US4804490A
Expired / Lapsed
US
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Method of fabricating stabilized threshold switching material
Assignee: Energy Conversion Devices Inc
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Filing: 1987-10-13
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Granted: 1989-02-14
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Expires: 2007-10-13
Abstract
Abstract A method of stabilizing the switching characteristics of a thin film chalcogenide glass material by subjecting said material to a hydrogenated atmosphere, preferably activated hydrogen and argon. It is also preferred to provide a post hydrogenation anneal step.
Inventors
- 👤 Roger W. Pryor
- 👤 Patrick J. Klersy
- 👤 Jerry A. Piontkowski
- 👤 Napolean P. Formigoni
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-27 04:37
CPC Classifications
H; H02; H02H; H02H9/00; H02H9/04; H02H9/044; H10; H10N; H10N70/00; H10N70/011; H10N70/021; H10N70/026; H10N70/041; H10N70/20; H10N70/801; H10N70/821; H10N70/826; H10N70/881; H10N70/882
Claims Analysis
Total Claims: 11
Claim 1
Independent Claim
83 words
A method of stabilizing the threshold switching characteristics of a thin film chalcogenide glass material, said method comprising the steps of: (a) providing a thin film chalcogenide glass material possessing threshold switching characteristics; (b) subjecting said chalcogenide glass material to a hydrogenated atmosphere for stabilizing the threshold switching characteristics thereof; and (c) controlling the temperature, pressure and energy levels during which the hydrogenation occurs so as to provide first, second and third independent controls upon the rate at which said stabilization process proceeds.
Claim 2
Independent Claim
83 words
A method of stabilizing the threshold switching characteristics of a thin film chalcogenide glass material, said method comprising the steps of: (a) providing a thin film chalcogenide glass material possessing threshold switching characteristics; (b) subjecting said chalcogenide glass material to a hydrogenated atmosphere for stabilizing the threshold switching characteristics thereof; and (c) controlling the temperature, pressure and energy levels during which the hydrogenation occurs so as to provide first, second and third independent controls upon the rate at which said stabilization process proceeds.
Claim 3
Dependent Claim
25 words
The method as recited in claim 1, including the further step of, subsequent to step (c), subjecting said chalcogenide glass material to a thermal anneal.
Claim 4
Dependent Claim
21 words
The method as recited in claim 1, wherein the thin film chalcogenide glass material comprises an amorphous chalcogenide glass semiconductor material.
Claim 5
Dependent Claim
26 words
The method as recited in claim 3, wherein the amorphous chalcogenide glass semiconductor material comprises Te 36 Ge 23 S 21 As 18 Se 2 .
Claim 6
Dependent Claim
21 words
The method as recited in claim 2, wherein hydrogen gas, (H 2 ), is the source of hydrogen in said atmosphere.
Claim 7
Dependent Claim
15 words
The method as recited in claim 5, wherein the hydrogen gas is diluted with argon.
Claim 8
Dependent Claim
23 words
The method as recited in claim 5, wherein said hydrogen gas is subjected to an energetic process so as to provide activated hydrogen.
Claim 9
Dependent Claim
20 words
The method as recited in claim 7, wherein said activated hydrogen is utilized to plasma anneal said chalcogenide glass material.
Claim 10
Dependent Claim
24 words
The method as recited in claim 7, wherein step (a) comprises fabricating, by reactive sputtering, said chalcogenide material in an atmosphere of activated hydrogen.
Claim 11
Dependent Claim
29 words
The method as recited in claim 9, including the further step of subjecting said chalcogenide glass material to a thermal anneal after completion of the hydrogenated reactive sputtering process.
References Cited (Backward Citations)
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Cited
US4217374A
Cited
JPS56125847A
Cited
US4375125A
Cited
JPS5956575A
Cited
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Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1992-02-14 | 1992-08-15 | 1993-02-14 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1996-02-14 | 1996-08-15 | 1997-02-14 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2000-02-14 | 2000-08-15 | 2001-02-14 | $7700.00 | Window Closed / Lapsed |