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US4880959A
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Process for interconnecting thin-film electrical circuits
Assignee: International Business Machines Corp
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Filing: 1988-10-26
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Granted: 1989-11-14
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Expires: 2008-10-26
Abstract
Abstract Thin-film electrical circuits are interconnected by a process comprising the steps of partially ablating the existing thin-film conductor at the connection point(s) by means of a pulsed laser and depositing a thin-film metal interconnection over the desired area, which includes the area(s) of the existing thin-film circuit that were exposed the pulsed laser.
Inventors
- 👤 Thomas H. Baum
- 👤 Paul B. Comita
- 👤 Robert L. Jackson
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 11:53
CPC Classifications
H; H05; H05K; H05K3/00; H05K3/22; H05K3/225; H05K3/46; H05K3/4644; H05K3/467; H10; H10D; H10D84/00; H10D84/01; H10D86/00; H10D86/01; H05K2201/00; H05K2201/03; H05K2201/0302; H05K2201/0317; H05K2203/00; H05K2203/03; H05K2203/0361; H05K2203/10; H05K2203/107; H05K2203/13; H05K2203/1333; H05K2203/1338; H05K2203/17; H05K2203/173; H05K3/02; H05K3/027
Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
40 words
A process for interconnecting thin-film electrical circuits, said process comprising the steps of: (a) partially ablating the metallurgy at the interconnection points by means of a pulsed laser, and (b) depositing metal to form an interconnection of the desired dimensions.
Claim 2
Dependent Claim
40 words
A process for interconnecting thin-film electrical circuits, said process comprising the steps of: (a) partially ablating the metallurgy at the interconnection points by means of a pulsed laser, and (b) depositing metal to form an interconnection of the desired dimensions.
Claim 3
Dependent Claim
20 words
A process as claimed in claim 1 where the interconnection is made for the purpose of repairing an open defect.
Claim 4
Dependent Claim
15 words
A process as claimed in claim 1 where the pulsed laser is an excimer laser.
Claim 5
Dependent Claim
19 words
A process as claimed in claim 3 where the pulsed laser is an excimer laser operating at 308 nm.
Claim 6
Dependent Claim
18 words
A process as claimed in claim 1 where the interconnection metallurgy is deposited by laser chemical vapor deposition.
Claim 7
Dependent Claim
18 words
A process as claimed in claim 5 where the metal is gold deposited from a dimethyl gold β-diketonate.
Claim 8
Dependent Claim
17 words
A process as claimed in claim 5 where the metal is copper deposited from a copper β-diketonate.
References Cited (Backward Citations)
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1992-11-13 | 1993-05-15 | 1993-11-14 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1996-11-13 | 1997-05-15 | 1997-11-14 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2000-11-13 | 2001-05-15 | 2001-11-14 | $7700.00 | Window Closed / Lapsed |