US4847162A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Multilayer ceramics coatings from the ceramification of hydrogen silsequioxane resin in the presence of ammonia
Assignee: Dow Silicones Corp
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Filing: 1987-12-28
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Granted: 1989-07-11
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Expires: 2007-12-28
Abstract
Abstract Hydrogen silsesquioxane resin can be ceramified at low temperature in the presence of ammonia, with or without platinum or rhodium catalysis, to form a ceramic coating on the surface of a substrate. The nitrified silica coatings produced are useful as interlevel dielectric films or for planarizing and protecting the surface of electronic devices. For further surface protection, overcoating the nitrided silica with an additional layer of a passivating ceramic material and a top layer of a barrier ceramic material is also described.
Inventors
- 👤 Loren A. Haluska
- 👤 Keith W. Michael
- 👤 Leo Tarhay
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 03:37
CPC Classifications
H; H10; H10P; H10P14/00; H10P14/60; H10P14/63; H10P14/6326; H10P14/6342; H10W; H10W74/00; H10W74/40; H10W74/43; H10P14/6302; H10P14/6322; H10P14/66; H10P14/668; H10P14/6681; H10P14/6684; H10P14/6686; H10P14/69; H10P14/692; H10P14/6921; H10P14/6922; H10P14/6927; H10W20/00; H10W20/40; H10W20/45; H10W20/48; H10P14/6328; H10P14/6334; H10P14/6336; H10P14/65; H10P14/6502; H10P14/6506; H10P14/662; H10P14/6903; H10P14/6905; H10P14/694; H10P14/6943; H10P14/69433; Y; Y10; Y10T; Y10T428/00; Y10T428/31504; Y10T428/31678
Claims Analysis
Total Claims: 29
Claim 1
Independent Claim
62 words
A process for forming on a substrate a ceramic coating which process comprises: (A) applying a flowable solution comprising hydrogen silsesquioxane resin to the substrate; (B) drying the resin solution to deposit a hydrogen silsesquioxane resin on the substrate; and, (C) heating the coated substrate in a substantially ammonia atmosphere to a temperature sufficient to produce a ceramic coating on the substrate.
Claim 2
Dependent Claim
62 words
A process for forming on a substrate a ceramic coating which process comprises: (A) applying a flowable solution comprising hydrogen silsesquioxane resin to the substrate; (B) drying the resin solution to deposit a hydrogen silsesquioxane resin on the substrate; and, (C) heating the coated substrate in a substantially ammonia atmosphere to a temperature sufficient to produce a ceramic coating on the substrate.
Claim 3
Dependent Claim
82 words
A process as claimed in claim 1 further comprising: (D) applying to the ceramic coating a passivating coating selected from the group consisting of (i) a silicon coating, (ii) a silicon-carbon coating, (iii) a silicon-nitrogen coating, and (iv) a silicon-carbon-nitrogen coating, wherein the passivating coating is applied by a means selected from the group consisting of (a) chemical vapor deposition, (b) plasma enhanced chemical vapor deposition, and (c) application of a preceramic polymer coating and subsequent ceramification of the preceramic polymer coating.
Claim 4
Dependent Claim
66 words
A process as claimed in claim 2 further comprising: (E) applying to the passivating coating a barrier coating selected from the group consisting of (i) a silicon coating, (ii) a silicon-carbon coating, (iii) a silicon-nitrogen coating, (iv) a silicon-carbon-nitrogen coating, wherein the barrier coating is applied by a means selected from the group consisting of (a) chemical vapor deposition and (b) plasma enhanced chemical vapor deposition.
Claim 5
Dependent Claim
21 words
A process as claimed in claim 3 wherein the barrier coating is applied by means of metal assisted chemical vapor deposition.
Claim 6
Dependent Claim
16 words
An article comprising a structure having thereon a coating formed by the process of claim 3.
Claim 7
Dependent Claim
17 words
An article comprising an electronic device having thereon a coating formed by the process of claim 3.
Claim 8
Dependent Claim
21 words
A process as claimed in claim 2 wherein the passivating coating is applied by means of metal assisted chemical vapor deposition.
Claim 9
Dependent Claim
37 words
a process as claimed in claim 2 wherein the passivating coating is applied by means of application of a preceramic polymer coating and subsequent ceramification of the preceramic polymer coating wherein the preceramic polymer is a polysilacyclobutasilazane.
Claim 10
Dependent Claim
17 words
A process as claimed in claim 8 wherein the polysilacyclobutasilazane is prepared by reacting 1,1-dichloro-1-silacyclobutane with ethylenediamine.
Claim 11
Dependent Claim
16 words
An article comprising a structure having thereon a coating formed by the process of claim 9.
Claim 12
Dependent Claim
17 words
An article comprising an electronic device having thereon a coating formed by the process of claim 9.
Claim 13
Dependent Claim
16 words
An article comprising a structure having thereon a coating formed by the process of claim 8.
Claim 14
Dependent Claim
17 words
An article comprising an electronic device having thereon a coating formed by the process of claim 8.
Claim 15
Dependent Claim
16 words
An article comprising a structure having thereon a coating formed by the process of claim 2.
Claim 16
Dependent Claim
17 words
An article comprising an electronic device having thereon a coating formed by the process of claim 2.
Claim 17
Dependent Claim
19 words
A process as claimed in claim 1 wherein the flowable solution comprising hydrogen silsesquioxane is catalyzed with platinum catalyst.
Claim 18
Dependent Claim
16 words
An article comprising a structure having thereon a coating formed by the process of claim 4.
Claim 19
Dependent Claim
17 words
An article comprising an electronic device having thereon a coating formed by the process of claim 16.
Claim 20
Dependent Claim
36 words
An article comprising an electronic device containing multiple layers of metalization and an interlevel layer which isolates electronic functions occurring in the metalization layers, the interlevel layer having been formed by the process of claim 16.
Claim 21
Dependent Claim
19 words
A process as claimed in claim 1 wherein the flowable solution comprising hydrogen silsesquioxane is catalyzed with rhodium catalyst.
Claim 22
Dependent Claim
16 words
An article comprising a structure having thereon a coating formed by the process of claim 5.
Claim 23
Dependent Claim
17 words
An article comprising an electronic device having thereon a coating formed by the process of claim 20.
Claim 24
Dependent Claim
15 words
A process as claimed in claim 1 wherein the temperature is 200° to 1000° C.
Claim 25
Dependent Claim
23 words
A process as claimed in claim 1 wherein the ceramification temperature is 200° to 400° C. and the substrate is an electronic device.
Claim 26
Dependent Claim
34 words
A process as claimed in claim 1 wherein a method of applying the flowable solution onto the substrate is selected from the group consisting of spray coating, dip coating, flow coating and spin coating.
Claim 27
Dependent Claim
16 words
An article comprising a structure having thereon a coating formed by the process of claim 1.
Claim 28
Dependent Claim
17 words
An article comprising an electronic device having thereon a coating formed by the process of claim 1.
Claim 29
Dependent Claim
36 words
An article comprising an electronic device containing multiple layers of metalization and an interlevel layer which isolates electronic functions occurring in the metalization layers, the interlevel layer having been formed by the process of claim 16.
References Cited (Backward Citations)
US3615272A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1992-07-10 | 1993-01-09 | 1993-07-11 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1996-07-10 | 1997-01-09 | 1997-07-11 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2000-07-10 | 2001-01-09 | 2001-07-11 | $7700.00 | Window Closed / Lapsed |