US4725332A
Expired / Lapsed
US
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Method for monitoring microhole growth during production of microholes having a predetermined diameter
Assignee: GSI Helmholtzzentrum für Schwerionenforschung GmbH
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Filing: 1986-11-20
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Granted: 1988-02-16
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Expires: 2006-11-20
Abstract
Abstract In a method for producing a substrate with microholes having a predetermined diameter, a test region on the substrate is irradiated with a significantly higher dosage of heavy ions than the rest of the substrate. During the development of the nuclear traces by etching, the surface of the substrate in the test region abruptly changes at a certain porosity. This macroscopically observable process is then utilized to interrupt the etching process after a precisely defined time, which is calibrated to provide microholes having a predetermined diameter on the remainder of the substrate.
Inventors
- 👤 Reimar Spohr
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 11:33
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/30; H01J37/304; G; G01; G01N; G01N15/00; G01N15/02
Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
227 words
A method for monitoring microhole growth while producing a substrate having microholes with a predetermined diameter, comprising: irradiating a first region on the substrate with an interrupted beam producing a given dosage of heavy ions of a given type and energy to produce individual nuclear traces in the first region; irradiating a separate second region on the substrate with a dosage of ions higher than the given dosage to produce a bundle of nuclear traces in the second region, the second region serving as a test region and being irradiated with ions of the same type and energy as the ions used to produce the individual nuclear traces in the first region so that the second region can subsequently be employed for monitoring; jointly etching the first and second regions under the same etching conditions for both; monitoring the progress of the etching in the first region by observing the second region to detect a macroscopic change visible to the naked eye in the second region, said macroscopic change having previously been calibrated so that microholes originating from the individual nuclear traces in the first region have attained the predetermined diameter when the macroscopic change in the second region occurs; and discontinuing the etching process when the macroscopic change in the second region occurs in order to obtain microholes having the predetermined diameter in the first region.
Claim 2
Independent Claim
227 words
A method for monitoring microhole growth while producing a substrate having microholes with a predetermined diameter, comprising: irradiating a first region on the substrate with an interrupted beam producing a given dosage of heavy ions of a given type and energy to produce individual nuclear traces in the first region; irradiating a separate second region on the substrate with a dosage of ions higher than the given dosage to produce a bundle of nuclear traces in the second region, the second region serving as a test region and being irradiated with ions of the same type and energy as the ions used to produce the individual nuclear traces in the first region so that the second region can subsequently be employed for monitoring; jointly etching the first and second regions under the same etching conditions for both; monitoring the progress of the etching in the first region by observing the second region to detect a macroscopic change visible to the naked eye in the second region, said macroscopic change having previously been calibrated so that microholes originating from the individual nuclear traces in the first region have attained the predetermined diameter when the macroscopic change in the second region occurs; and discontinuing the etching process when the macroscopic change in the second region occurs in order to obtain microholes having the predetermined diameter in the first region.
Claim 3
Dependent Claim
37 words
The method of claim 1, wherein the step of irradiating the first region and the step of irradiating a separate second region on the substrate are conducted by irradiating one of a band-shaped sheet and a foil.
Claim 4
Dependent Claim
47 words
The method of claim 1, wherein the step of monitoring the progress of the etching comprises at least one of visually observing the second region to observe a macroscopic optical change and electrically monitoring the second region to detect a macroscopic change in the insulating properties thereof.
Claim 5
Dependent Claim
25 words
The method of claim 1, wherein the step of irradiating a separate second region is conducted simultaneously with the step of irradiating the first region.
Claim 6
Dependent Claim
67 words
The method of claim 1, further comprising the step of adjusting at least one of the ion density on the second region and the etching process so that said macroscopic change occurs when the second region reaches a porosity of P≈0.7, the microholes originating from the individual nuclear traces in the first region having attained the predetermined diameter when the second region has a porosity of P≈0.7.
Claim 7
Dependent Claim
66 words
The method of claim 1, further comprising the step of adjusting at least one of the ion density on the second region and the etching process so that said macroscopic change occurs when the second region reaches a porosity of P≈1.0, the microholes originating from the individual traces in the first region having attained the predetermined diameter when the second region has a porosity of P≈1.0.
Claim 8
Dependent Claim
36 words
The method of claim 1, wherein the step of monitoring the progress of the etching comprises monitoring the etching progress to observe a macroscopic change provided by the development of ring holes in the second region.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1991-02-15 | 1991-08-17 | 1992-02-16 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1995-02-15 | 1995-08-17 | 1996-02-16 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1999-02-15 | 1999-08-17 | 2000-02-16 | $7700.00 | Window Closed / Lapsed |