US4745422A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Automatic developing apparatus
Assignee: Sigma Corp
•
Filing: 1986-11-17
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Granted: 1988-05-17
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Expires: 2006-11-17
Abstract
Abstract An automatic developing apparatus comprises a developing tank and a pipe for introducing a developing solution into the developing tank. The developing tank is constituted by a stage on which a substrate is to be set, and a processing case movable relative to the stage, to receive said stage.
Inventors
- 👤 Yasuo Matsuoka
- 👤 Kinya Usuda
- 👤 Michiro Takano
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-27 17:08
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/26; G03F7/30; G03F7/3021; Y; Y10; Y10S; Y10S134/00; Y10S134/902
Claims Analysis
Total Claims: 22
Claim 1
Independent Claim
74 words
An automatic developing apparatus comprising: a stage on which a substrate is to be set; a processing case which is moved relative to said stage to receive said stage, and which has a bottom wall and an outlet formed in the bottom wall, said stage being brought into contact with the bottom wall to hermetically close the outlet, thereby constituting a developing tank; and means for supplying a developing solution to said developing tank.
Claim 2
Dependent Claim
74 words
An automatic developing apparatus comprising: a stage on which a substrate is to be set; a processing case which is moved relative to said stage to receive said stage, and which has a bottom wall and an outlet formed in the bottom wall, said stage being brought into contact with the bottom wall to hermetically close the outlet, thereby constituting a developing tank; and means for supplying a developing solution to said developing tank.
Claim 3
Dependent Claim
23 words
An automatic developing apparatus according to claim 1, which further comprises rotation means coupled to said stage, for the rotation of the same.
Claim 4
Dependent Claim
23 words
An automatic developing apparatus according to claim 2, which further comprises drive means for vertically driving one of said processing case and stage.
Claim 5
Dependent Claim
30 words
An automatic developing apparatus according to claim 2, wherein said rotation means comprises a shaft connected to said stage, and a motor for imparting a rotational movement to said shaft.
Claim 6
Dependent Claim
28 words
An automatic developing apparatus according to claim 4, which further comprises discharging means connected to the outlet port of said processing case, to draw out a fluid therefrom.
Claim 7
Dependent Claim
26 words
An automatic developing apparatus according to claim 4, wherein a fluid passage is formed in said stage and shaft, and is provided with temperature-controlled fluid-supply means.
Claim 8
Dependent Claim
49 words
An automatic developing apparatus according to claim 6, wherein temperature-sensing means is provided to detect the temperature of a liquid held in said developing tank; and said temperature-controlled fluid-supply means enables said fluid passage to receive the fluid whose temperature corresponds to a control signal from said temperature-sensing means.
Claim 9
Dependent Claim
20 words
An automatic developing apparatus according to claim 7, further comprises a nozzle for spraying a rinsing liquid over said stage.
Claim 10
Dependent Claim
37 words
An automatic developing apparatus according to claim 7, which further comprises a housing surrounding the stage and processing case, and means for introducing an inert gas into said housing, in order to control the temperature prevailing therein.
Claim 11
Dependent Claim
23 words
An automatic developing apparatus according to claim 3, which further comprises a nozzle through which a rinsing liquid is sprayed over said stage.
Claim 12
Dependent Claim
39 words
An automatic developing apparatus according to claim 3, which further comprises a housing surrounding said stage and processing case, and inert-gas feeding means for introducing an inert gas into said housing, in order to control the temperture prevailing therein.
Claim 13
Dependent Claim
42 words
An automatic developing apparatus according to claim 3, wherein said processing case comprises an outlet which, after said processing case is separated from said stage after completion of a developing process allows for discharging a developing solution held in said processing case.
Claim 14
Dependent Claim
23 words
An automatic developing apparatus according to claim 2, which further comprises a nozzle through which a rinsing liquid is sprayed over said stage.
Claim 15
Dependent Claim
39 words
An automatic developing apparatus according to claim 2, which further comprises a housing surrounding said stage and processing case, and inert gasfeeding means for introducing an inert gas into said housing, in order to control a temperature prevailing therein.
Claim 16
Dependent Claim
33 words
An automatic developing apparatus according to claim 2, wherein said processing case comprises an outlet which, after completion of a developing process, allows for discharging a developing solution held in said processing case.
Claim 17
Dependent Claim
25 words
An automatic developing apparatus according to claim 1, wherein there is further provided a nozzle through which a rinsing liquid is sprayed over said stage.
Claim 18
Dependent Claim
39 words
An automatic developing apparatus according to claim 1, which further comprises a housing surrounding said stage and processing case, and inert gas-feeding means for introducing an inert gas into said housing, in order to control a temperature prevailing therein.
Claim 19
Dependent Claim
23 words
An automatic developing apparatus according to claim 1, which further comprises drive means for vertically driving one of said stage and processing case.
Claim 20
Dependent Claim
42 words
An automatic developing apparatus according to claim 1, wherein said processing case comprises an outlet which, after said processing case is removed from said stage after completion of a developing process, allows for discharging a developing solution held in said processing case.
Claim 21
Dependent Claim
19 words
An automatic developing apparatus according to claim 2, which further comprises a heating element fitted inside said developing tank.
Claim 22
Dependent Claim
32 words
An automatic developing apparatus according to claim 20, wherein said heating element comprises a heating plate held inside said developing tank, with a space allowed between said heating plate and processing case.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1991-05-17 | 1991-11-16 | 1992-05-17 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1995-05-17 | 1995-11-16 | 1996-05-17 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1999-05-17 | 1999-11-16 | 2000-05-17 | $7700.00 | Window Closed / Lapsed |