US4849296A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Multilayer ceramic coatings from metal oxides and hydrogen silsesquioxane resin ceramified in ammonia
Assignee: Dow Silicones Corp
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Filing: 1987-12-28
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Granted: 1989-07-18
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Expires: 2007-12-28
Abstract
Abstract Mixtures of hydrogen silsesquioxane resin and metal oxide precursors such as acyloxy and alkoxy compounds of aluminum, zirconium, and titanium can be coated on substrates and subsequently ceramified at low temperature in the presence of ammonia, with or without platinum or rhodium catalysis, to form a nitrided ceramic coating on the surface of the substrate. The nitrided coatings produced are useful as interlevel dielectric films or for planarizing and protecting the surface of electronic devices. For further surface protection, overcoating the nitrided coating with an additional layer of a passivating ceramic material and a top layer of a barrier ceramic material is also described.
Inventors
- 👤 Loren A. Haluska
- 👤 Keith W. Michael
- 👤 Leo Tarhay
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 23:31
CPC Classifications
H; H10; H10W; H10W74/00; H10W74/40; H10W74/43; H10P; H10P14/00; H10P14/60; H10P14/63; H10P14/6326; H10P14/6342; H10P14/66; H10P14/668; H10P14/6681; H10P14/6684; H10P14/6686; H10P14/69; H10P14/692; H10P14/6921; H10P14/6928; H10P14/6929; H10P14/6932; H10W74/01; H10P14/6328; H10P14/6334; H10P14/662; H10P14/6903; H10P14/6905; H10P14/6922; H10P14/694; H10P14/6943; H10P14/69433; Y; Y10; Y10T; Y10T428/00; Y10T428/31504; Y10T428/31678
Claims Analysis
Total Claims: 25
Claim 1
Independent Claim
118 words
A process for forming on a substrate a ceramic coating which process comprises: (A) applying to the substrate a flowable solution of a mixture comprising hydrogen silsesquioxane resin and a metal oxide precursor selected from the group consisting of acyloxy and alkoxy compounds of aluminum, titanium, and zirconium wherein the metal oxide precursor is present in such proportion so that the metal oxide is present in the ceramic coating produced in step (C) at about 0.1 to about 30 percent by weight; (B) drying the resin solution to deposit a preceramic coating on the substrate; and (C) heating the coated substrate in a substantially ammonia atmosphere to a temperature sufficient to produce a ceramic coating on the substrate.
Claim 2
Dependent Claim
118 words
A process for forming on a substrate a ceramic coating which process comprises: (A) applying to the substrate a flowable solution of a mixture comprising hydrogen silsesquioxane resin and a metal oxide precursor selected from the group consisting of acyloxy and alkoxy compounds of aluminum, titanium, and zirconium wherein the metal oxide precursor is present in such proportion so that the metal oxide is present in the ceramic coating produced in step (C) at about 0.1 to about 30 percent by weight; (B) drying the resin solution to deposit a preceramic coating on the substrate; and (C) heating the coated substrate in a substantially ammonia atmosphere to a temperature sufficient to produce a ceramic coating on the substrate.
Claim 3
Dependent Claim
83 words
A process as claimed in claim 1 further comprising: (D) applying to the ceramic coating a passivating coating selected from the group consisting of (i) a silicon coating, (ii) a silicon carbon coating, (iii) a silicon-nitrogen coating, and (iv) a silicon-carbon-nitrogen coating, wherein the passivating coating is applied by a means selected from the group consisting of (a) chemical vapor deposition, (b) plasma enhanced chemical vapor deposition, and (c) application of a preceramic polymer coating and subsequent ceramification of the preceramic polymer coating.
Claim 4
Dependent Claim
68 words
A process as claimed in claim 2 further comprising: (E) applying to the passivating coating a barrier coating selected from the group consisting of (i) a silicon coating, (ii) a silicon carbon coating, (iii) a silicon-nitrogen coating, and (iv) a silicon-carbon-nitrogen coating, wherein the barrier coating is applied by a means selected from the group consisting of (a) chemical vapor deposition and (b) plasma enhanced chemical vapor deposition.
Claim 5
Dependent Claim
16 words
An article comprising a structure having thereon a coating formed by the process of claim 3.
Claim 6
Dependent Claim
17 words
An article comprising an electronic device having thereon a coating formed by the process of claim 3.
Claim 7
Dependent Claim
21 words
A process as claimed in claim 2 wherein the passivating coating is applied by means of metal assisted chemical vapor deposition.
Claim 8
Dependent Claim
21 words
A process as claimed in claim 2 wherein the barrier coating is applied by means of metal assisted chemical vapor deposition.
Claim 9
Dependent Claim
16 words
An article comprising a structure having thereon a coating formed by the process of claim 2.
Claim 10
Dependent Claim
17 words
An article comprising an electronic device having thereon a coating formed by the process of claim 2.
Claim 11
Dependent Claim
28 words
A process as claimed in claim 1 wherein the flowable solution of a mixture comprising hydrogen silsesquioxane resin and a metal oxide precursor is catalyzed with platinum catalyst.
Claim 12
Dependent Claim
16 words
An article comprising a structure having thereon a coating formed by the process of claim 10.
Claim 13
Dependent Claim
17 words
An article comprising an electronic device having thereon a coating formed by the process of claim 10.
Claim 14
Dependent Claim
28 words
A process as claimed in claim 1 wherein the flowable solution of a mixture comprising hydrogen silsesquioxane resin and a metal oxide precursor is catalyzed with rhodium catalyst.
Claim 15
Dependent Claim
16 words
An article comprising a structure having thereon a coating formed by the process of claim 13.
Claim 16
Dependent Claim
17 words
An article comprising an electronic device having thereon a coating formed by the process of claim 13.
Claim 17
Dependent Claim
15 words
A process as claimed in claim 1 wherein the temperature is 200° to 1000° C.
Claim 18
Dependent Claim
16 words
An article comprising a structure having thereon a coating formed by the process of claim 16.
Claim 19
Dependent Claim
22 words
A process as claimed in claim 1 wherein the temperature is 200° to 400° C. and the substrate is an electronic device.
Claim 20
Dependent Claim
17 words
An article comprising an electronic device having thereon a coating formed by the process of claim 18.
Claim 21
Dependent Claim
36 words
An article comprising an electronic device containing multiple layers of metalization and an interlevel layer which isolates electronic functions occurring in the metalization layers, the interlevel layer having been formed by the process of claim 18.
Claim 22
Dependent Claim
14 words
A process as claimed in claim 1 wherein the substrate is an electronic device.
Claim 23
Dependent Claim
34 words
A process as claimed in claim 1 wherein a method of applying the flowable solution onto the substrate is selected from the group consisting of spray coating, dip coating, flow coating and spin coating.
Claim 24
Dependent Claim
16 words
An article comprising a structure having thereon a coating formed by the process of claim 1.
Claim 25
Dependent Claim
17 words
An article comprising an electronic device having thereon a coating formed by the process of claim 1.
References Cited (Backward Citations)
US3615272A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1992-07-17 | 1993-01-16 | 1993-07-18 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1996-07-17 | 1997-01-16 | 1997-07-18 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2000-07-17 | 2001-01-16 | 2001-07-18 | $7700.00 | Window Closed / Lapsed |