US4768011A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Joint structure for diamond body and metallic body
Assignee: Soken Inc
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Filing: 1986-12-24
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Granted: 1988-08-30
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Expires: 2006-12-24
Abstract
Abstract A pressure detector has a cylindrical housing projecting into an atmosphere the pressure of which to be measured, a pressure chamber formed within the housing, to which is the pressure to be measured is introduced, a metallic diaphragm formed on a surface of one portion of a wall defining the pressure chamber, which deforms in accordance with changes in the pressure which is to be measured, and a strain gauge provided in the diaphragm for generating an output signal corresponding to the strain generated due to the deformation of the diaphragm. The strain gauge is composed of a diamond monocrystal plate and a diamond semiconductor film formed on the diamond monocrystal plate. On the diamond monocrystal plate are piled a titanium film, a platinum film, and a gold film, in sequence. The gold film is joined to the diaphragm by brazing.
Inventors
- 👤 Yutaka Hattori
- 👤 Novuei Ito
- 👤 Kazuhiro Inoguchi
- 👤 Tadashi Hattori
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-07 15:02
CPC Classifications
G; G01; G01L; G01L9/00; G01L9/0041; G01L9/0051; G01L9/0052; G01L9/0055; C; C04; C04B; C04B37/00; C04B37/02; C04B37/023; C04B37/026; C04B2237/00; C04B2237/02; C04B2237/12; C04B2237/122; C04B2237/125; C04B2237/30; C04B2237/32; C04B2237/36; C04B2237/363; C04B2237/40; C04B2237/50; C04B2237/59; C04B2237/592; C04B2237/72
Claims Analysis
Total Claims: 31
Claim 1
Independent Claim
35 words
A diamond-to-metal joint structure, comprising: a diamond body; a titanium film formed on said diamond body; a gold film formed on said titanium film; and a metallic body to which said gold film is joined.
Claim 2
Dependent Claim
35 words
A diamond-to-metal joint structure, comprising: a diamond body; a titanium film formed on said diamond body; a gold film formed on said titanium film; and a metallic body to which said gold film is joined.
Claim 3
Dependent Claim
25 words
A joint structure according to claim 1, wherein said diamond body is a diamond monocrystal body having formed thereon a diamond semiconductor containing an impurity.
Claim 4
Dependent Claim
20 words
A joint structure according to claim 2, wherein said diamond semiconductor is a P-type semiconductor containing boron as said impurity.
Claim 5
Dependent Claim
20 words
A joint structure according to claim 2, wherein said diamond semiconductor is a N-type semiconductor containing phosphor as said impurity.
Claim 6
Dependent Claim
19 words
A joint structure according to claim 1, wherein said titanium film is constituted by a condensate of evaporated titanium.
Claim 7
Dependent Claim
19 words
A joint structure according to claim 1, wherein said gold film is constituted by a condensate of evaporated gold.
Claim 8
Dependent Claim
19 words
A joint structure according to claim 1, wherein said titanium film is constituted by a sputtered coating of titanium.
Claim 9
Dependent Claim
19 words
A joint structure according to claim 1, wherein said gold film is constituted by a sputtered coating of gold.
Claim 10
Dependent Claim
56 words
A joint structure according to claim 1, wherein each of said titanium film and said gold film is formed by mixing one of a titanium powder and a gold powder with a solvent into a paste, pattern-printing said paste, and firing said pattern-printed paste within an atmosphere of a gas out of hydrogen, nitrogen and steam.
Claim 11
Dependent Claim
17 words
A joint structure according to claim 1, wherein said gold film is brazed to said metallic body.
Claim 12
Dependent Claim
18 words
A joint structure according to claim 1, wherein said gold film is wire bonded to said metallic body.
Claim 13
Dependent Claim
43 words
A diamond-to-metal joint structure, comprising: a diamond body; a titantium film formed on said diamond body; a platinum film formed on said titanium film; a gold film formed on said platinum film; and a metallic body to which said gold film is joined.
Claim 14
Dependent Claim
43 words
A diamond-to-metal joint structure, comprising: a diamond body; a titantium film formed on said diamond body; a platinum film formed on said titanium film; a gold film formed on said platinum film; and a metallic body to which said gold film is joined.
Claim 15
Dependent Claim
19 words
A joint structure according to claim 12, wherein said titanium film is constituted by a condensate of evaporated titanium.
Claim 16
Dependent Claim
19 words
A joint structure according to claim 12, wherein said platinum film is constituted by a condensate of evaporated platinum.
Claim 17
Dependent Claim
19 words
A joint structure according to claim 12, wherein said gold film is constituted by a condensate of evaporated gold.
Claim 18
Dependent Claim
19 words
A joint structure according to claim 12, wherein said titanium film is constituted by a sputtered coating of titanium.
Claim 19
Dependent Claim
19 words
A joint structure according to claim 12, wherein said platinum film is constituted by a sputtered coating of platinum.
Claim 20
Dependent Claim
19 words
A joint structure according to claim 12, wherein said gold film is constituted by a sputtered coating of gold.
Claim 21
Dependent Claim
183 words
A pressure detector comprising: a cylindrical housing for projecting into an atmosphere the pressure of which is to be measured; a pressure chamber formed within said housing, said housing further including introducing means by which pressure to be measured is introduced to said pressure chamber; a metallic diaphragm formed on a surface of one portion of a wall defining said pressure chamber, which diaphragm is adapted to deform in accordance with changes in said pressure to be measured; and a strain gauge provided on said diaphragm for generating an output signal corresponding to strain generated due to the deformation of said diaphragm; said strain guage being comprises a diamond monocrystal plate and a diamond semiconductor film formed on said diamond monocrystal plate; said diamond monocrystal plate being joined to said diaphragm through at least two films having graduated thermal expansion coefficients, including a titanium film and a gold film, which at least two films are piled on said diamond monocrystal plate in graduated sequence so as to provide a stepped transition in thermal expansion coefficient from said diamond monocrystal plate to said diaphragm.
Claim 22
Dependent Claim
183 words
A pressure detector comprising: a cylindrical housing for projecting into an atmosphere the pressure of which is to be measured; a pressure chamber formed within said housing, said housing further including introducing means by which pressure to be measured is introduced to said pressure chamber; a metallic diaphragm formed on a surface of one portion of a wall defining said pressure chamber, which diaphragm is adapted to deform in accordance with changes in said pressure to be measured; and a strain gauge provided on said diaphragm for generating an output signal corresponding to strain generated due to the deformation of said diaphragm; said strain guage being comprises a diamond monocrystal plate and a diamond semiconductor film formed on said diamond monocrystal plate; said diamond monocrystal plate being joined to said diaphragm through at least two films having graduated thermal expansion coefficients, including a titanium film and a gold film, which at least two films are piled on said diamond monocrystal plate in graduated sequence so as to provide a stepped transition in thermal expansion coefficient from said diamond monocrystal plate to said diaphragm.
Claim 23
Dependent Claim
21 words
A pressure detector according to claim 19, wherein a platinum layer is interposed between said titanium film and said gold film.
Claim 24
Dependent Claim
43 words
A pressure detector according to claim 19, further comprising a signal output electrode formed by a titanium film, a platinum film and a gold film which are piled on said diamond semiconductor film in sequence; signal wires being wirebonded to said gold film.
Claim 25
Dependent Claim
22 words
A pressure detector according to claim 19, wherein said diamond semiconductor film is a P-type semiconductor film containing boron as an impurity.
Claim 26
Dependent Claim
22 words
A pressure detector according to claim 19, wherein said diamond semiconductor film is a N-type semiconductor film containg phosphor as an impurity.
Claim 27
Dependent Claim
35 words
A pressure detector according to claim 22, wherein said diamond semiconductor film is formed by precipitating a plasma of a mixture gas composed of methane, hydrogen, and diborane( B H )on said diamond monocrystal plate.
Claim 28
Dependent Claim
36 words
A pressure detector according to claim 22, wherein said diamond semiconductor film is formed by introducing boron into said dimond monocrystal plate by a method out of a heat diffusing method and an ion injecting method.
Claim 29
Dependent Claim
192 words
A pressure detector comprising: a cylindrical housing for projecting into an atmosphere the pressure of which is to be measured; a pressure chamber formed within said housing, said housing further including introducing means by which pressure to be measured is introduced to said pressure chamber; a diaphragm for covering an opening provided in a metallic wall defining said pressure chamber; said diaphragm being adapted for deforming in accordance with changes in the pressure to be measured; and a strain gauge provided on said diaphragm for generating an output signal corresponding to strain generated due to the deformation of said diaphragm; said diaphragm being made of a diamond monocrystal plate; said diamond monocrystal plate being joined to an opening edge of said pressure chamber through at least two films having graduated thermal expansion coefficients, including a titanium film and a gold film, which at least two films are formed on said diamond monocrystal plate in graduated sequence so as to provide a stepped transition in thermal expansion coefficient from said diamond monocrystal plate to said opening edge of said pressure chamber; said strain gauge comprising a diamond semiconductor film formed on said diaphragm.
Claim 30
Dependent Claim
192 words
A pressure detector comprising: a cylindrical housing for projecting into an atmosphere the pressure of which is to be measured; a pressure chamber formed within said housing, said housing further including introducing means by which pressure to be measured is introduced to said pressure chamber; a diaphragm for covering an opening provided in a metallic wall defining said pressure chamber; said diaphragm being adapted for deforming in accordance with changes in the pressure to be measured; and a strain gauge provided on said diaphragm for generating an output signal corresponding to strain generated due to the deformation of said diaphragm; said diaphragm being made of a diamond monocrystal plate; said diamond monocrystal plate being joined to an opening edge of said pressure chamber through at least two films having graduated thermal expansion coefficients, including a titanium film and a gold film, which at least two films are formed on said diamond monocrystal plate in graduated sequence so as to provide a stepped transition in thermal expansion coefficient from said diamond monocrystal plate to said opening edge of said pressure chamber; said strain gauge comprising a diamond semiconductor film formed on said diaphragm.
Claim 31
Dependent Claim
21 words
A pressure detector according to claim 26, wherein a platinum layer is interposed between said titanium film and said gold film.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1991-08-30 | 1992-02-29 | 1992-08-30 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1995-08-30 | 1996-02-29 | 1996-08-30 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1999-08-30 | 2000-02-29 | 2000-08-30 | $7700.00 | Window Closed / Lapsed |