Dielectric probe; method and apparatus including its use

Claim 2

A dielectric probe useful for sensing electrical characteristics of materials in contact with it comprising (a) a substrate having an electrical conductivity no greater than 10 -7 mho/cm -1 over a frequency range of use, a loss tangent at one megahertz of less than 0.001, a stable capacitance curve exhibiting little or no hysteresis through the range of 1 herz to 10 megahertz at the temperatures of use, and a known dielectric permittivity of less than 13, and (b) at least two chemically resistant, electrically conductive parallel interdigitated electrodes affixed thereto, the spaces between the digits of the interdigitated electrodes being no greater than about 0.01 inch.

Claim 3

A probe of claim 1 wherein the electrodes are affixed in a pectinate interdigitated configuration.

Claim 4

A probe of claim 1 wherein the electrodes are made of gold, platinum, titanium, tungsten, palladium, chromium or combinations thereof.

Claim 5

A probe of claim 1 wherein the substrate has reproducible capacitance, conductivity, and frequency-responsive characteristics through a temperature range.

Claim 6

Probe of claim 1 including two terminal means for each electrode.

Claim 7

The probe of claim 1 wherein the substrate is selected from a polyimide, glass, or aluminum oxide.

Claim 8

Apparatus for controlling process variables of a medium undergoing chemical or physical change comprising (i) a dielectric probe useful for sensing electrical characteristics of materials in contact with it comprising (a) a substrate having an electrical conductivity no greater than 10 -7 mho/cm -1 over a frequency range of use, a loss tangent at one megahertz of less than 0.001, a stable capacitance curve exhibiting little or no hysteresis through the range of 1 herz to 10 megahertz at the temperatures of use, and a known dielectric permittivity of less than 13, and (b) at least two chemically resistant, electrically conductive parallel interdigitated electrodes affixed thereto, the spaces between the digits of the interdigitated electrodes being no greater than about 0.01 inch, (ii) means for generating a control signal as a predetermined function of an electrical characteristic of a medium in contact with said probe, and (iii) means responsive to said control signal for changing at least one process variable affecting said chemical or physical change.

Claim 9

Apparatus for controlling process variables of a medium undergoing chemical or physical change comprising (i) a dielectric probe useful for sensing electrical characteristics of materials in contact with it comprising (a) a substrate having an electrical conductivity no greater than 10 -7 mho/cm -1 over a frequency range of use, a loss tangent at one megahertz of less than 0.001, a stable capacitance curve exhibiting little or no hysteresis through the range of 1 herz to 10 megahertz at the temperatures of use, and a known dielectric permittivity of less than 13, and (b) at least two chemically resistant, electrically conductive parallel interdigitated electrodes affixed thereto, the spaces between the digits of the interdigitated electrodes being no greater than about 0.01 inch, (ii) means for generating a control signal as a predetermined function of an electrical characteristic of a medium in contact with said probe, and (iii) means responsive to said control signal for changing at least one process variable affecting said chemical or physical change.

Claim 10

Apparatus of claim 7 wherein said control signal generating means is a temperature controller.

Claim 11

Apparatus of claim 7 wherein the control signal responsive means is a heating element.