US4825093A
Expired / Lapsed
US
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Methods for identifying semiconductor wafer with bar code pattern thereon and methods for manufacturing semiconductor device
Assignee: Fujitsu Ltd
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Filing: 1987-05-19
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Granted: 1989-04-25
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Expires: 2007-05-19
Abstract
Abstract In an automatic wafer process for gate array integrated circuits, it becomes necessary to identify the wafer every time at the beginning of each process. However, it is difficult for conventional methods to identify the wafer by detecting a bar code pattern because of a low contrast due to reflection of the deposited layers. The present invention provides a method in which the light source, which abundantly includes infrared rays, located on the back side of the wafer and a detector located on the front side thereof. The infrared rays are irradiated onto the wafer easily penetrate the silicon wafer. The infrared rays are received without an effect of reflection due to the deposited layers on the front side of the wafer. The first metallization layer is a very suitable layer to form the bar code pattern, which is easily marked by a laser beam scriber.
Inventors
- 👤 Tadashi Kiriseko
- 👤 Nobuo Iijima
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-06 07:32
CPC Classifications
H; H10; H10P; H10P90/00; H10P90/12; H10P90/128; H10W; H10W46/00; H10P72/00; H10P72/06; H10P72/0614; H10P72/0618; H10W46/401; H10W46/501; Y; Y10; Y10S; Y10S235/00; Y10S235/901
Claims Analysis
Total Claims: 18
Claim 1
Independent Claim
101 words
A method for identifying a semiconductor wafer utilizing a bar code pattern formed thereon, said method comprising the steps of: (a) depositing a metal layer on the semiconductor wafer, having a low transmission factor with respect to infrared rays; (b) forming the bar code pattern with the metal layer; (c) irradiating light, including infrared rays onto a first side of the semiconductor wafer; (d) receiving the infrared rays transmitted through the semiconductor wafer and the bar code pattern of the metal layer on a second side of the semiconductor wafer; and (e) identifying the semiconductor wafer by decoding the received signal.
Claim 2
Independent Claim
101 words
A method for identifying a semiconductor wafer utilizing a bar code pattern formed thereon, said method comprising the steps of: (a) depositing a metal layer on the semiconductor wafer, having a low transmission factor with respect to infrared rays; (b) forming the bar code pattern with the metal layer; (c) irradiating light, including infrared rays onto a first side of the semiconductor wafer; (d) receiving the infrared rays transmitted through the semiconductor wafer and the bar code pattern of the metal layer on a second side of the semiconductor wafer; and (e) identifying the semiconductor wafer by decoding the received signal.
Claim 3
Dependent Claim
59 words
A method for identifying a semiconductor wafer according to claim 1, wherein said step (b) includes forming the bar code pattern on the front side of the semiconductor wafer, said step (c) includes irradiating the infrared rays onto the back side of the semiconductor wafer and said step (d) includes receiving transmitted infrared rays on the front side thereof.
Claim 4
Dependent Claim
60 words
A method for identifying a semiconductor wafer according to claim 1, wherein said step (b) includes forming the bar code pattern on the front side of the semiconductor wafer, said step (c) includes irradiating the infrared rays onto the front side of the semiconductor wafer, and said step (d) includes receiving the transmitted infrared rays on the back side thereof.
Claim 5
Dependent Claim
21 words
A method for identifying a semiconductor wafer according to claim 1, comprising the substep of forming the metal layer of aluminum.
Claim 6
Dependent Claim
28 words
A method for identifying a semiconductor wafer according to claim 4, wherein said bar code pattern is formed by scribing and evaporating said layer with a laser beam.
Claim 7
Dependent Claim
31 words
A method for identifying a semiconductor wafer according to claim 1, comprising the step of forming the bar code pattern by scribing and evaporating the metal layer with a laser beam.
Claim 8
Dependent Claim
27 words
A method for identifying a semiconductor wafer according to claim 1, wherein said step (a) of depositing the metal layer is deposited as a first metallization layer.
Claim 9
Dependent Claim
24 words
A method for identifying a semiconductor wafer according to claim 7, further comprising the step of forming a window above the bar code pattern.
Claim 10
Independent Claim
180 words
A method of manufacturing a semiconductor device comprising the steps of: (a) performing common bulk processes for a plurality of semiconductor wafers, including at least impurity introduction into the semiconductor wafers and forming an insulating layer thereon; (b) forming a metal layer on the plurality of semiconductor wafers for interrupting infrared rays transmitted to the semiconductor wafers at a first region, where an electrical element is formed, and to a second region where a bar code pattern is formed; (c) selectively removing the metal layer in the second region, and forming the bar code pattern which corresponds to each of the plurality of semiconductor wafers; (d) irradiating infrared rays onto the second region from a first side of the semiconductor wafers and detecting the transmitted infrared rays through the semiconductor wafer and the bar code pattern in a second side of the semiconductor wafers and decoding the bar code pattern; (e) identifying the semiconductor wafers by said decoding step (d); and (f) selectively removing the metal layer, forming a specified metal pattern corresponding to the identification of the semiconductor wafers.
Claim 11
Independent Claim
180 words
A method of manufacturing a semiconductor device comprising the steps of: (a) performing common bulk processes for a plurality of semiconductor wafers, including at least impurity introduction into the semiconductor wafers and forming an insulating layer thereon; (b) forming a metal layer on the plurality of semiconductor wafers for interrupting infrared rays transmitted to the semiconductor wafers at a first region, where an electrical element is formed, and to a second region where a bar code pattern is formed; (c) selectively removing the metal layer in the second region, and forming the bar code pattern which corresponds to each of the plurality of semiconductor wafers; (d) irradiating infrared rays onto the second region from a first side of the semiconductor wafers and detecting the transmitted infrared rays through the semiconductor wafer and the bar code pattern in a second side of the semiconductor wafers and decoding the bar code pattern; (e) identifying the semiconductor wafers by said decoding step (d); and (f) selectively removing the metal layer, forming a specified metal pattern corresponding to the identification of the semiconductor wafers.
Claim 12
Dependent Claim
156 words
A method for manufacturing a semiconductor device according to claim 9, further comprising the steps of: (g) forming an insulating layer capable of transmitting infrared rays onto the metal layer for forming a specified pattern in the first region and onto the bar code pattern in the second region; (h) forming an additional second metal layer on an entire surface of the insulating layer; (i) removing the additional second metal layer above the second region; (j) irradiating infrared rays onto the second region from a first side of the semiconductor wafer and detecting the transmitted infrared ray through the semiconductor wafer and the bar code pattern in a second side of the semiconductor wafer and decoding the bar code; (k) identifying the semiconductor wafer by said decoding step (d); and (l) selectively removing the additional second metal layer, forming a specified pattern of the additional second metal layer corresponding to the identification of the semiconductor device.
Claim 13
Dependent Claim
46 words
A method for manufacturing a semiconductor device according to claim 10, further comprising the step of forming a gate structure for a gate array in the first region, the metal layer having a specified pattern and being connected to the electrical element in the first region.
Claim 14
Dependent Claim
30 words
A method for manufacturing a semiconductor device according to claim 11, further comprising the step of connecting the additional second metal layer having a specified pattern to the metal layer.
Claim 15
Independent Claim
137 words
A method for identifying a semiconductor wafer utilizing a bar code pattern formed thereon, said method comprising the steps of: (a) exposing a silicon surface of a semiconductor substrate; (b) forming the bar code pattern by scribing and roughing the silicon surface with a laser beam in a second region of the silicon surface and forming an active element in a first region of the silicon surface; (c) removing a metal layer subsequently deposited on the second region of the silicon surface and forming a window for infrared rays; (d) irradiating light, including infrared rays, onto a first side of the semiconductor wafer; (e) receiving the infrared rays transmitted through the semiconductor wafer and the bar code pattern on a second side of the semiconductor wafer; and (f) identifying the semiconductor wafer by decoding the received signal.
Claim 16
Independent Claim
137 words
A method for identifying a semiconductor wafer utilizing a bar code pattern formed thereon, said method comprising the steps of: (a) exposing a silicon surface of a semiconductor substrate; (b) forming the bar code pattern by scribing and roughing the silicon surface with a laser beam in a second region of the silicon surface and forming an active element in a first region of the silicon surface; (c) removing a metal layer subsequently deposited on the second region of the silicon surface and forming a window for infrared rays; (d) irradiating light, including infrared rays, onto a first side of the semiconductor wafer; (e) receiving the infrared rays transmitted through the semiconductor wafer and the bar code pattern on a second side of the semiconductor wafer; and (f) identifying the semiconductor wafer by decoding the received signal.
Claim 17
Dependent Claim
66 words
A method for identifying a semiconductor wafer according to claim 13, wherein said step (b) includes forming the bar code pattern and an active element on the front side of the semiconductor wafer, said step (d) includes irradiating the infrared rays onto a back side of the semiconductor wafer, and said step (e) includes receiving transmitted infrared rays on the front side of the semiconductor wafer.
Claim 18
Dependent Claim
66 words
A method for identifying a semiconductor wafer according to claim 13, wherein said step (b) includes forming the bar code pattern and an active element on a front side of the semiconductor wafer, said step (d) includes irradiating the infrared rays onto the front side of the semiconductor wafer, and said step (e) includes receiving transmitted infrared rays on a back side of the semiconductor wafer.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1992-04-24 | 1992-10-24 | 1993-04-25 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1996-04-24 | 1996-10-24 | 1997-04-25 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2000-04-24 | 2000-10-24 | 2001-04-25 | $7700.00 | Window Closed / Lapsed |