US4857136A
Expired / Lapsed
US
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Reactor monitoring system and method
Assignee: Individual
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Filing: 1988-06-23
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Granted: 1989-08-15
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Expires: 2008-06-23
Abstract
Abstract System and method for detecting problems and other conditions in a semiconducting processing reactor. The relative amounts of two or more substances are monitored, and an output signal is provided when the relative amounts change in a manner corresponding to the change or condition to be detected. In one disclosed embodiment, the substances are ionized to produce excited molecules of the substances, and the substances are sensed with photosensors which are responsive to light of wavelengths characteristic of the substances.
Inventors
- 👤 John Zajac
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 06:47
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/06; H10P72/0604; C; C23; C23C; C23C16/00; C23C16/44; C23C16/4412; C23C16/52; C30; C30B; C30B25/00; C30B25/02; C30B25/16; C30B25/165; G; G01; G01N; G01N21/00; G01N21/62; G01N21/66; G01N21/69; H01; H01J; H01J37/00; H01J37/32; H01J37/32917; H01J37/32935
Claims Analysis
Total Claims: 21
Claim 1
Independent Claim
66 words
In a system for detecting a change in the operating conditions in a semiconductor processing reactor: sensor means responsive to two different substances for providing signals corresponding to the amounts of the substances which are present, and means responsive to the sensor signals for monitoring the relative amounts of the two substances and providing an output signal when the relative amounts change in a predetermined manner.
Claim 2
Dependent Claim
66 words
In a system for detecting a change in the operating conditions in a semiconductor processing reactor: sensor means responsive to two different substances for providing signals corresponding to the amounts of the substances which are present, and means responsive to the sensor signals for monitoring the relative amounts of the two substances and providing an output signal when the relative amounts change in a predetermined manner.
Claim 3
Dependent Claim
24 words
The system of claim 1 wherein the sensor means comprises first and second photosensors responsive to light of wavelengths characteristic of the two substances.
Claim 4
Dependent Claim
23 words
The system of claim 1 wherein the means responsive to the sensor signals includes means for monitoring the ratio of the sensor signals.
Claim 5
Dependent Claim
63 words
In a system for detecting the end of a process in a reactor: sensing means for detecting the presence of two different substances, means responsive to the sensing means for monitoring the relative amounts of the two substances, and means responsive to the monitoring means for providing an output signal when the relative amounts of the two substances change in a predetermined manner.
Claim 6
Dependent Claim
63 words
In a system for detecting the end of a process in a reactor: sensing means for detecting the presence of two different substances, means responsive to the sensing means for monitoring the relative amounts of the two substances, and means responsive to the monitoring means for providing an output signal when the relative amounts of the two substances change in a predetermined manner.
Claim 7
Dependent Claim
25 words
The system of claim 4 wherein the sensing means comprises a pair of photosensors responsive to light of different wavelengths characteristic of the two substances.
Claim 8
Dependent Claim
23 words
The system of claim 4 including means for ionizing the two substances to produce excited molecules which are detected by the sensing means.
Claim 9
Dependent Claim
56 words
In combination: a semiconductor processing reactor, sensor means responsive to two different substances for providing signals corresponding to the amounts of the substances which are present in the reactor, means responsive to the sensor signals for monitoring the relative amounts of the two substances, and means responsive to the relative amounts for providing an output signal.
Claim 10
Dependent Claim
56 words
In combination: a semiconductor processing reactor, sensor means responsive to two different substances for providing signals corresponding to the amounts of the substances which are present in the reactor, means responsive to the sensor signals for monitoring the relative amounts of the two substances, and means responsive to the relative amounts for providing an output signal.
Claim 11
Dependent Claim
27 words
The combination of claim 7 wherein the reactor is a plasma reactor with an exhaust system, and the means sensor means monitors gases in the exhaust system.
Claim 12
Dependent Claim
30 words
The combination of claim 8 including means for ionizing the gases in the exhaust system to produce excited molecules of the two substances which are detected by the sensing means.
Claim 13
Dependent Claim
31 words
The combination of claim 9 wherein the sensor means comprises first and second photosensors which are responsive to different wavelengths of light emitted by the excited molecules of the two substances.
Claim 14
Dependent Claim
43 words
In a method of detecting a change in the operating conditions in a semiconductor processing reactor: monitoring the relative amounts of two substances which are present in the reactor, and providing an output signal when the relative amounts change in a predetermined manner.
Claim 15
Dependent Claim
43 words
In a method of detecting a change in the operating conditions in a semiconductor processing reactor: monitoring the relative amounts of two substances which are present in the reactor, and providing an output signal when the relative amounts change in a predetermined manner.
Claim 16
Dependent Claim
35 words
The method of claim 11 wherein the relative amounts are monitored by sensing light at wavelengths characteristic of the two substances, and taking the ratio of the amounts of light sensed at the respective wavelengths.
Claim 17
Dependent Claim
24 words
The method of claim 12 including the step of ionizing the substances to produce excited molecules which emit the light at the characteristic wavelengths.
Claim 18
Dependent Claim
49 words
In a method of detecting the end of a process in a reactor: detecting the presence of two different substances in the reactor, monitoring the relative amounts of the two substances, and providing an output signal when the relative amounts of the two substances change in a predetermined manner.
Claim 19
Dependent Claim
49 words
In a method of detecting the end of a process in a reactor: detecting the presence of two different substances in the reactor, monitoring the relative amounts of the two substances, and providing an output signal when the relative amounts of the two substances change in a predetermined manner.
Claim 20
Dependent Claim
24 words
The method of claim 14 wherein the presence of the two substances is detected by sensing light at wavelengths characteristic of the two substances.
Claim 21
Dependent Claim
24 words
The method of claim 15 including means for ionizing the two substances to produce excited molecules which emit the light at the characteristic wavelengths.
References Cited (Backward Citations)
US4611919A
Cited
US4491499A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1992-08-14 | 1993-02-13 | 1993-08-15 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1996-08-14 | 1997-02-13 | 1997-08-15 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2000-08-14 | 2001-02-13 | 2001-08-15 | $7700.00 | Window Closed / Lapsed |