US4750979A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Process for etching lithium niobate based devices without damaging optical waveguides
Assignee: The AT&T MVPD Group LLC
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Filing: 1984-11-26
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Granted: 1988-06-14
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Expires: 2004-11-26
Abstract
Abstract The present invention provides a method of preparing the surface of a lithium niobate substrate (10) having titanium optical waveguides (12) for a subsequent deposition of a coating material such as electrodes. This cleaning or etching step prior to the deposit of desired coating materials is accomplished without deterioration of the transmission capacities of the optical waveguides (12). The substrate cleaning step of the present invention comprises the introduction of a predetermined amount of oxygen (16) at a controlled rate to provide a predetermined atmospheric environment surrounding the lithium niobate substrate (10). The subsequent etching of the substrate surface to a predetermined depth, for example, by argon ion bombardment, provides minimal damage to the optical waveguides while still producing an excellently cleaned surface preparatory for receiving subsequent layer depositions such as the electrodes.
Inventors
- 👤 Caroline M. Gee
- 👤 Hugh L. Garvin
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 15:00
CPC Classifications
C; C04; C04B; C04B41/00; C04B41/009; C04B41/53; C04B41/5338; C04B41/5346; C04B41/80; C04B41/91; H; H01; H01P; H01P11/00; H01P11/001
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
89 words
A method of preparing the surface of a substrate with optical waveguides for subsequent deposition of electrodes comprising the steps of: providing a LiNbO 3 substrate having optical waveguides therein; providing an inert gas environment capable of forming a plasma surrounding said LiNbO 3 substrate; introducing oxygen into the inert gas environment to form an oxygen-enriched environment surrounding the substrate, and etching the substrate surface to a predetermined depth by ion bombardment in the presence of the oxygen-enriched environment whereby minimal optical loss is incurred in the optical waveguides.
Claim 2
Independent Claim
89 words
A method of preparing the surface of a substrate with optical waveguides for subsequent deposition of electrodes comprising the steps of: providing a LiNbO 3 substrate having optical waveguides therein; providing an inert gas environment capable of forming a plasma surrounding said LiNbO 3 substrate; introducing oxygen into the inert gas environment to form an oxygen-enriched environment surrounding the substrate, and etching the substrate surface to a predetermined depth by ion bombardment in the presence of the oxygen-enriched environment whereby minimal optical loss is incurred in the optical waveguides.
Claim 3
Dependent Claim
26 words
The method of claim 1 wherein the environment comprises oxygen and argon having a ratio of approximately 2.5 mTorr of oxygen to 3.5 mTorr of argon.
Claim 4
Dependent Claim
18 words
The method of claim 1 wherein the etching is for a period of two minutes at 150 watts.
Claim 5
Dependent Claim
27 words
The method of claim 1 wherein oxygen constitutes approximately 45% of the environment and the substrate surface is etched to a depth between 50 to 100 angstroms.
Claim 6
Independent Claim
135 words
A method of forming an electro-optical device having optical waveguides and electrodes comprising the steps of: placing an LiNbO 3 substrate having titanium diffused optical waveguides patterned adjacent the surface into a deposition chamber of an RF plasma sputtering system; cleaning the substrate to prepare the surface for the deposition of an electrode material including: (a) introducing oxygen and argon into the deposition chamber to create an oxygen-enriched environment in the depositing chamber wherein oxygen and argon are each within the pressure range of between 1.5 to 4 mTorr; and (b) etching the substrate surface with argon ions in the presence of the oxygen-enriched environment in the depositing chamber; evacuating the depositing chamber of the oxygen-enriched environment; and sputtering the electrode material on the substrate whereby minimal optical loss is incurred in the optical waveguides.
Claim 7
Independent Claim
135 words
A method of forming an electro-optical device having optical waveguides and electrodes comprising the steps of: placing an LiNbO 3 substrate having titanium diffused optical waveguides patterned adjacent the surface into a deposition chamber of an RF plasma sputtering system; cleaning the substrate to prepare the surface for the deposition of an electrode material including: (a) introducing oxygen and argon into the deposition chamber to create an oxygen-enriched environment in the depositing chamber wherein oxygen and argon are each within the pressure range of between 1.5 to 4 mTorr; and (b) etching the substrate surface with argon ions in the presence of the oxygen-enriched environment in the depositing chamber; evacuating the depositing chamber of the oxygen-enriched environment; and sputtering the electrode material on the substrate whereby minimal optical loss is incurred in the optical waveguides.
Claim 8
Dependent Claim
24 words
The method of claim 5 wherein the etching of the substrate surface is accomplished for a period of approximately two minutes at 150 watts.
Claim 9
Independent Claim
170 words
A method of forming an electro-optical device having an optical waveguide and an electrode in an RF plasma sputtering machine with a depositing chamber comprising the steps of: placing an LiNbO 3 substrate having titanium diffused optical waveguides patterned adjacent the surface into the depositing chamber of the RF plasma sputtering system; cleaning the substrate to prepare the surface for the deposition of an electrode material with an inert gas plasma including: (a) introducing argon into the depositing chamber; (b) introducing oxygen into the depositing chamber to form an oxygen-enriched atmosphere to constitute less than 50 percent of the total pressure but greater than 30 percent of the total pressure of the depositing chamber; (c) etching the substrate surface with a plasma of argon ions in the presence of the oxygen-enriched atmosphere in the depositing chamber in a pressure range 1.5 to 4 mTorr; evacuating the depositing chamber of the oxygen-enriched atmosphere; and sputtering the electrode material on the substrate whereby minimal optical loss is incurred in the optical waveguides.
Claim 10
Independent Claim
170 words
A method of forming an electro-optical device having an optical waveguide and an electrode in an RF plasma sputtering machine with a depositing chamber comprising the steps of: placing an LiNbO 3 substrate having titanium diffused optical waveguides patterned adjacent the surface into the depositing chamber of the RF plasma sputtering system; cleaning the substrate to prepare the surface for the deposition of an electrode material with an inert gas plasma including: (a) introducing argon into the depositing chamber; (b) introducing oxygen into the depositing chamber to form an oxygen-enriched atmosphere to constitute less than 50 percent of the total pressure but greater than 30 percent of the total pressure of the depositing chamber; (c) etching the substrate surface with a plasma of argon ions in the presence of the oxygen-enriched atmosphere in the depositing chamber in a pressure range 1.5 to 4 mTorr; evacuating the depositing chamber of the oxygen-enriched atmosphere; and sputtering the electrode material on the substrate whereby minimal optical loss is incurred in the optical waveguides.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1991-06-14 | 1991-12-14 | 1992-06-14 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1995-06-14 | 1995-12-14 | 1996-06-14 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1999-06-14 | 1999-12-14 | 2000-06-14 | $7700.00 | Window Closed / Lapsed |