are substantially equal in intensity.
Claim 8
Dependent Claim
25 words
A heterodyne interferometer system in accordance with claim 5, wherein said light source comprises a laser source, said single input beam being a laser beam.
Claim 9
Dependent Claim
20 words
A heterodyne interferometer system in accordance with claim 7, wherein said reference signal providing means comprises a frequency stabilized oscillator.
Claim 10
Dependent Claim
34 words
A heterodyne interferometer system in accordance with claim 8, wherein said reference signal providing means further comprises a power amplifier electrically connected between said oscillator and said acousto-optical means for driving said acousto-optical means.
Claim 11
Dependent Claim
18 words
A heterodyne interferometer system in accordance with claim 9, wherein said laser comprises a helium neon gas laser.
Claim 12
Dependent Claim
16 words
A heterodyne interferometer system in accordance with claim 9, wherein said laser comprises a diode laser.
Claim 13
Dependent Claim
29 words
A heterodyne interferometer system in accordance with claim 11, wherein said light source further comprises beam forming optics associated with said diode laser for providing said input single beam.
Claim 14
Dependent Claim
56 words
A heterodyne interferometer system in accordance with claim 9, wherein said polarization beamsplitter transmits completely light having its polarization vector in the plane of incidence and reflects completely light having its polarization vector perpendicular to the plane of incidence for providing a transmitted beam and a reflected beam of said pair of collinear orthogonally polarized beams.
Claim 15
Dependent Claim
54 words
A heterodyne interferometer system in accordance with claim 13, wherein one of said pair of retroreflectors is fixed relative to said polarization beamsplitter and the other of said pair of retroreflectors is movable relative to said polarization beamsplitter in a direction parallel with said transmitted beam of said collinear orthogonally polarized pair of beams.
Claim 16
Dependent Claim
39 words
A heterodyne interferometer system in accordance with claim 14, wherein said mixing means comprises a mixing polarizer for providing a pair of mixed interferometric output beams having a component of similar polarization to said electrical measurement signal providing means.
Claim 17
Dependent Claim
20 words
A heterodyne interferometer system in accordance with claim 15, wherein said electrical measurement signal providing means comprises a photoelectric detector.
Claim 18
Dependent Claim
19 words
A heterodyne interferometer system in accordance with claim 16, wherein said photoelectric detector has a square law detection characteristic.
Claim 19
Dependent Claim
20 words
A heterodyne interferometer system in accordance with claim 17, wherein said output signal providing means comprises a phase meter/accumulator means.
Claim 20
Dependent Claim
20 words
A heterodyne interferometer system in accordance with claim 16, wherein said output signal providing means comprises a phase meter/accumulator means.
Claim 21
Dependent Claim
89 words
A heterodyne interferometer system in accordance with claim 19, wherein said electrical measurement signal has a frequency f c defined by the expression: f.sub.c =f.sub.o +2v/λ where f o is the frequency of said reference signal; v is the velocity of said movable retroreflector, being positive when the movement is toward said beamsplitter and negative when the movement is away from said beamsplitter; and λ is the wavelength of a measurement beam derived from the transmitting of one of said pair of collinear orthogonally polarized beams by said beamsplitter.
Claim 22
Dependent Claim
89 words
A heterodyne interferometer system in accordance with claim 18, wherein said electrical measurement signal has a frequency f c defined by the expression: f.sub.c =f.sub.o +2v/λ where f o is the frequency of said reference signal; v is the velocity of said movable retroreflector, being positive when the movement is toward said beamsplitter and negative when the movement is away from said beamsplitter; and λ is the wavelength of a measurement beam derived from the transmitting of one of said pair of collinear orthogonally polarized beams by said beamsplitter.
Claim 23
Dependent Claim
44 words
A heterodyne interferometer system in accordance with claim 20, wherein said phase meter/accumlator means comprises means for integrating the frequency difference between said measurement signal and said reference signal for providing said output signal which is proportional to the displacement of said movable retroreflector.
Claim 24
Dependent Claim
32 words
A heterodyne interferometer system in accordance with claim 20, wherein said integrating means comprises means for adding the phase differences between said measurement signal and said reference signal on a cycle-by-cycle basis.
Claim 25
Dependent Claim
51 words
A heterodyne interferometer system in accordance with claim 23, wherein said cycle-by-cycle phase difference adding means comprises analog-to-digital conversion means connected to said measurement signal providing means and said reference signal providing means for providing a digital output signal proportional to the phase of said reference signal at the sampling instant.
Claim 26
Dependent Claim
63 words
A heterodyne interferometer system in accordance with claim 24, wherein said phase difference adding means further comprises a triangular wave generation means connected between said analog-to-digital conversion means and said reference signal providing means for generating a triangular reference signal from said frequency stabilized reference signal, said triangular reference signal being sampled by said analog-to-digital conversion means every cycle of said measurement signal.
Claim 27
Dependent Claim
39 words
A heterodyne interferometer system in accordance with claim 25, wherein said phase difference adding means further comprises a memory register connected to said analog-to-digital conversion means output for storing the corresponding previous cycle output of said analog-to-digital conversion means.
Claim 28
Dependent Claim
80 words
A heterodyne interferometer system in accordance with claim 26, wherein said phase difference adding means further comprises a phase difference calculator means connected to said analog-to-digital conversion means output and said memory register for providing a phase difference output signal derived from said digital output signal and said corresponding previous cycle output stored in said memory register, said phase difference output signal being the measure of phase difference between said reference signal and said measurement signal at each sampling instant.
Claim 29
Dependent Claim
114 words
A heterodyne interferometer system in accordance with claim 27, wherein said phase difference adding means further comprises accumlator means connected to said phase difference calculator means for adding the phase differences calculated at each cycle of said measurement signal, said output signal from said accumulator means being the sum of said phase differences and being proportional to the displacement of said movable retroreflector, the measured displacement d of said movable retroreflector being defined by the expression: ##EQU4## where N is the output of said accumulator means; λ is the wavelength of said measurement beam; m is the number of bits of said analog-to-digital conversion means; and ##EQU5## is the measurement resolution of said system.
Claim 30
Dependent Claim
26 words
A heterodyne interferometer system in accordance with claim 28, wherein said analog-to-digital conversion means comprises a seven bit analog-to-digital converter and said measurement resolution is λ/508.
Claim 31
Dependent Claim
25 words
A heterodyne interferometer system in accordance with claim 1, wherein said light source comprises a laser source, said single input beam being a laser beam.
Claim 32
Dependent Claim
20 words
A heterodyne interferometer system in accordance with claim 30, wherein said reference signal providing means comprises a frequency stabilized oscillator.
Claim 33
Dependent Claim
34 words
A heterodyne interferometer system in accordance with claim 31, wherein said reference signal providing means further comprises a power amplifier electrically connected between said oscillator and said acousto-optical means for driving said acousto-optical means.
Claim 34
Dependent Claim
17 words
A heterodyne interferometer system in accordance with claim 30, wherein said interferometer comprises a polarization type interferometer.
Claim 35
Dependent Claim
28 words
A heterodyne interferometer system in accordance with claim 33, wherein said polarization type interferometer comprises a pair of orthogonally disposed retroreflectors and a polarization beamsplitter optically aligned therewith.
Claim 36
Dependent Claim
54 words
A heterodyne interferometer system in accordance with claim 34, wherein one of said pair of retroreflectors is fixed relative to said polarization beamsplitter and the other of said pair of retroreflectors is movable relative to said polarization beamsplitter in a direction parallel with said transmitted beam of said collinear orthogonally polarized pair of beams.
Claim 37
Dependent Claim
89 words
A heterodyne interferometer system in accordance with claim 35, wherein said electrical measurement signal has a frequency f c defined by the expression: f.sub.c =f.sub.o +2v/λ where f o is the frequency of said reference signal; v is the velocity of said movable retroreflector, being positive when the movement is toward said beamsplitter and negative when the movement is away from said beamsplitter; and λ is the wavelength of a measurement beam derived from the transmitting of one of said pair of collinear orthogonally polarized beams by said beamsplitter.
Claim 38
Dependent Claim
45 words
A heterodyne interferometer system in accordance with claim 36, wherein said output signal providing means comprises means for integrating the frequency difference between said measurement signal and said reference signal for providing said output signal which is proportional to the displacement of said movable retroreflector.
Claim 39
Dependent Claim
32 words
A heterodyne interferometer system in accordance with claim 37, wherein said integrating means comprises means for adding the phase differences between said measurement signal and said reference signal on a cycle-by-cycle basis.
Claim 40
Dependent Claim
51 words
A heterodyne interferometer system in accordance with claim 38, wherein said cycle-by-cycle phase difference adding means comprises analog-to-digital conversion means connected to said measurement signal providing means and said reference signal providing means for providing a digital output signal proportional to the phase of said reference signal at the sampling instant.
Claim 41
Dependent Claim
63 words
A heterodyne interferometer system in accordance with claim 39, wherein said phase difference adding means further comprises a triangular wave generation means connected between said analog-to-digital conversion means and said reference signal providing means for generating a triangular reference signal from said frequency stabilized reference signal, said triangular reference signal being sampled by said analog-to-digital conversion means every cycle of said measurement signal.
Claim 42
Dependent Claim
39 words
A heterodyne interferometer system in accordance with claim 40, wherein said phase difference adding means further comprises a memory register connected to said analog-to-digital conversion means output for storing the corresponding previous cycle output of said analog-to-digital conversion means.
Claim 43
Dependent Claim
39 words
A heterodyne interferometer system in accordance with claim 39, wherein said phase difference adding means further comprises a memory register connected to said analog-to-digital conversion means output for storing the corresponding previous cycle output of said analog-to-digital conversion means.
Claim 44
Dependent Claim
80 words
A heterodyne interferometer system in accordance with claim 42, wherein said phase difference adding means further comprises a phase difference calculator means connected to said analog-to-digital conversion means output and said memory register for providing a phase difference output signal derived from said digital output signal and said corresponding previous cycle output stored in said memory register, said phase difference output signal being the measure of phase difference between said reference signal and said measurement signal at each sampling instant.
Claim 45
Dependent Claim
114 words
A heterodyne interferometer system in accordance with claim 43, wherein said phase difference adding means further comprises accumlator means connected to said phase difference calculator means for adding the phase differences calculated at each cycle of said measurement signal, said output signal from said accumulator means being the sum of said phase differences and being proportional to the displacement of said movable retroreflector, the measured displacement d of said movable retroreflector being defined by the expression: ##EQU6## where N is the output of said accumulator means; λ is the wavelength of said measurement beam; m is the number of bits of said analog-to-digital conversion means; and ##EQU7## is the measurement resolution of said system.
Claim 46
Dependent Claim
26 words
A heterodyne interferometer system in accordance with claim 44, wherein said analog-to-digital conversion means comprises a seven bit analog-to-digital converter and said measurement resolution is λ/508.
Claim 47
Dependent Claim
80 words
A heterodyne interferometer system in accordance with claim 41 wherein said phase difference adding means further comprises a phase difference calculator means connected to said analog-to-digital conversion means output and said memory register for providing a phase difference output signal derived from said digital output signal and said corresponding previous cycle output stored in said memory register, said phase difference output signal being the measure of phase difference between said reference signal and said measurement signal at each sampling instant.
Claim 48
Dependent Claim
114 words
A heterodyne interferometer system in accordance with claim 46, wherein said phase difference adding means further comprises accumlator means connected to said phase difference calculator means for adding the phase differences calculated at each cycle of said measurement signal, said output signal from said accumulator means being the sum of said phase differences and being proportional to the displacement of said movable retroreflector, the measured displacement d of said movable retroreflector being defined by the expression: ##EQU8## where N is the output of said accumulator means; λ is the wavelength of said measurement beam; m is the number of bits of said analog-to-digital conversion means; and ##EQU9## is the measurement resolution of said system.
Claim 49
Dependent Claim
26 words
A heterodyne interferometer system in accordance with claim 47, wherein said analog-to-digital conversion means comprises a seven bit analog-to-digital converter and said measurement resolution is λ/508.
Claim 50
Dependent Claim
21 words
A heterodyne interferometer system in accordance with claim 1, wherein said interferometric output beam providing means comprises a polarization type interferometer.
Claim 51
Dependent Claim
28 words
A heterodyne interferometer system in accordance with claim 49, wherein said polarization type interferometer comprises a pair of orthogonally disposed retroreflectors and a polarization beamsplitter optically aligned therewith.
Claim 52
Dependent Claim
54 words
A heterodyne interferometer system in accordance with claim 50, wherein one of said pair of retroreflectors is fixed relative to said polarization beamsplitter and the other of said pair of retroreflectors is movable relative to said polarization beamsplitter in a direction parallel with said transmitted beam of said collinear orthogonally polarized pair of beams.
Claim 53
Dependent Claim
88 words
A heterodyne interferometer system in accordance with claim 51, wherein said electrical measurement signal has a frequency f c defined by the expression: f.sub.c =f.sub.o +2v/λ where f o is the frequency of said reference signal; v is the velocity of said movable retroreflector, being positive when the movement is toward said beamsplitter and negative when the movement is away from said beamsplitter; and λ the wavelength of a measurement beam derived from the transmitting of one of said pair of collinear orthogonally polarized beams by said beamsplitter.
Claim 54
Dependent Claim
44 words
A heterodyne interferometer system in accordance with claim 52, wherein said phase meter/accumlator means comprises means for integrating the frequency difference between said measurement signal and said reference signal for providing said output signal which is proportional to the displacement of said movable retroreflector.
Claim 55
Dependent Claim
32 words
A heterodyne interferometer system in accordance with claim 53, wherein said integrating means comprises means for adding the phase differences between said measurement signal and said reference signal on a cycle-by-cycle basis.
Claim 56
Dependent Claim
51 words
A heterodyne interferometer system in accordance with claim 54, wherein said cycle-by-cycle phase difference adding means comprises analog-to-digital conversion means connected to said measurement signal providing means and said reference signal providing means for providing a digital output signal proportional to the phase of said reference signal at the sampling instant.
Claim 57
Dependent Claim
39 words
A heterodyne interferometer system in accordance with claim 55, wherein said phase difference adding means further comprises a memory register connected to said analog-to-digital conversion means output for storing the corresponding previous cycle output of said analog-to-digital conversion means.
Claim 58
Dependent Claim
80 words
A heterodyne interferometer system in accordance with claim 56, wherein said phase difference adding means further comprises a phase difference calculator means connected to said analog-to-digital conversion means output and said memory register for providing a phase difference output signal derived from said digital output signal and said corresponding previous cycle output stored in said memory register, said phase difference output signal being the measure of phase difference between said reference signal and said measurement signal a each sampling instant.
Claim 59
Dependent Claim
114 words
A heterodyne interferometer system in accordance with claim 57, wherein said phase difference adding means further comprises accumlator means connected to said phase difference calculator means for adding the phase differences calculated at each cycle of said measurement signal, said output signal from said accumulator means being the sum of said phase differences and being proportional to the displacement of said movable retroreflector, the measured displacement d of said movable retroreflector being defined by the expression: ##EQU10## where N is the output of said accumulator means; λ is the wavelength of said measurement beam; m is the number of bits of said analog-to-digital conversion means; and ##EQU11## is the measurement resolution of said system.
References Cited (Backward Citations)
US3656853A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1990-08-24 | 1991-02-23 | 1991-08-25 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1994-08-24 | 1995-02-23 | 1995-08-25 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1998-08-24 | 1999-02-23 | 1999-08-25 | $7700.00 | Window Closed / Lapsed |