Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
181 words
A non-contact Z-axis probe for making height measurements comprising: an optical system for projecting a given image from a reticle through a beamsplitting mirror to form a projected image on a selected area that is aligned with the beamsplitting mirror along the Z axis, said reticle being located a fixed distance from said beamsplitting mirror; a video camera and said optical system mounted for movement in the Z direction and adapted to move in the Z direction, said camera located a fixed distance from said beamsplitting mirror along the Z axis for viewing said projected image, said video camera continuously scanning reflected energy from said projected image while said camera is moved in the Z axis for generating an output signal that varies in amplitude as a function of distance from said selected area, and a computer for statistically evaluating the output signal to determine the theoretical maximum amplitude of a focus indicating characteristic of the output signals and correlating that theoretical maximum amplitude with the position of said camera as a function of height of camera above said selected area.
Claim 2
Dependent Claim
181 words
A non-contact Z-axis probe for making height measurements comprising: an optical system for projecting a given image from a reticle through a beamsplitting mirror to form a projected image on a selected area that is aligned with the beamsplitting mirror along the Z axis, said reticle being located a fixed distance from said beamsplitting mirror; a video camera and said optical system mounted for movement in the Z direction and adapted to move in the Z direction, said camera located a fixed distance from said beamsplitting mirror along the Z axis for viewing said projected image, said video camera continuously scanning reflected energy from said projected image while said camera is moved in the Z axis for generating an output signal that varies in amplitude as a function of distance from said selected area, and a computer for statistically evaluating the output signal to determine the theoretical maximum amplitude of a focus indicating characteristic of the output signals and correlating that theoretical maximum amplitude with the position of said camera as a function of height of camera above said selected area.
Claim 3
Dependent Claim
42 words
A non-contact Z-axis probe according to claim 1 in which said given image is projected on a selected area located on a surface and in which said computer determines the distance of the camera from said selected area located on the surface.
Claim 4
Dependent Claim
44 words
A Z-axis probe according to claim 1 in which said given image comprises a plurality of equally spaced parallel lines, and in which said parallel lines are projected in a preferred orientation other than parallel to a line scan direction of said video camera.
Claim 5
Dependent Claim
26 words
A Z-axis probe according to claim 3 in which the parallel lines on said image are perpendicular to the scan lines direction of said video camera.
Claim 6
Dependent Claim
18 words
A Z-axis probe according to claim 3 in which said parallel lines are formed by a Ronchi ruling.
Claim 7
Dependent Claim
69 words
A Z-axis probe according to claim 3 in which a preferred spacing of parallel bars is selected relative to the scan rate of said video camera for generating a discrete frequency signal at each scan while said camera is moved in the Z direction and in which the amplitude of each signal is a function of the distance of the camera from the projected image on said selected area.
Claim 8
Dependent Claim
43 words
A Z-axis probe according to claim 1 in which the output signal from said video camera is fed through a filter whereby the amplitude of said output signal is a function of height of camera above the projected image on said selected area.