Abstract A gas detector includes a gas detecting element comprised of a metal oxide semiconductor material which changes its value of electrical resistance at an elevated temperature when it absorbs a gas. In one form, the gas detecting element is supported in the form of a bridge so as to increase its response speed by making thermal capacity as small as possible. In another form, the gas detecting element is supported in the form a cantilever, more preferably in the form of a ring as formed along the periphery of a overhang portion of a disc-shaped layer of electrically insulating material. Also provided is a process for manufacturing a thin film of metal oxide, which may be advantageously used as a gas detecting element of a gas detector or a transparent electrode, for example, in a liquid crystal panel.
A method for manufacturing a film of metal oxide comprising the steps of: forming a thin film of metal on a substrate; reacting said thin film of metal with a dilute nitric acid thereby converting the film into a first film of a reactant produced in a reaction between said metal and said dilute nitric acid; and thermally decomposing said first film thereby converting said first film into a film of a metal oxide which is produced during the thermal decomposition.
Claim 2
Independent Claim
81 words
A method for manufacturing a film of metal oxide comprising the steps of: forming a thin film of metal on a substrate; reacting said thin film of metal with a dilute nitric acid thereby converting the film into a first film of a reactant produced in a reaction between said metal and said dilute nitric acid; and thermally decomposing said first film thereby converting said first film into a film of a metal oxide which is produced during the thermal decomposition.
Claim 3
Dependent Claim
10 words
A method of claim 1 wherein said metal comprises Sn.
Claim 4
Dependent Claim
10 words
A method of claim 1 wherein said metal comprises Al.
Claim 5
Dependent Claim
25 words
A method of claim 2 wherein said metal oxide film is a gas detecting film which changes its electrical resistance when it absorbs a gas.
Claim 6
Dependent Claim
15 words
A method of claim 2 wherein said metal oxide film is a transparent electrode film.
Claim 7
Dependent Claim
25 words
A method of claim 3 further comprising the step of depositing Pt and Pd onto said film of metal prior to the step of reacting.