US4721282A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Vacuum chamber gate valve
Assignee: Lam Research Corp
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Filing: 1986-12-16
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Granted: 1988-01-26
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Expires: 2006-12-16
Abstract
Abstract A gate valve assembly includes a housing, a shaft axially mounted within the housing, and a gate member secured to one end of the shaft. A mechanism within the housing is provided for axially extending and rotating the shaft in order to move the gate member into sealing engagement with a port in a processing chamber. By providing an expandable seal about the shaft and secured to the housing, the mechanical drive portion of the valve may be isolated from the interior of the chamber. The valve is particularly suitable for use with loadlocks and other chambers having a low pressure environment.
Inventors
- 👤 Michael J. Shawver
- 👤 Robert T. Lobianco
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 12:48
CPC Classifications
F; F16; F16K; F16K3/00; F16K3/02; F16K3/16; F16K3/18; F16K51/00; F16K51/02
Claims Analysis
Total Claims: 18
Claim 1
Independent Claim
122 words
A gate valve assembly for mounting on a port in a chamber wall, said gate valve comprising: an elongate housing having means at one end for sealing to the chamber wall about the port; a bearing block pivotally mounted within the housing; a shaft slidably received by the bearing block and extending through said one end of the housing; a gate member attached to one end of the shaft; an expandable seal member sealing the shaft to the housing to prevent leakage through the one end; and means in the other end of the housing for translating the shaft through the bearing block and for pivoting the bearing block to move the gate member between an opened position and a closed position.
Claim 2
Dependent Claim
122 words
A gate valve assembly for mounting on a port in a chamber wall, said gate valve comprising: an elongate housing having means at one end for sealing to the chamber wall about the port; a bearing block pivotally mounted within the housing; a shaft slidably received by the bearing block and extending through said one end of the housing; a gate member attached to one end of the shaft; an expandable seal member sealing the shaft to the housing to prevent leakage through the one end; and means in the other end of the housing for translating the shaft through the bearing block and for pivoting the bearing block to move the gate member between an opened position and a closed position.
Claim 3
Dependent Claim
16 words
A gate valve assembly as in claim 1, wherein the means for sealing includes an O-ring.
Claim 4
Dependent Claim
16 words
A gate valve assembly as in claim 2, wherein the expandable seal member includes a bellows.
Claim 5
Dependent Claim
74 words
A gate valve assembly as in claim 1, wherein the means for translating and pivoting the shaft includes a piston and cylinder assembly, a transverse link coupling the piston and cylinder to the shaft, and track means for guiding travel of the link so that the shaft is caused to move axially relative to the housing during a first portion of travel and transversely relative to the housing during a second portion of travel.
Claim 6
Dependent Claim
69 words
A gate valve assembly as in claim 4, wherein the means for translating further includes a spring attaching the link to the shaft and a stop member which stops axial travel of the shaft prior to the end of travel of the piston and cylinder assembly, so that the piston and cylinder assembly will cause the shaft to pivot in the bearing block after axial travel has been stopped.
Claim 7
Dependent Claim
81 words
A gate valve assembly comprising: an elongate housing having at least one opening; a bearing block pivotally mounted within the housing; a shaft slidably received by the bearing block and extending through the one opening; a gate member attached to the end of the shaft which extends through the one opening; and means for translating the shaft through the bearing block and for pivoting the bearing block so that the gate member moves between an opened position and a closed position.
Claim 8
Dependent Claim
81 words
A gate valve assembly comprising: an elongate housing having at least one opening; a bearing block pivotally mounted within the housing; a shaft slidably received by the bearing block and extending through the one opening; a gate member attached to the end of the shaft which extends through the one opening; and means for translating the shaft through the bearing block and for pivoting the bearing block so that the gate member moves between an opened position and a closed position.
Claim 9
Dependent Claim
77 words
A gate valve assembly as in claim 6, wherein the means for translating the shaft includes a piston and cylinder assembly mounted on the housing, a transverse link coupling the piston and cylinder assembly to the shaft, and track means for guiding travel of the link so that the shaft is caused to move axially relative to the housing during a first portion of travel and transversely relative to the housing during a second portion of travel.
Claim 10
Dependent Claim
74 words
A gate valve assembly as in claim 7, wherein the means for translating the shaft includes a spring attaching the link to the shaft and a stop member which stops axial travel of the shaft in the bearing block prior to the end of travel of the piston and cylinder assembly, so that the piston and cylinder assembly will cause the shaft to pivot in the bearing block after axial travel has been stopped.
Claim 11
Dependent Claim
28 words
A gate valve assembly as in claim 6, further including means on the housing proximate the one opening for sealing the housing to a port in a wall.
Claim 12
Dependent Claim
16 words
A gate valve assembly as in claim 9, wherein the means for sealing includes an O-ring.
Claim 13
Dependent Claim
142 words
A gate valve assembly for mounting on a port in a chamber wall, said gate valve comprising: an elongate housing having at least one opening and means proximate the one opening for sealing the housing about the port; a bearing block pivotally mounted within the housing; a shaft slidably received by the bearing block and extending through the one opening; a gate member attached to the end of the shaft which extends through the opening so that said gate member will extend through the port into the chamber when the housing is mounted on the chamber; an expandable seal member sealing the shaft to the housing to prevent leakage through the one opening; and means for translating the shaft through the bearing block and for pivoting the bearing block so that the gate member moves between an opened and a closed position.
Claim 14
Dependent Claim
142 words
A gate valve assembly for mounting on a port in a chamber wall, said gate valve comprising: an elongate housing having at least one opening and means proximate the one opening for sealing the housing about the port; a bearing block pivotally mounted within the housing; a shaft slidably received by the bearing block and extending through the one opening; a gate member attached to the end of the shaft which extends through the opening so that said gate member will extend through the port into the chamber when the housing is mounted on the chamber; an expandable seal member sealing the shaft to the housing to prevent leakage through the one opening; and means for translating the shaft through the bearing block and for pivoting the bearing block so that the gate member moves between an opened and a closed position.
Claim 15
Dependent Claim
16 words
A gate valve assembly as in claim 11, wherein the means for sealing includes an O-ring.
Claim 16
Dependent Claim
16 words
A gate valve assembly as in claim 12, wherein the expandable seal member includes a bellows.
Claim 17
Dependent Claim
77 words
A gate valve assembly as in claim 11, wherein the means for translating the shaft includes a piston and cylinder assembly mounted on the housing, a transverse link coupling the piston and cylinder assembly to the shaft, and track means for guiding travel of the link so that the shaft is caused to move axially relative to the housing during a first portion of travel and transversely relative to the housing during a second portion of travel.
Claim 18
Dependent Claim
75 words
A gate valve assembly as in claim 14, wherein the means for translating the shaft further includes a spring attaching the link to the shaft and a stop member which stops axial travel of the shaft in the bearing block prior to the end of travel of the piston and cylinder assembly, so that the piston and cylinder assembly will cause the shaft to pivot in the bearing block after axial travel has been stopped.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1991-01-25 | 1991-07-27 | 1992-01-26 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1995-01-25 | 1995-07-27 | 1996-01-26 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1999-01-25 | 1999-07-27 | 2000-01-26 | $7700.00 | Window Closed / Lapsed |