Claims Analysis
Total Claims: 7
Claim 1
Independent Claim
202 words
In the liquid chemical processing of substrates in a closed chamber with means providing rinsing spray orifices directed toward the substrate and chemical orifices also directed toward the substrate and in flow communication with chemical supply lines and spray head chemical passages, an improved rinsing method consisting in spraying rinsing liquid from the rinsing spray orifices toward and onto the substrate in the closed chamber to drench the substrate with such rinsing liquid to terminate the chemical processing by rinsing away such processing chemicals and any particulate that may exist on such substrates while allowing the rinsing liquid to exit the chamber, and simultaneously with said spraying, clearing the chemical supply lines, chemical passages and chemical orifices by supplying additional rinsing liquid into the chemical supply lines, spray head chemical passages and chemical orifices, to mix with and progressively dilute the liquid chemical therein and directing the mixture of rinsing liquid and liquid chemical through the lines and passages into an open drain while applying pressure on the additional rinsing liquid, as to move the mixture through the lines and passages and drain, and as to trickle the mixture through and from the chemical orifices without spraying the mixture onto the substrates.
Claim 2
Dependent Claim
202 words
In the liquid chemical processing of substrates in a closed chamber with means providing rinsing spray orifices directed toward the substrate and chemical orifices also directed toward the substrate and in flow communication with chemical supply lines and spray head chemical passages, an improved rinsing method consisting in spraying rinsing liquid from the rinsing spray orifices toward and onto the substrate in the closed chamber to drench the substrate with such rinsing liquid to terminate the chemical processing by rinsing away such processing chemicals and any particulate that may exist on such substrates while allowing the rinsing liquid to exit the chamber, and simultaneously with said spraying, clearing the chemical supply lines, chemical passages and chemical orifices by supplying additional rinsing liquid into the chemical supply lines, spray head chemical passages and chemical orifices, to mix with and progressively dilute the liquid chemical therein and directing the mixture of rinsing liquid and liquid chemical through the lines and passages into an open drain while applying pressure on the additional rinsing liquid, as to move the mixture through the lines and passages and drain, and as to trickle the mixture through and from the chemical orifices without spraying the mixture onto the substrates.
Claim 3
Dependent Claim
61 words
The improved rinsing method as set forth in claim 1 and terminating the supplying of the additional rinsing liquid into the lines, passages and orifices and allowing substantial completion of flow of such rinsing liquid into the open drain, and repeating such supplying of additional rinsing liquid into the lines, passages and orifices, and directing the liquid into the open drain.
Claim 4
Dependent Claim
44 words
The improved rinsing method as set forth in claim 1 and prior to such supplying the additional rinsing liquid at said pressure and directing the mixture into the open drain, the added step of purging such lines, passages and chemical orifices with rinsing liquid.
Claim 5
Dependent Claim
45 words
The improved rinsing method as set forth in claim 1 and prior of the steps of supplying the additional liquid at said pressure and directing the mixture into the open drain, the added step of purging the lines, passages and chemical orifices with inert gas.
Claim 6
Dependent Claim
48 words
The improved rinsing method according to claim 3 and after said added step but before said steps of supplying and directing, another step including stopping the flow of additional rinsing liquid and purging the lines, passages and chemical orifices with inert gas and thereafter stopping the gas purge.
Claim 7
Dependent Claim
44 words
The improved rinsing method according to claim 1 and stopping the flow of liquid chemicals to the chemical orifices whereby to stop the spray of chemicals therefrom, and commencing the spraying of rinsing liquid in coordinated relation with stopping the flow of liquid chemicals.