Graded sealing systems for semiconductor package

Claim 2

A hermetically sealed semiconductor package, comprising: a base member having a first coefficient of thermal expansion; a lid member having a second coefficient of thermal expansion, said second coefficient of thermal expansion being greater than said first coefficient of thermal expansion, the material of said lid member having a coefficient of thermal expansion of less than about 120×10 -7 in./in.° C. and being selected from the group consisting of metals, alloys, ceramics and cermets; a leadframe disposed between said base member and lid member, the material of said base member and said leadframe having a coefficient of thermal expansion of more than about 140×10 -7 in./in./° C. and selected from the group consisting of metals and alloys; a first sealing glass bonded to opposite surfaces of said leadframe and being disposed between said leadframe and said base member for sealing said leadframe to said base member, said first sealing glass having a fourth coefficient of thermal expansion with a mismatch of less than about 10×10 -7 in./in./° C. with the first coefficient of thermal expansion of said base member; a second sealing glass bonded to said lid member, said second sealing glass having a third coefficient of thermal expansion which has a mismatch of less than about 10×10 -7 in./in./° C. with the second coefficient of thermal expansion of said lid member; and a graduated interface zone wherein said first and second sealing glases are diffused into each other to form a graduated gradient of coefficients of thermal expansion between said leadframe and said lid member to absorb thermal stresses formed by exposure of said semiconductor package to thermal cycling.

Claim 3

The hermetically sealed semiconductor package of claim 1 wherein said first and second sealing glasses each comprise a glass selected from the group consisting of borate, borosilicate, lead borate, lead-zinc borate, lead borosilicate and lead-zinc borosilicate glasses.

Claim 4

The hermetically sealed semiconductor package of claim 2 further including means added to said glass to adjust the coefficient of thermal expansion of the resulting sealing glass.

Claim 5

The hermetically sealed semiconductor package of claim 3 wherein said added means comprises a first additive mixed into said glass to decrease the coefficient of thermal expansion of the resulting second sealing glass, said first additive being selected from the group consisting of beta-eucryptite, aluminum titanate, cordierite and beta-spodumeme.

Claim 6

The hermetically sealed semiconductor package of claim 4 wherein said added means comprises a second additive mixed into said glass to increase the coefficient of thermal expansion of the resulting first sealing glass, said second additive being selected from the group consisting of calcium fluoride and barium fluoride.

Claim 7

The hermetically sealed semiconductor package as in claim 3 wherein: the mismatch between the first coefficient of thermal expansion and the fourth coefficient of thermal expansion is from about 5×10 -7 to about 10×10 -7 in./in./° C.; and the mismatch between the second coefficient of thermal expansion and the third coefficient of thermal expansion is from about 5×10 -7 to about 10×10 -7 in./in./° C.

Claim 8

A hermetically sealed semiconductor package, comprising: a base member having a first coefficient of thermal expansion; a lid member having a second coefficient of thermal expansion, the material of said lid member having a coefficient of thermal expansion of less than about 120×10 -7 in./in./° C. and being selected from the group consisting of metals, alloys, ceramics and cermets; a leadframe disposed between said base member and lid member, the material of said base member and said leadframe having a coefficient of thermal expansion of more than about 140×10 -7 in./in.° C. and selected from the group consisting of metals and alloys; a first sealing glass bonded to opposite surfaces of said leadframe and being disposed between said leadframe and said base member for sealing said leadframe to said base member, said first sealing glass having a fourth coefficient of thermal expansion with a mismatch of less than about 10×10 -7 in./in./° C. with the first coefficient of thermal expansion of said base member; a second sealing glass bonded to said lid member, said second sealing glass having a third coefficient of thermal expansion which has a mismatch of less than about 10×10 -7 in./in./° C. with the second coefficient of thermal expansion of said lid member; a third sealing glass having a fifth coefficient of thermal expansion, said fifth coefficient of thermal expansion being of a value between the forth coefficient of thermal expansion of said first sealing glass and the third coefficient of thermal expansion of the second sealing glass; said third sealing glass being sealed between said first and second sea1ing glasses; a second graduated interface zone wherein said first and third sealing glasses are diffused into each other to form a graduated gradient of coefficients of thermal expansion between said fourth coefficient of thermal expansion and said fifth coefficient of thermal expansion; a third graduated interface zone wherein second and third sealing glasses are diffused into each other to form a graduated gradient of coefficients of thermal expansion between said third coefficient of thermal expansion and said fifth coefficient of thermal expansion; and said first, second and third sealing glasses being provided to absorb thermal stress formed by exposure of the semiconductor package to thermal cycling.

Claim 9

A hermetically sealed semiconductor package, comprising: a base member having a first coefficient of thermal expansion; a lid member having a second coefficient of thermal expansion, the material of said lid member having a coefficient of thermal expansion of less than about 120×10 -7 in./in./° C. and being selected from the group consisting of metals, alloys, ceramics and cermets; a leadframe disposed between said base member and lid member, the material of said base member and said leadframe having a coefficient of thermal expansion of more than about 140×10 -7 in./in.° C. and selected from the group consisting of metals and alloys; a first sealing glass bonded to opposite surfaces of said leadframe and being disposed between said leadframe and said base member for sealing said leadframe to said base member, said first sealing glass having a fourth coefficient of thermal expansion with a mismatch of less than about 10×10 -7 in./in./° C. with the first coefficient of thermal expansion of said base member; a second sealing glass bonded to said lid member, said second sealing glass having a third coefficient of thermal expansion which has a mismatch of less than about 10×10 -7 in./in./° C. with the second coefficient of thermal expansion of said lid member; a third sealing glass having a fifth coefficient of thermal expansion, said fifth coefficient of thermal expansion being of a value between the forth coefficient of thermal expansion of said first sealing glass and the third coefficient of thermal expansion of the second sealing glass; said third sealing glass being sealed between said first and second sea1ing glasses; a second graduated interface zone wherein said first and third sealing glasses are diffused into each other to form a graduated gradient of coefficients of thermal expansion between said fourth coefficient of thermal expansion and said fifth coefficient of thermal expansion; a third graduated interface zone wherein second and third sealing glasses are diffused into each other to form a graduated gradient of coefficients of thermal expansion between said third coefficient of thermal expansion and said fifth coefficient of thermal expansion; and said first, second and third sealing glasses being provided to absorb thermal stress formed by exposure of the semiconductor package to thermal cycling.

Claim 10

The hermetically sealed semiconductor package of claim 7 wherein said first and second and third sealing glass each comprise a glass selected from the group consisting of borate, borosilicate, lead borate, lead-zinc borate, lead borosilicate and lead-zinc borosilicate glasses.

Claim 11

The hermetically sealed semiconductor package of claim 8 further including means added to said selected glass to adjust the thermal expansion of the resulting sealing glass.

Claim 12

The hermetically sealed semiconductor package of claim 9 wherein said added means comprises a first additive mixed into said glass to decrease the coefficient of thermal epansion of the resulting second sealing glass, said first additive being selected from the group consisting of beta-eucryptite, aluminum titanate, cordierite and beta-spodumeme.

Claim 13

The hermetically sealed semiconductor package of claim 9 wherein said added means comprises a second additive mixed into said glass to increase the coefficient of thermal expansion of the resulting first sealing glass, said second additive being selected from the group consisting of calcium fluoride and barium fluoride.

Claim 14

The hermetically sealed semiconductor package as in claim 9 wherein: the mismatch between the first coefficient of thermal expansion and the fourth coefficient of thermal expansion is from about 5×10 -7 to about 10×10 -7 in./in./° C.; and the mismatch between the second coefficient of thermal expansion and the third coefficient of thermal expansion is from about 5×10 -7 to about 10×10 -7 in./in./° C.

Claim 15

The hermetically sealed semiconductor package of claim 3 further including a semiconductor device electrically connected to said leadframe and hermetically sealed in said semiconductor package.