US4725523A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Positive photosensitive compositions with 1,2-naphthoquinone diazide and novolak resin prepared from α-naphthol and p-cresol
Assignee: Mitsubishi Chemical Corp
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Filing: 1986-10-06
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Granted: 1988-02-16
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Expires: 2006-10-06
Abstract
Abstract Disclosed herein is a positive photosensitive composition comprising a 1,2-naphthoquinone diazide compound and a binder resin comprising a novolak resin containing as condensation components β-naphthol, or α-naphthol and p-cresol.
Inventors
- 👤 Konoe Miura
- 👤 Hideki Nagasaka
- 👤 Noriaki Takahashi
- 👤 Tameichi Ochiai
- 👤 Ryuichiro Takasaki
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-03 05:51
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/004; G03F7/022; G03F7/023; G03F7/0233; G03F7/0236
Claims Analysis
Total Claims: 5
Claim 1
Independent Claim
83 words
A positive photosensitive composition which exhibits good resistance to dry etching and which exhibits good sensitivity and low film thickness loss in unexposed areas upon development, consisting essentially of: an admixture of a photosensitive 1,2-naphthoquinone diazide compound and a bindingly effective amount of a novolak resin prepared by condensing an aliphatic aldehyde or an aromatic aldehyde selected from the group consisting of benzaldehyde, 9-anthraldehyde and naphthaldehyde with a phenolic component of a mixture of 40-95 mole % α-naphthol and 5-60 mole % p-cresol.
Claim 2
Dependent Claim
83 words
A positive photosensitive composition which exhibits good resistance to dry etching and which exhibits good sensitivity and low film thickness loss in unexposed areas upon development, consisting essentially of: an admixture of a photosensitive 1,2-naphthoquinone diazide compound and a bindingly effective amount of a novolak resin prepared by condensing an aliphatic aldehyde or an aromatic aldehyde selected from the group consisting of benzaldehyde, 9-anthraldehyde and naphthaldehyde with a phenolic component of a mixture of 40-95 mole % α-naphthol and 5-60 mole % p-cresol.
Claim 3
Dependent Claim
14 words
The composition according to claim 1, wherein the aliphatic aldehyde is formaldehyde or acetaldehyde.
Claim 4
Dependent Claim
24 words
The composition according to claim 1, wherein the weight-average molecular weight of the novolak resin is in the range of from 800 to 10,000.
Claim 5
Dependent Claim
19 words
The composition according to claim 1, wherein the 1,2-naphthoquinone diazide compound is the ester of 1,2-naphthoquinone-2-diazide-5-sulfonic acid and 2,3,4-trihydroxybenzophenone.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1991-02-15 | 1991-08-17 | 1992-02-16 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1995-02-15 | 1995-08-17 | 1996-02-16 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1999-02-15 | 1999-08-17 | 2000-02-16 | $7700.00 | Window Closed / Lapsed |