Abstract In the fabrication of integrated circuits, a polymethyl methacrylate film containing a selected dye and exhibiting a strong dependence on light intensity is photobleached to provide an optical mask to pattern an underlying photoresist layer. While the film is photobleached, the underlying photoresist layer is made to be substantially unaffected by the photobleaching process. When the optical mask is realized, it is used to mask the light-sensitive photoresist layer when the photoresist layer is exposed to light. However, the photobleached layer, which is also sensitive to light, is now in turn made to be substantially unaffected by the exposure process. In this manner, the integrity of the optical mask resolution is maintained at its optimum, and densely integrated circuits can be processed and fabricated.
A method of processing integrated ciruits comprising the steps of: depositing a first layer of photoresistive material on a substrate; depositing a second layer containing a mixture of a polymer and a dye upon said first layer, said dye having a nonlinear photobleaching response to the intensity of an incident fluence; irradiating said second layer with a preselected pattern to convert said second layer to an optical mask of said preselected pattern without substantially effecting said first layer; and illuminating said second layer to transfer said preselected pattern to said first layer without substantially further effecting said second layer.
Claim 2
Independent Claim
99 words
A method of processing integrated ciruits comprising the steps of: depositing a first layer of photoresistive material on a substrate; depositing a second layer containing a mixture of a polymer and a dye upon said first layer, said dye having a nonlinear photobleaching response to the intensity of an incident fluence; irradiating said second layer with a preselected pattern to convert said second layer to an optical mask of said preselected pattern without substantially effecting said first layer; and illuminating said second layer to transfer said preselected pattern to said first layer without substantially further effecting said second layer.
Claim 3
Dependent Claim
11 words
The method as in claim 1, wherein said dye is acridine.
Claim 4
Dependent Claim
13 words
The method as in claim 2, wherein said polymer is polymethyl methacrylate (PMMA).
Claim 5
Dependent Claim
17 words
The method as in claim 3, wherein said step of irradiating is irradiating with an excimer laser.