US4836865A
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Magnetic nitride film
Assignee: Panasonic Holdings Corp
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Filing: 1987-03-10
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Granted: 1989-06-06
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Expires: 2007-03-10
Abstract
Abstract The disclosed magnetic nitride T-M-N film (T is at least one metal selected from the group consisting of Fe, Co, Ni and Mn; M is at least one metal selected from the group consisting of Nb, Zr, Ti, Ta, Hf, Cr, W and Mo; N is nitrogen (N)) has excellent wear resistance and high electric resistivity, and the compositionally modulated nitride film shows a soft magnetic property, as well as thermal stability of the properties.
Inventors
- 👤 Hiroshi Sakakima
- 👤 Koichi Osano
- 👤 Yuji Omata
- 👤 Mitsuo Satomi
- 👤 Koichi Kugimiya
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 05:35
CPC Classifications
B; B82; B82Y; B82Y25/00; H; H01; H01F; H01F10/00; H01F10/32; H01F10/08; H01F10/10; H01F10/12; H01F10/13; Y; Y10; Y10T; Y10T428/00; Y10T428/12; Y10T428/12431; Y10T428/12465; Y10T428/12493; Y10T428/12632; Y10T428/12771; Y10T428/12861; Y10T428/12931
Claims Analysis
Total Claims: 7
Claim 1
Independent Claim
151 words
A magnetic nitride film comprising a magnetic nitride layer represented by formula: T X M Y N Z , and an alloy layer represented by formula: T X ,M Y , wherein T is at least one metal selected from the group consisting of Fe, Co, Ni and Mn; M is at least one metal selected from the group consisting of Nb, Zr, Ti, Ta, Hf, Cr, W and Mo; N is nitrogen (N), and X and X' show atomic percent of said T, Y and Y' show atomic percent of said M, Z shows atomic percent of said N, and values of X, Y and Z are defined by the following expressions, 7≦ X<94, 6≦Y<25, 0.1≦Z≦20 and X+Y+Z=100, and values of X' and Y' are defined by the following expressions, 75≦X'<94, 6≦Y'<25 and X'+Y'=100, and said magnetic nitride layer and said alloy layer being alternately laminated thereby forming a multilayer.
Claim 2
Dependent Claim
151 words
A magnetic nitride film comprising a magnetic nitride layer represented by formula: T X M Y N Z , and an alloy layer represented by formula: T X ,M Y , wherein T is at least one metal selected from the group consisting of Fe, Co, Ni and Mn; M is at least one metal selected from the group consisting of Nb, Zr, Ti, Ta, Hf, Cr, W and Mo; N is nitrogen (N), and X and X' show atomic percent of said T, Y and Y' show atomic percent of said M, Z shows atomic percent of said N, and values of X, Y and Z are defined by the following expressions, 7≦ X<94, 6≦Y<25, 0.1≦Z≦20 and X+Y+Z=100, and values of X' and Y' are defined by the following expressions, 75≦X'<94, 6≦Y'<25 and X'+Y'=100, and said magnetic nitride layer and said alloy layer being alternately laminated thereby forming a multilayer.
Claim 3
Dependent Claim
23 words
A magnetic nitride film in accordance with claim 1 wherein; the thickness of each layer in said multilayered film is 1000Å or below.
Claim 4
Dependent Claim
110 words
A magnetic nitride film represented by formula: T.sub.X M.sub.e,ovs/Y/ N.sub.e,ovs/Z/ wherein T is at least one metal selected from the group consisting of Fe, Co, Ni and Mn; M is at least one metal selected from the group consisting of Nb, Zr, Ti, Ta, Hf, Cr, W and Mo; N is nitrogen (N), and X, Y and Z show atomic percent of said T, M and N, and values of X, Y and Z are defined by the following expressions, 6≦ X<94, 6≦Y<25, 0.1≦Z≦20 and X+Y+Z=100, and elements of T, M and N are compositionally modulated in depth direction, and the contents X, Y and Z represent the average values.
Claim 5
Dependent Claim
110 words
A magnetic nitride film represented by formula: T.sub.X M.sub.e,ovs/Y/ N.sub.e,ovs/Z/ wherein T is at least one metal selected from the group consisting of Fe, Co, Ni and Mn; M is at least one metal selected from the group consisting of Nb, Zr, Ti, Ta, Hf, Cr, W and Mo; N is nitrogen (N), and X, Y and Z show atomic percent of said T, M and N, and values of X, Y and Z are defined by the following expressions, 6≦ X<94, 6≦Y<25, 0.1≦Z≦20 and X+Y+Z=100, and elements of T, M and N are compositionally modulated in depth direction, and the contents X, Y and Z represent the average values.
Claim 6
Dependent Claim
46 words
A magnetic nitride film in accordance with claim 3 wherein said elements M, N and T are compositionally modulated thereby making a compositionally modulated depth profile where the contents of said elements M and N vary almost in phase and element T varies in opposite phase.
Claim 7
Dependent Claim
25 words
A magnetic nitride film in accordance with claim 3 or 4 wherein, the wave length of compositional modulation in depth direction is less than 1000Å.
References Cited (Backward Citations)
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