US4877051A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Flow controller
Assignee: MKS Instruments Inc
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Filing: 1988-11-28
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Granted: 1989-10-31
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Expires: 2008-11-28
Abstract
Abstract A fluid flow control apparatus including a fluid flow control valve, a fluid flow sensor, and a fluid flow control circuit receiving a signal from the fluid flow sensor and outputting a signal to the fluid flow control valve. The fluid flow control circuit including an actual control circuit which outputs a signal related to the comparison of an actual flow signal and a desired flow signal, a desired flow comparator circuit which outputs a signal based on the comparison of the desired flow signal with a desired flow threshold signal, and a summing circuit which receives the outputs and provides a control signal based on these outputs.
Inventors
- 👤 Christopher C. Day
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-06 21:33
CPC Classifications
F; F15; F15C; F15C7/00; G; G05; G05D; G05D7/00; G05D7/06; G05D7/0617; G05D7/0629; G05D7/0635; Y; Y10; Y10T; Y10T137/00; Y10T137/7722; Y10T137/7758; Y10T137/7759; Y10T137/7761
Claims Analysis
Total Claims: 19
Claim 1
Independent Claim
171 words
A fluid flow control apparatus comprising a fluid flow control valve being configured to be located in a fluid path and controlled by a control signal, a fluid flow sensor, said fluid flow sensor configured to sense fluid flow in the fluid path, and output an actual flow signal indicative thereof, and a fluid flow control circuit, said fluid flow control circuit configured to control said fluid flow control valve, said fluid flow control circuit including an actual control circuit configured to compare said actual flow signal with a desired flow signal and produce a signal related to this comparison, a desired flow comparator circuit configured to compare said desired flow signal with a desired flow threshold signal and provide a desired flow comparator output indicative of this comparison, and a summing circuit configured to receive said signal related to the comparison of said actual flow signal with said desired flow signal and a signal related to said desired flow comparator output, and provide said control signal based on said signals.
Claim 2
Dependent Claim
171 words
A fluid flow control apparatus comprising a fluid flow control valve being configured to be located in a fluid path and controlled by a control signal, a fluid flow sensor, said fluid flow sensor configured to sense fluid flow in the fluid path, and output an actual flow signal indicative thereof, and a fluid flow control circuit, said fluid flow control circuit configured to control said fluid flow control valve, said fluid flow control circuit including an actual control circuit configured to compare said actual flow signal with a desired flow signal and produce a signal related to this comparison, a desired flow comparator circuit configured to compare said desired flow signal with a desired flow threshold signal and provide a desired flow comparator output indicative of this comparison, and a summing circuit configured to receive said signal related to the comparison of said actual flow signal with said desired flow signal and a signal related to said desired flow comparator output, and provide said control signal based on said signals.
Claim 3
Dependent Claim
39 words
The fluid flow control apparatus of claim 1 wherein said fluid flow control circuit further comprises a sequential logic circuit configured to receive said desired flow comparator output and provide said signal related to said desired flow comparator output.
Claim 4
Dependent Claim
57 words
The fluid flow control apparatus of claim 2, wherein said fluid flow control circuit further comprises a flow comparator circuit configured to compare said actual flow signal with a flow defining threshold signal and provide a flow comparatoro output indicative of the comparison, and wherein said sequential logic circuit is configured to receive said flow comparator output.
Claim 5
Dependent Claim
49 words
The fluid flow control apparatus of claim 1 wherein said actual control circuit includes a subtraction circuit configured to receive said actual flow signal and said desired flow signal and to output a difference signal indicative of the difference between said actual flow signal and said desired flow signal.
Claim 6
Dependent Claim
65 words
The fluid flow control apparatus of claim 1 wherein said actual control circuit includes an integrating circuit configured to receive a signal indicating the difference between said actual flow signal and said desired flow signal and to output an initial flow control signal, said initial flow control signal steadily changing bsed on a constant difference between said actual flow signal and said desired flow signal.
Claim 7
Dependent Claim
17 words
The fluid flow control apparatus of claim 3 wherein said sequential logic circuit includes a Set-Reset flip-flop.
Claim 8
Dependent Claim
49 words
The fluid flow control apparatus of claim 6 wherein said sequential logic circuit includes a NOR gate, said NOR gate being inputted with the output of said desired flow comparator and said flow comparator, said NOR gate outputting a signal to the Reset input of said Set-Reset flip flop
Claim 9
Dependent Claim
50 words
The fluid flow control apparatus of claim 7 wherein said sequential logic circuit includes a second NOR gate, said second NOR gate being inputted with the output of said desired flow comparator, the output of desired flow comparator also being iputted to the Set input of said Set-Reset flip flop
Claim 10
Dependent Claim
49 words
The fluid flow control apparatus of claim 8 wherein said sequential logic circuit further includes a third NOR gate, said third NOR gate receiving the output of said Set-Reset flip-flop and the output of said second NOR gate and outputting said signal related to said desired flow comparator output.
Claim 11
Dependent Claim
37 words
The fluid flow control apparatus of claim 1 wherein said fluid flow control circuit further comprises an amplifier circuit configured to receive said control signal and output an amplified control signal to said fluid flow control valve.
Claim 12
Dependent Claim
26 words
The fluid flow control apparatus of claim 10 wherein said summing circuit includes a duty cycle modulated switching device and said amplifier circuit includes a switch.
Claim 13
Dependent Claim
18 words
The fluid flow control apparatus of claim 10 wherein said summing circuit and said amplifier circuit are combined.
Claim 14
Dependent Claim
24 words
The fluid flow control apparatus of claim 12 wherein said combined summing and amplifier circuit include a summing amplifier and a linear powered driver.
Claim 15
Independent Claim
126 words
A method of controlling flow through a fluid path in a system having a fluid flow control valve and a fluid flow sensor comprising sensing fluid flow through said fluid path with said fluid flow sensor and providing an actual flow signal indicative thereof, comparing said actual flow signal with a desired flow signal and providing a signal related to this comparison, comparing said desired flow signal with a desired flow threshold signal and providing a desired flow compare output indicative thereof, summing said signal related to the comparison of said actual flow signal with said desired flow signal and a signal related to said desired flow compare output to provide a control signal, and controlling flowo through said fluid path based on said control signal.
Claim 16
Independent Claim
126 words
A method of controlling flow through a fluid path in a system having a fluid flow control valve and a fluid flow sensor comprising sensing fluid flow through said fluid path with said fluid flow sensor and providing an actual flow signal indicative thereof, comparing said actual flow signal with a desired flow signal and providing a signal related to this comparison, comparing said desired flow signal with a desired flow threshold signal and providing a desired flow compare output indicative thereof, summing said signal related to the comparison of said actual flow signal with said desired flow signal and a signal related to said desired flow compare output to provide a control signal, and controlling flowo through said fluid path based on said control signal.
Claim 17
Dependent Claim
24 words
The fluid flow control apparatus of claim 1 wherein said signal related to said desired flow comparator output is said desired flow comparator output.
Claim 18
Dependent Claim
34 words
The method of claim 14 further comprising, providing said signal related to said desired flow compare output by a sequential logic circuit, said sequential logic circuit being inputted with said desired flow compare output.
Claim 19
Dependent Claim
21 words
The method of claim 14 wherein said signal related to said desired flow compare output is said desired flow compare output.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1992-10-30 | 1993-05-01 | 1993-10-31 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1996-10-30 | 1997-05-01 | 1997-10-31 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2000-10-30 | 2001-05-01 | 2001-10-31 | $7700.00 | Window Closed / Lapsed |