US4844775A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Ion etching and chemical vapour deposition
Assignee: NationsBank of Texas NA
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Filing: 1987-12-11
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Granted: 1989-07-04
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Expires: 2007-12-11
Abstract
Abstract Apparatus for use in treating semiconductor wafers or other work pieces by an active ion technique or by chemical vapour deposition, comprising a "vacuum" chamber having means for connection to an evacuating pump and to a source of the selected gas, an induction coil surrounding part of the chamber and connected to an alternating current supply to create a plasma within the chamber containing ionised elements of the gas, a support for the work piece within the chamber, and means for creating an electric field between the support and part of the chamber where the plasma exists.
Inventors
- 👤 Frank Keeble
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-27 05:12
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/32; H01J37/32009; H01J37/32082; H01J37/321; H01J37/32431; H01J37/32697; H01J37/32706
Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
84 words
An apparatus for use in treating work pieces, comprising a "vacuum" chamber having means for connection to an evacuating pump and to a source of the selected gas, an induction coil surrounding part of the chamber and connected to an alternating current supply to create a plasma within the chamber containing ionised elements of the gas, a support for the work piece within the chamber, and means for creating an electric field between the support and part of the chamber where the plasma exists.
Claim 2
Independent Claim
84 words
An apparatus for use in treating work pieces, comprising a "vacuum" chamber having means for connection to an evacuating pump and to a source of the selected gas, an induction coil surrounding part of the chamber and connected to an alternating current supply to create a plasma within the chamber containing ionised elements of the gas, a support for the work piece within the chamber, and means for creating an electric field between the support and part of the chamber where the plasma exists.
Claim 3
Dependent Claim
13 words
An apparatus according to claim 1, including means for controlling the electric field.
Claim 4
Dependent Claim
19 words
An apparatus according to claim 1 including means for controlling or adjusting the electric supply to the induction coil.
Claim 5
Dependent Claim
22 words
An invention as in claim 1 including means for controlling independently the electric field and the electric supply to the induction coil.
Claim 6
Independent Claim
85 words
A method of treating work piece in which the work piece is placed in a "vacuum" chamber which is evacuated to a low pressure, a selected gas is introduced under control, a gas plasma is created within the chamber by means of an external induction coil, the plasma intensity is controlled by controlling the supply to the coil, and ionised particles are caused to move onto the work piece by creating an electric field within the chamber between the plasma zone and the work piece.
Claim 7
Independent Claim
85 words
A method of treating work piece in which the work piece is placed in a "vacuum" chamber which is evacuated to a low pressure, a selected gas is introduced under control, a gas plasma is created within the chamber by means of an external induction coil, the plasma intensity is controlled by controlling the supply to the coil, and ionised particles are caused to move onto the work piece by creating an electric field within the chamber between the plasma zone and the work piece.
Claim 8
Dependent Claim
18 words
A method according to claim 5, in which the electric field is controlled independently of the electric supply.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1992-07-03 | 1993-01-02 | 1993-07-04 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1996-07-03 | 1997-01-02 | 1997-07-04 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2000-07-03 | 2001-01-02 | 2001-07-04 | $7700.00 | Window Closed / Lapsed |