US4883560A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Plasma treating apparatus for gas temperature measuring method
Assignee: Panasonic Holdings Corp
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Filing: 1989-02-13
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Granted: 1989-11-28
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Expires: 2009-02-13
Abstract
Abstract Nitrogen gas plasma emission intensities are theoretically calculated at various gas temperatures, while they are actually measured by a spectroscope. By comparing the waveforms of the calculated and measured emission intensities with each other, the nitrogen gas temperature of at an arbitrary point in a plasma treating room can be determined.
Inventors
- 👤 Shin-ichiro Ishihara
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 15:48
CPC Classifications
C; C23; C23F; C23F4/00; H; H01; H01J; H01J37/00; H01J37/32; H01J37/32917; H01J37/32935
Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
143 words
A plasma treating apparatus, comprising an electric power source and movable electrodes for producing plasma in a gaseous material including nitrogen atoms, a plasma treating room, means for moving said electrodes means for establishing a gaseous material atmosphere including nitrogen atoms, in said room, a substrate which is subjected to an etching process or a depositing process by using said plasma, an electric power source for heating said substrate, a spectroscope capable of detecting nitrogen molecule emissions due to transitions between rotational quantum numbers as continuous emissions, a recorder for recording said measured emissions, and a controller capable of feeding back the data detected by said spectroscope and recorded by said recorded to at least one of said electric power source for producing said plasma, said electric power source for heating said substrate, said establishing means, and said means for moving said electrodes.
Claim 2
Dependent Claim
143 words
A plasma treating apparatus, comprising an electric power source and movable electrodes for producing plasma in a gaseous material including nitrogen atoms, a plasma treating room, means for moving said electrodes means for establishing a gaseous material atmosphere including nitrogen atoms, in said room, a substrate which is subjected to an etching process or a depositing process by using said plasma, an electric power source for heating said substrate, a spectroscope capable of detecting nitrogen molecule emissions due to transitions between rotational quantum numbers as continuous emissions, a recorder for recording said measured emissions, and a controller capable of feeding back the data detected by said spectroscope and recorded by said recorded to at least one of said electric power source for producing said plasma, said electric power source for heating said substrate, said establishing means, and said means for moving said electrodes.
Claim 3
Dependent Claim
107 words
A plasma temperature measuring method, comprising steps of calculating a theoretical nitrogen plasma emission intensity at various gas temperatures, measuring an actual nitrogen plasma emission intensity in a plasma treating room, comparing said measured emission intensity with said calculated emission intensity at a peak spectrum in a range from 400 nm to 406 nm among dissociated emission spectra of nitrogen molecules, distinguishing, through said comparison, a temperature rise of nitrogen gas caused by said electric power source for generating plasma from a temperature rise caused by heated bodies such as a substrate, a substrate holder and the like or by local heat sources or abnormal electric discharges.
Claim 4
Dependent Claim
107 words
A plasma temperature measuring method, comprising steps of calculating a theoretical nitrogen plasma emission intensity at various gas temperatures, measuring an actual nitrogen plasma emission intensity in a plasma treating room, comparing said measured emission intensity with said calculated emission intensity at a peak spectrum in a range from 400 nm to 406 nm among dissociated emission spectra of nitrogen molecules, distinguishing, through said comparison, a temperature rise of nitrogen gas caused by said electric power source for generating plasma from a temperature rise caused by heated bodies such as a substrate, a substrate holder and the like or by local heat sources or abnormal electric discharges.
Claim 5
Dependent Claim
27 words
A plasma treating apparatus as in claim 1 wherein said controller is capable of feeding back the data to said electric power source for producing said plasma.
Claim 6
Dependent Claim
27 words
A plasma treating apparatus as in claim 1 wherein said controller is capable of feeding back the data to said electric power source for heating said substrate.
Claim 7
Dependent Claim
22 words
A plasma treating apparatus as in claim 1 wherein said controller is capable of feeding back the data to said establishing means.
Claim 8
Dependent Claim
25 words
A plasma treating apparatus as in claim 1 wherein said controller is capable of feeding back the data to said means for moving said electrodes.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1992-11-27 | 1993-05-29 | 1993-11-28 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1996-11-27 | 1997-05-29 | 1997-11-28 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2000-11-27 | 2001-05-29 | 2001-11-28 | $7700.00 | Window Closed / Lapsed |