Claims Analysis
Total Claims: 9
Claim 1
Independent Claim
116 words
In a specimen inspection apparatus provided with: a movable holder means (440) for holding a specimen by vacuum adsorption; a microscope (400, 26, 27) for observing therethrough the specimen held by said holder means; a means (250) for carrying the specimen to be delivered to said holder means so as to place it in a specimen replacing position (200); the improvement comprising; specimen holding arm means (16,) provided on said holder means, said specimen holding arm means having a vacuum adsorption surface (50) capable of coming in contact with a surface of the specimen; means (17, 19, 21) for pushing said specimen elastically toward said vacuum adsorption surface while the specimen is observed through said microscope.
Claim 2
Dependent Claim
116 words
In a specimen inspection apparatus provided with: a movable holder means (440) for holding a specimen by vacuum adsorption; a microscope (400, 26, 27) for observing therethrough the specimen held by said holder means; a means (250) for carrying the specimen to be delivered to said holder means so as to place it in a specimen replacing position (200); the improvement comprising; specimen holding arm means (16,) provided on said holder means, said specimen holding arm means having a vacuum adsorption surface (50) capable of coming in contact with a surface of the specimen; means (17, 19, 21) for pushing said specimen elastically toward said vacuum adsorption surface while the specimen is observed through said microscope.
Claim 3
Dependent Claim
45 words
The specimen inspection apparatus as defined in claim 1, comprising means (11, 12, 13, 14, 15) for moving said elastically pushing means in the direction detached from said vacuum adsorption surface side while said specimen holding arm means are kept on said specimen replacing position.
Claim 4
Dependent Claim
30 words
The specimen inspection apparatus as defined in claim 1 or claim 2, said elastically pushing means having a means (18) for detaching the specimen mechanically from said vacuum adsorption surface.
Claim 5
Dependent Claim
34 words
The specimen inspection apparatus as defined in claim 1, comprising means (30, 34, 35) for deciding whether or not a vacuum adsorption state is good while said specimen holding arm means hold the specimen.
Claim 6
Dependent Claim
80 words
The specimen inspection apparatus as defined in claim 1, wherein said carrying means is provided with a carrying pass and carrier means (23, 24) for shifting a position of the specimen on the carrying pass, said carrier means retaining the next specimen at a waiting position (300) when the previous specimen in observed through said microscope and then shifting said next specimen to said specimen replacing position (200) from said waiting position after said previous specimen has been observed completely.
Claim 7
Dependent Claim
28 words
The specimen inspection apparatus as defined in claim 5, said carrier means having a plurality of lever means (24A, 24B) capable of shifting a plurality of specimens concurrently.
Claim 8
Dependent Claim
120 words
In a specimen inspection apparatus provided with a holder means for holding a specimen by vacuum adsorption, a microscope for observing therethrough the specimen held on said holder means, a means for carrying the specimen to be delivered to said holder means so as to place it in a specimen replacing position; the improvement comprising a specimen holding arm means within said holder means, said specimen holding arm means having a pair of holding arms with a vacuum adsorption surface capable of coming in contact with a surface of the specimen formed thereon and also having a pair of auxiliary means (17, 18, 19, 21) for bringing the specimen into contact with or detaching it from said vacuum adsorption surface.
Claim 9
Dependent Claim
120 words
In a specimen inspection apparatus provided with a holder means for holding a specimen by vacuum adsorption, a microscope for observing therethrough the specimen held on said holder means, a means for carrying the specimen to be delivered to said holder means so as to place it in a specimen replacing position; the improvement comprising a specimen holding arm means within said holder means, said specimen holding arm means having a pair of holding arms with a vacuum adsorption surface capable of coming in contact with a surface of the specimen formed thereon and also having a pair of auxiliary means (17, 18, 19, 21) for bringing the specimen into contact with or detaching it from said vacuum adsorption surface.