US4837121A
Expired / Lapsed
US
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Thermally stable light-sensitive compositions with o-quinone diazide and phenolic resin
Assignee: OCG Microelectronic Materials Inc
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Filing: 1987-11-23
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Granted: 1989-06-06
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Expires: 2007-11-23
Abstract
Abstract A phenolic resin composition comprising units of formula (I): <IMAGE> (I) wherein R1 is a halogen and R2 is a lower alkyl group having 1 to 4 carbon atoms and said units of formula (I) are made by condensing the corresponding halogen-substituted resorcinol of formula (A): <IMAGE> (A) wherein R1 is defined above, with the corresponding para-lower alkyl-substituted 2,6-bis(hydroxymethyl)-phenol of formula (B): <IMAGE> (B) wherein R2 is defined above, and wherein the mole ratio of A:B is from about 0.5:1 to 1.7:1. This phenolic resin may be mixed with photoactive compounds (e.g. 1,2-naphthoquinone diazide sensitizers ) to prepare a light-sensitive composition useful as a positive-working photoresist.
Inventors
- 👤 Andrew J. Blakeney
- 👤 Alfred T. Jeffries, III
- 👤 Thomas R. Sarubbi
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 18:43
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/004; G03F7/022; G03F7/023; G03F7/0233; G03F7/0236; C; C08; C08G; C08G8/00; C08G8/04; C08G8/08; C08G8/24
Claims Analysis
Total Claims: 23
Claim 1
Independent Claim
92 words
A light-sensitive composition comprising an admixture of at least one photosensitive o-quinonediazide compound and a binder resin comprising at least about 40% by weight of units of the formula (I): ##STR11## wherein R 1 is a halogen atom and R 2 is a lower alkyl group having 1 to 4 carbon atoms, the amount of said o-quinonediazide compound or compounds being about 5% to about 30% by weight and the amount of said binder resin being about 60% to 95% by weight, based on the total solid content of said photosensitive composition.
Claim 2
Dependent Claim
92 words
A light-sensitive composition comprising an admixture of at least one photosensitive o-quinonediazide compound and a binder resin comprising at least about 40% by weight of units of the formula (I): ##STR11## wherein R 1 is a halogen atom and R 2 is a lower alkyl group having 1 to 4 carbon atoms, the amount of said o-quinonediazide compound or compounds being about 5% to about 30% by weight and the amount of said binder resin being about 60% to 95% by weight, based on the total solid content of said photosensitive composition.
Claim 3
Dependent Claim
62 words
The light-sensitive composition of claim 1 wherein said o-quinonediazide compound or compounds are present in the amount of about 10% to about 25% by weight, based on the total solid content of said photosensitive composition and said binder resin is present in the amount of about 70% to about 95% by weight, based on the total solid content of said photosensitive composition.
Claim 4
Dependent Claim
23 words
The light-sensitive composition of claim 1 wherein said o-quinonediazide compound or compounds are selected from the o-naphthoquinone-(1,2)-diazide-4-sulfonic acid esters and o-naphthoquinone-(1,2)-diazide-5-sulfonic acid esters.
Claim 5
Dependent Claim
17 words
The light-sensitive compositions of claim 3 wherein said esters are derived from polyhydric phenols, alkyl-polyhydroxyphenones and aryl-polyhydroxy-phenones.
Claim 6
Dependent Claim
22 words
The light-sensitive composition of claim 4 wherein said esters are selected from the group consisting of polyhydroxybenzophenones and polyhydroxy-acetophenones and mixtures thereof.
Claim 7
Dependent Claim
20 words
The light-sensitive composition of claim 1 wherein said binder resin has a molecular weight of about 500 to about 10,000.
Claim 8
Dependent Claim
25 words
The light-sensitive composition of claim 1 wherein said units of formula (I) represent about 40% to about 80% by weight of the total binder resin.
Claim 9
Dependent Claim
19 words
The light-sensitive composition of claim 1 wherein said units of said binder resin is of the formula (IA): ##STR12##
Claim 10
Dependent Claim
46 words
The light-sensitive composition of claim 1 wherein said binder resin has further units of the formula (II): ##STR13## wherein R 3 is a lower alkoxy group having 1 to 4 carbon atoms and R 2 is a lower alkyl group having 1 to 4 carbon atoms.
Claim 11
Dependent Claim
29 words
The light-sensitive composition of claim 10 wherein said units of formula (II) represent from 0% to about 60% by weight of the total binder resin in said photosensitive composition.
Claim 12
Dependent Claim
30 words
The light-sensitive composition of claim 10 wherein said units of formula (II) represent from about 20% to about 60% by weight of the total binder resin in said photosensitive composition.
Claim 13
Dependent Claim
19 words
The light-sensitive composition of claim 9 wherein said further units of said binder resin are of formula (IIA): ##STR14##
Claim 14
Dependent Claim
19 words
The light-sensitive composition of claim 9 wherein said further units of said binder resin are of formula (IIB): ##STR15##
Claim 15
Dependent Claim
19 words
The light-sensitive composition of claim 1 further comprising the presence of at least one other aqueous alkali-soluble binder resin.
Claim 16
Dependent Claim
31 words
The light-sensitive composition of claim 14 wherein said other aqueous alkali-soluble binder resin is selected from a phenolic-formaldehyde resin, a cresol-formaldehyde resin and a phenol-cresol-formaldehyde resin and a polyvinyl phenol resin.
Claim 17
Dependent Claim
26 words
The light-sensitive composition of claim 1 further comprising at least one substance selected from solvents, actinic and visual contrast dyes, plasticizers, anti-striation agents and speed enhancers.
Claim 18
Dependent Claim
106 words
A light-sensitive composition comprising an admixture of at least one photosensitive o-quinonediazide compound and a binder resin comprising units chosen from the formulae (IA), (IIA), and (IIB): ##STR16## the amount of said o-quinonediazide compound being from about 10% to about 25% by weight and the amount of said binder resin being from 70% to 90% by weight, based on the total solids contents of the light-sensitive composition, and wherein the units of formula (IA) comprise from about 40% to 100% by weight of said binder resin and the units of formula (IIA) and (IIB) comprise from 0% to about 60% by weight of said binder resin.
Claim 19
Dependent Claim
106 words
A light-sensitive composition comprising an admixture of at least one photosensitive o-quinonediazide compound and a binder resin comprising units chosen from the formulae (IA), (IIA), and (IIB): ##STR16## the amount of said o-quinonediazide compound being from about 10% to about 25% by weight and the amount of said binder resin being from 70% to 90% by weight, based on the total solids contents of the light-sensitive composition, and wherein the units of formula (IA) comprise from about 40% to 100% by weight of said binder resin and the units of formula (IIA) and (IIB) comprise from 0% to about 60% by weight of said binder resin.
Claim 20
Dependent Claim
101 words
A coated substrate comprising a substrate coated with a film of a light-sensitive composition comprising an admixture of at least one photosensitive o-quinonediazide compound and a binder resin comprising at least about 40% by weight of units of the formula (I): ##STR17## wherein R 1 is a halogen atom and R 2 is a lower alkyl group having 1 to 4 carbon atoms, the amount of said o-quinonediazide compound being about 5% to about 30% by weight and the amount of said binder resin being about 60% to 95% by weight, based on the total solid content of said photosensitive composition.
Claim 21
Dependent Claim
101 words
A coated substrate comprising a substrate coated with a film of a light-sensitive composition comprising an admixture of at least one photosensitive o-quinonediazide compound and a binder resin comprising at least about 40% by weight of units of the formula (I): ##STR17## wherein R 1 is a halogen atom and R 2 is a lower alkyl group having 1 to 4 carbon atoms, the amount of said o-quinonediazide compound being about 5% to about 30% by weight and the amount of said binder resin being about 60% to 95% by weight, based on the total solid content of said photosensitive composition.
Claim 22
Dependent Claim
38 words
The coated substrate of claim 18 wherein said substrate comprises one or more compounds selected from the group consisting of polyester, polyolefin, silicon, gallium arsenide, silicon/silicon dioxide, doped silicon dioxide, silicon nitride, aluminum/copper mixtures, tantalum, copper and polysilicon.
Claim 23
Dependent Claim
17 words
The coated substrate of claim 18 wherein said substrate is a silicon wafer coated with silicon dioxide.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 1992-06-05 | 1992-12-05 | 1993-06-06 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1996-06-05 | 1996-12-05 | 1997-06-06 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2000-06-05 | 2000-12-05 | 2001-06-06 | $7700.00 | Window Closed / Lapsed |