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US4710283A Expired / Lapsed US ⏱️ 0.0 years remaining

Cold cathode ion beam source

Assignee: Denton Vacuum Inc
•
Filing: 1984-01-30
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Granted: 1987-12-01
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Expires: 2004-01-30
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Abstract

Abstract The present device comprises, in a preferred embodiment, a permanent magnet assembly which is formed to closely resemble a doughnut with the inside surface defining an aperture having first and second ends. Said inside surface is formed concave to substantially resemble the letter "C", or a mirror image letter "C". The permanent magnet provides magnetic flux from one end of the "C" to the other and hence the magnetic flux lines, or the magnetic flux field, form, in conjunction with the concave letter "C" configuration of the permanent magnet, an enclosure. Within the enclosure there is located an anode, and the anode is shielded from electrons by the magnetic flux field. In one embodiment, in close proximity to the second end of said aperture of the permanent magnet piece there is located a cathode, while at said first end of the aperture there is located a screen. In another embodiment, which is used for sputtering, there is no screen employed. A source of electrical voltage (which has a first terminal with a first voltage and a second terminal with a second voltage, which second voltage is negative to said first voltage) has it first and second terminals respectively connected to said anode and said cathode to cause an electrostatic field therebetween. Said cathode is not coupled to said permanent magnet in a permanent way and in some uses in movable. The arrangement has a means for injecting an ionizable fluid, such as oxygen, nitrogen, argon or the like, into the region defined by the position of the magnetic flux, the position of the cathode and the position of the screen. Accordingly when electrical energy is applied to the anode and the cathode, a dense plasma results and ultimately ions pass through the screen to provide a source of ions, and/or ultimately dislodged material passes from the cathode to a substrate.

Inventors

  • 👤 Bawa Singh
  • 👤 Peter R. Denton

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-30 10:18
CPC Classifications
H; H01; H01J; H01J27/00; H01J27/02; H01J27/08; H01J27/14; H01J37/00; H01J37/02; H01J37/04; H01J37/08

Claims Analysis

Total Claims: 4
Claim 1
Independent Claim 460 words
A cold cathode ion beam source comprising in combination: first and second magnetic flux conducting means with each formed into an endless configuration having a relatively large aperture therethrough, first separation means formed of material which does not conduct magnetic flux and formed into an endless configuration having an aperture therethrough which aperture is larger than said relatively large aperture, said first separation means disposed to separate said first and second magnetic flux conducting means and provide a common aperture, with first and second ends, passing through said first magnetic flux conducting means, through said first separation means, and through said second magnetic flux conducting means said common aperture having an inside surface formed to be concave with said first and second magnetic flux conducting means providing first and second ends of said concave configuration; magnetic flux source means disposed in close proximity to said first and second magnetic flux conducting means to provide flux passing from said first end to said second end of said concave formed inside surface thereby creating a first enclosure between said last mentioned magnetic flux and said concave formed inside surface; third and fourth magnetic flux conducting means separated by second separation means, said second separation means formed of material which does not conduct magnetic flux and disposed with respect to said third and fourth magnetic flux conducting means to form a second concave surface made up by part of said third magnetic flux conducting means, by said second separation means, and by part of said fourth magnetic flux conducting means, said third and fourth magnetic flux conducting means formed to fit within said common aperture and disposed to provide a gap between the combination of said first and second magnetic flux source means and the combination of said third and fourth magnetic flux conducting means, second magnetic flux source means disposed in close proximity to said third and fourth magnetic flux conducting means to provide flux to pass therethrough, said second concave surface designed to be a mirror image of said concave formed inside surface whereby magnetic flux provided by said second magnetic flux source means passes from a first end to a second end of said second concave surface thereby creating a second enclosure, and said second enclosure being between said last mentioned magnetic flux and said second concave surface; first and second anode means respectively disposed within said first and second enclosures; cathode means disposed along said gap; electrical power means connected to said cathode and said anodes to cause an electrostatic field therebetween whereby a region of plasma can be formed in said gap; ionizable fluid disposed in said gap so that when electrical energy is applied to said cathode and to said anodes a plasma forms along said gap.
Claim 2
Dependent Claim 460 words
A cold cathode ion beam source comprising in combination: first and second magnetic flux conducting means with each formed into an endless configuration having a relatively large aperture therethrough, first separation means formed of material which does not conduct magnetic flux and formed into an endless configuration having an aperture therethrough which aperture is larger than said relatively large aperture, said first separation means disposed to separate said first and second magnetic flux conducting means and provide a common aperture, with first and second ends, passing through said first magnetic flux conducting means, through said first separation means, and through said second magnetic flux conducting means said common aperture having an inside surface formed to be concave with said first and second magnetic flux conducting means providing first and second ends of said concave configuration; magnetic flux source means disposed in close proximity to said first and second magnetic flux conducting means to provide flux passing from said first end to said second end of said concave formed inside surface thereby creating a first enclosure between said last mentioned magnetic flux and said concave formed inside surface; third and fourth magnetic flux conducting means separated by second separation means, said second separation means formed of material which does not conduct magnetic flux and disposed with respect to said third and fourth magnetic flux conducting means to form a second concave surface made up by part of said third magnetic flux conducting means, by said second separation means, and by part of said fourth magnetic flux conducting means, said third and fourth magnetic flux conducting means formed to fit within said common aperture and disposed to provide a gap between the combination of said first and second magnetic flux source means and the combination of said third and fourth magnetic flux conducting means, second magnetic flux source means disposed in close proximity to said third and fourth magnetic flux conducting means to provide flux to pass therethrough, said second concave surface designed to be a mirror image of said concave formed inside surface whereby magnetic flux provided by said second magnetic flux source means passes from a first end to a second end of said second concave surface thereby creating a second enclosure, and said second enclosure being between said last mentioned magnetic flux and said second concave surface; first and second anode means respectively disposed within said first and second enclosures; cathode means disposed along said gap; electrical power means connected to said cathode and said anodes to cause an electrostatic field therebetween whereby a region of plasma can be formed in said gap; ionizable fluid disposed in said gap so that when electrical energy is applied to said cathode and to said anodes a plasma forms along said gap.
Claim 3
Dependent Claim 41 words
A cold cathode ion beam source according to claim 1 wherein there is further included a screen formed to be over said gap and connected to said first and second magnetic flux means to have the same electrical voltage value thereof.
Claim 4
Dependent Claim 15 words
A cold cathode ion beam source according to claim 1 wherein said cathode is decoupable.

References Cited (Backward Citations)

US4166018A Cited
US4303865A Cited
US4434038A Cited
US4507588A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1990-11-30 1991-06-01 1991-12-01 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1994-11-30 1995-06-01 1995-12-01 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1998-11-30 1999-06-01 1999-12-01 $7700.00 Window Closed / Lapsed

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