US4867952A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Cracking traps for process gas components having a condensed phase
Assignee: Wyeth Holdings LLC
•
Filing: 1988-05-20
•
Granted: 1989-09-19
•
Expires: 2008-05-20
Abstract
Abstract Effluent process gases, particularly those employed in the production and processing of solid state electronic components, are cracked to form products having a condensed phase, which may be separated from the flowing process gas. A plasma trap comprises a high frequency coil for producing a plasma therein. The walls of the trap may be cooled and the trap may employ a removable wall on which the cracked product collects. Particular gases that may be treated are arsine, phosphine, disilane, silane, germane, organometallics and gases containing beryllium and boron.
Inventors
- 👤 John A. Baumann
- 👤 Rozalie Schachter
- 👤 Marcello Viscogliosi
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 11:34
CPC Classifications
B; B01; B01D; B01D8/00; B01J; B01J2219/00; B01J2219/08; B01J2219/0894
Claims Analysis
Total Claims: 20
Claim 1
Independent Claim
79 words
A trap for components of a multicomponent process gas effluent comprising a gas chosen from the group consisting of hydrides of elements and organometallic gases comprising a chamber to which the process gas effluent is supplied and cracking means within said chamber for cracking the process gas to components, at least one of which forms a condensed phase in said chamber, wherein said cracking means is generated by a radio frequency plasma generating means capacitively coupled to said chamber.
Claim 2
Dependent Claim
79 words
A trap for components of a multicomponent process gas effluent comprising a gas chosen from the group consisting of hydrides of elements and organometallic gases comprising a chamber to which the process gas effluent is supplied and cracking means within said chamber for cracking the process gas to components, at least one of which forms a condensed phase in said chamber, wherein said cracking means is generated by a radio frequency plasma generating means capacitively coupled to said chamber.
Claim 3
Dependent Claim
15 words
The trap defined in claim 1 and means for cooling the walls of said chamber.
Claim 4
Dependent Claim
24 words
A trap as defined in claim 1 and a processing chamber for the manufacture of solid state electronic components producing said process gas effluent.
Claim 5
Dependent Claim
17 words
A trap as defined in claim 3 wherein said processing chamber comprises apparatus for chemical vapor deposition.
Claim 6
Dependent Claim
34 words
A trap as defined in claim 1 wherein said chamber comprises a cylinder of vitreous material and said potential is coupled to said chamber by a pair of capacitor plates concentric with said cylinder.
Claim 7
Independent Claim
39 words
A method of trapping a component having a condensed phase of a process gas effluent comprising a gas chosen from the group consisting of hydrides of elements and organometallic gases comprising cracking the process gas to form said component.
Claim 8
Independent Claim
39 words
A method of trapping a component having a condensed phase of a process gas effluent comprising a gas chosen from the group consisting of hydrides of elements and organometallic gases comprising cracking the process gas to form said component.
Claim 9
Dependent Claim
11 words
The method of claim 6 wherein said component is an element.
Claim 10
Dependent Claim
25 words
The method as defined in claim 6 wherein said process gas effluent eminates from a processing chamber for the manufacture of solid state electronic components.
Claim 11
Dependent Claim
19 words
The method as defined in claim 8 wherein said gas effluent eminates from a chamber for chemical vapor deposition.
Claim 12
Dependent Claim
16 words
The method as defined in claim 8 wherein said component is condensed on a cooled surface.
Claim 13
Dependent Claim
18 words
The method defined in claim 6 and collecting said component in a container in which said cracking occurs.
Claim 14
Independent Claim
42 words
A method of trapping a component having a condensed phase of a process gas effluent comprising a gas chosen from the group consisting of hydrides of elements and organometallic gases comprising passing the process gas through a plasma to form said component.
Claim 15
Independent Claim
42 words
A method of trapping a component having a condensed phase of a process gas effluent comprising a gas chosen from the group consisting of hydrides of elements and organometallic gases comprising passing the process gas through a plasma to form said component.
Claim 16
Dependent Claim
11 words
The method of claim 12 wherein said component is an element.
Claim 17
Dependent Claim
25 words
The method as defined in claim 12 wherein said process gas effluent eminates from a processing chamber for the manufacture of solid state electronic components.
Claim 18
Dependent Claim
19 words
The method as defined in claim 14 wherein said gas effluent eminates from a chamber for chemical vapor deposition.
Claim 19
Dependent Claim
16 words
The method as defined in claim 15 wherein said component is condensed on a cooled surface.
Claim 20
Dependent Claim
18 words
The method defined in claim 12 and collecting said component in a container in which said plasma forms.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1992-09-18 | 1993-03-20 | 1993-09-19 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1996-09-18 | 1997-03-20 | 1997-09-19 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2000-09-18 | 2001-03-20 | 2001-09-19 | $7700.00 | Window Closed / Lapsed |