US4761464A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Interrupted polysilanes useful as photoresists
Assignee: GOVERNMENT OF UNITED STATES ENERGY THE, Department of
•
Filing: 1986-09-23
•
Granted: 1988-08-02
•
Expires: 2006-09-23
Abstract
Abstract Polysilane polymers in which the Si backbone is interrupted by atoms such as O, Ge, Sn, P, etc., are useful photoresists especially in the solvent development mode.
Inventors
- 👤 John M. Zeigler
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 16:12
CPC Classifications
C; C08; C08G; C08G77/00; C08G77/48; C08G77/58; C08G77/54; G; G03; G03F; G03F7/00; G03F7/004; G03F7/075; G03F7/0754; G03F7/0757
Claims Analysis
Total Claims: 16
Claim 1
Independent Claim
448 words
A polymer of the formula ##STR3## wherein X is SiR 5 R 6 , O, NR 5 , SnR 5 R 6 , GeR 5 R 6 , S, PR 5 , P(═O)R 5 , AsR 5 , Se or Te, Y is independently a group defined for X, Z is C, Si, Ge, Sn, P or P(═O), R 1-6 each independently is (a) H; (b) C 6-10 -aryl; (c) C 1-15 -alkyl; (d) C 3-15 -cycloalkyl; (e) a heterocyclic group of 1-3 fused rings, each containing 4-7 ring atoms, 1-3 of which in each ring are O, N or S, the remainder being C-atoms; (f) one of (b)-(e) wherein a H-atom is replaced by C 1-10 -alkyl, C 6-10 -aryl, C 3-15 -cycloalkyl, C 1-10 -alkoxy, OH, SH, NH 2 , NH(C 1-10 -alkyl), N(C 1-10 -alkyl) (C 1-10 -alkyl), or C 1-10 -(alkoxyalkyl); (g) --SiR 7 R 8 R 9 ; (h) GeR 7 R 8 R 9 ; or (i) SnR 7 R 8 R 9 ; R 7-9 each independently is (a) H; (b) C 6-10 -aryl; (c) C 1-15 -alkyl; (d) C 3-15 -cycloalkyl; (e) a heterocyclic group of 1-3 fused rings, each containing 4-7 ring atoms, 1-3 of which in each ring are O, N or S, the remainder being C-atoms; or (f) one of (b)-(e) wherein H-atoms is replaced by C 1-10 -alkyl, C 6-10 -aryl, C 3-15 -cycloalkyl, C 1-10 -alkoxy, OH, SH, NH 2 , NH(C 1-10 -alkyl), N(C 1-10 -alkyl) (C 1-10 -alkyl), or C 1-10 -(alkoxyalkyl); m is 2 to about 10; n is 0 to about 100, and o is about 10 to about 100, with the provisos that (a) at least one of X, Y and Z represents a group wherein the atom in the main polymer chain is not Si, (b) when n=0, then X and Y are not both O or N, (c) when X and Y is GeR 5 R 6 or Z is Ge, then at least one of X, Y or Z is a group wherein the atom in the main polymer chain is not Ge and is not Si, (d) when one of R 1-9 is alkyl-containing, then the total number of C-atoms in all alkyl groups on the atom in the main polymer chain to which it is bonded is not more than 25, (e) when Z is P or P(═O), R 4 is not present, (f) there are no O--N bonds in the polymer backbone and (g) when the polymer backbone has only Si and O atoms, R 1 is isopropyl, C 4-15 -alkyl, C 6-10 -aryl or one of (d)-(i) defined above for R 1 .
Claim 2
Dependent Claim
448 words
A polymer of the formula ##STR3## wherein X is SiR 5 R 6 , O, NR 5 , SnR 5 R 6 , GeR 5 R 6 , S, PR 5 , P(═O)R 5 , AsR 5 , Se or Te, Y is independently a group defined for X, Z is C, Si, Ge, Sn, P or P(═O), R 1-6 each independently is (a) H; (b) C 6-10 -aryl; (c) C 1-15 -alkyl; (d) C 3-15 -cycloalkyl; (e) a heterocyclic group of 1-3 fused rings, each containing 4-7 ring atoms, 1-3 of which in each ring are O, N or S, the remainder being C-atoms; (f) one of (b)-(e) wherein a H-atom is replaced by C 1-10 -alkyl, C 6-10 -aryl, C 3-15 -cycloalkyl, C 1-10 -alkoxy, OH, SH, NH 2 , NH(C 1-10 -alkyl), N(C 1-10 -alkyl) (C 1-10 -alkyl), or C 1-10 -(alkoxyalkyl); (g) --SiR 7 R 8 R 9 ; (h) GeR 7 R 8 R 9 ; or (i) SnR 7 R 8 R 9 ; R 7-9 each independently is (a) H; (b) C 6-10 -aryl; (c) C 1-15 -alkyl; (d) C 3-15 -cycloalkyl; (e) a heterocyclic group of 1-3 fused rings, each containing 4-7 ring atoms, 1-3 of which in each ring are O, N or S, the remainder being C-atoms; or (f) one of (b)-(e) wherein H-atoms is replaced by C 1-10 -alkyl, C 6-10 -aryl, C 3-15 -cycloalkyl, C 1-10 -alkoxy, OH, SH, NH 2 , NH(C 1-10 -alkyl), N(C 1-10 -alkyl) (C 1-10 -alkyl), or C 1-10 -(alkoxyalkyl); m is 2 to about 10; n is 0 to about 100, and o is about 10 to about 100, with the provisos that (a) at least one of X, Y and Z represents a group wherein the atom in the main polymer chain is not Si, (b) when n=0, then X and Y are not both O or N, (c) when X and Y is GeR 5 R 6 or Z is Ge, then at least one of X, Y or Z is a group wherein the atom in the main polymer chain is not Ge and is not Si, (d) when one of R 1-9 is alkyl-containing, then the total number of C-atoms in all alkyl groups on the atom in the main polymer chain to which it is bonded is not more than 25, (e) when Z is P or P(═O), R 4 is not present, (f) there are no O--N bonds in the polymer backbone and (g) when the polymer backbone has only Si and O atoms, R 1 is isopropyl, C 4-15 -alkyl, C 6-10 -aryl or one of (d)-(i) defined above for R 1 .
Claim 3
Dependent Claim
23 words
A polymer of claim 1, wherein the main chain atom in one of X, Y and Z is Ge and one is O.
Claim 4
Dependent Claim
20 words
A polymer of claim 1, wherein the main chain atoms of X, Y and Z are all Si or Sn.
Claim 5
Dependent Claim
20 words
A polymer of claim 1, wherein the main chain atoms of X, Y and Z are all Si or P.
Claim 6
Dependent Claim
409 words
A polymer of the formula ##STR4## wherein X is SiR 5 R 6 or O, Y is independently a group defined for X, Z is Si, R 1 is (a) isopropyl; (b) C 4-15 -alkyl; (c) C 6-10 -aryl; (d) C 3-15 -cycloalkyl; (e) a heterocyclic group of 1-3 fused rings, each containing 4-7 ring atoms, 1-3 of which in each ring are O, N or S, the remainder being C-atoms; (f) one of (b)-(e) wherein a H-atom is replaced by C 1-10 -alkyl, C 6-10 -aryl, C 3-15 -cycloalkyl, C 1-10 -alkoxy, OH, SH, NH 2 , NH(C 1-10 -alkyl), N(C 1-10 -alkyl) (C 1-10 -alkyl), or C 1-10 -(alkoxyalkyl); (g) --SiR 7 R 8 R 9 ; (h) GeR 7 R 8 R 9 ; or (i) SnR 7 R 8 R 9 ; R 2-5 each independently is (a) H; (b) C 6-10 -aryl; (c) C 1-15 -alkyl; (d) C 3-15 -cycloalkyl; (e) a heterocyclic group of 1-3 fused rings, each containing 4-7 ring atoms, 1-3 of which in each ring are O, N or S, the remainder being C-atoms, (f) one of (b)-(e) wherein a H-atom is replaced by C 1-10 -alkyl, C 6-10 -aryl, C 3-15 -cycloalkyl, C 1-10 -alkoxy, OH, SH, NH 2 , NH(C 1-10 -alkyl, ) N(C 1-10 -alkyl) (C 1-10 -alkyl), or C 1-10 -(alkoxyalkyl); (g) --SiR 7 R 8 R 9 ; (h) GeR 7 R 8 R 9 ; or (i) SnR 7 R 8 R 9 ; R 7-9 each independently is (a) H; (b) C 6-10 -aryl; (c) C 1-15 -alkyl; (d) C 3-15 -cycloalkyl; (e) a heterocyclic group of 1-3 fused rings, each containing 4-7 ring atoms, 1-3 of which in each ring are O, N or S, the remainder being C-atoms; or (f) one of (b)-(e) wherein a H-atom is replaced by C 1-10 -alkyl, C 6-10 -aryl, C 3-15 -cycloalkyl, C 1-10 -alkoxy, OH, SH, NH 2 , NH(C 1-10 -alkyl), N(C 1-10 -alkyl) (C 1-10 -alkyl), or C 1-10 -(alkoxyalkyl); m is 2 to about 10; n is 0 to about 100, and o is about 10 to about 100, with the provisos that (a) when n=0, then X and Y are not both O, and (b) when one of R 1-9 is alkyl-containing, then the total number of C-atoms in all alkyl groups on the atom in the main polymer chain to which it is bonded is not more than 25.
Claim 7
Dependent Claim
409 words
A polymer of the formula ##STR4## wherein X is SiR 5 R 6 or O, Y is independently a group defined for X, Z is Si, R 1 is (a) isopropyl; (b) C 4-15 -alkyl; (c) C 6-10 -aryl; (d) C 3-15 -cycloalkyl; (e) a heterocyclic group of 1-3 fused rings, each containing 4-7 ring atoms, 1-3 of which in each ring are O, N or S, the remainder being C-atoms; (f) one of (b)-(e) wherein a H-atom is replaced by C 1-10 -alkyl, C 6-10 -aryl, C 3-15 -cycloalkyl, C 1-10 -alkoxy, OH, SH, NH 2 , NH(C 1-10 -alkyl), N(C 1-10 -alkyl) (C 1-10 -alkyl), or C 1-10 -(alkoxyalkyl); (g) --SiR 7 R 8 R 9 ; (h) GeR 7 R 8 R 9 ; or (i) SnR 7 R 8 R 9 ; R 2-5 each independently is (a) H; (b) C 6-10 -aryl; (c) C 1-15 -alkyl; (d) C 3-15 -cycloalkyl; (e) a heterocyclic group of 1-3 fused rings, each containing 4-7 ring atoms, 1-3 of which in each ring are O, N or S, the remainder being C-atoms, (f) one of (b)-(e) wherein a H-atom is replaced by C 1-10 -alkyl, C 6-10 -aryl, C 3-15 -cycloalkyl, C 1-10 -alkoxy, OH, SH, NH 2 , NH(C 1-10 -alkyl, ) N(C 1-10 -alkyl) (C 1-10 -alkyl), or C 1-10 -(alkoxyalkyl); (g) --SiR 7 R 8 R 9 ; (h) GeR 7 R 8 R 9 ; or (i) SnR 7 R 8 R 9 ; R 7-9 each independently is (a) H; (b) C 6-10 -aryl; (c) C 1-15 -alkyl; (d) C 3-15 -cycloalkyl; (e) a heterocyclic group of 1-3 fused rings, each containing 4-7 ring atoms, 1-3 of which in each ring are O, N or S, the remainder being C-atoms; or (f) one of (b)-(e) wherein a H-atom is replaced by C 1-10 -alkyl, C 6-10 -aryl, C 3-15 -cycloalkyl, C 1-10 -alkoxy, OH, SH, NH 2 , NH(C 1-10 -alkyl), N(C 1-10 -alkyl) (C 1-10 -alkyl), or C 1-10 -(alkoxyalkyl); m is 2 to about 10; n is 0 to about 100, and o is about 10 to about 100, with the provisos that (a) when n=0, then X and Y are not both O, and (b) when one of R 1-9 is alkyl-containing, then the total number of C-atoms in all alkyl groups on the atom in the main polymer chain to which it is bonded is not more than 25.
Claim 8
Dependent Claim
41 words
A polymer of claim 5, wherein R 1-9 are one of said aryl, alkyl, cycloalkyl groups or one of said groups substituted by one of said alkyl, aryl, cycloalkyl, alkoxy, NH(C 1-10 -alkyl) or N(C 1-10 -alkyl) (C 1-10 -alkyl) groups.
Claim 9
Dependent Claim
21 words
A polymer of claim 5, wherein R 1-9 are C 1-6 -alkyl, phenyl, C 1-4 -alkylphenyl, phenyl-C 1-4 -alkyl, or cyclohexyl.
Claim 10
Dependent Claim
15 words
A polymer of claim 5, wherein R 1-9 are isopropyl, phenyl, cyclohexyl, phenethyl, or 3-dimethylaminopropyl.
Claim 11
Dependent Claim
32 words
A polymer of claim 5, wherein m, n and o are chosen such that the T g of the resultant polymer is above about 40° C. and the polymer is substantially non-crystalline.
Claim 12
Dependent Claim
20 words
A polymer of claim 1, wherein at least one of R 1-6 is GeR 7 R 8 R 9 .
Claim 13
Dependent Claim
10 words
A polymer of claim 5, which is a block copolymer.
Claim 14
Dependent Claim
10 words
A polymer of claim 5, which is a random copolymer.
Claim 15
Dependent Claim
10 words
A polymer of claim 1, which is a random copolymer.
Claim 16
Dependent Claim
14 words
A polymer of claim 5, wherein R 7-9 each independently is H or alkyl.
References Cited (Backward Citations)
US2554976A
Cited
US2696480A
Cited
US2816089A
Cited
US2998440A
Cited
US2956045A
Cited
US3165494A
Cited
US3318823A
Cited
US3328346A
Cited
US3321501A
Cited
US3393218A
Cited
US3344161A
Cited
US3414597A
Cited
US3340228A
Cited
US3532731A
Cited
US3511862A
Cited
US3706591A
Cited
US3717665A
Cited
US3830780A
Cited
US3903047A
Cited
US4273420A
Cited
US4247674A
Cited
US4358576A
Cited
US4558112A
Cited
US4391963A
Cited
US4523001A
Cited
US4569953A
Cited
US4587205A
Cited
US4588801A
Cited
US4618666A
Cited
US4626583A
Cited
US4639501A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1991-08-02 | 1992-02-01 | 1992-08-02 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1995-08-02 | 1996-02-01 | 1996-08-02 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1999-08-02 | 2000-02-01 | 2000-08-02 | $7700.00 | Window Closed / Lapsed |