US4887283A
Expired / Lapsed
US
⏱️ 0.0 years remaining
X-ray mask and exposure method employing the same
Assignee: Mitsubishi Electric Corp
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Filing: 1989-03-22
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Granted: 1989-12-12
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Expires: 2009-03-22
Abstract
Abstract An X-ray mask includes a membrane formed of a material which transmits X-rays, a mask pattern formed on the surface of the membrane, the mask pattern being made of an X-ray absorbing material, and a supporting frame formed of a material which is mechanically deformed by an external signal. The supporting frame supports the membrane. In an exposure method which employs this X-ray mask, the X-ray mask is first disposed above a substrate in alignment therewith. Subsequently, distortion in the mask pattern is corrected by the application of the external signal to the supporting frame of the mask, and the substrate is then irradiated with X-rays through the mask so as to transfer the mask pattern of the mask to the substrate.
Inventors
- 👤 Kunihiro Hosono
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 03:35
CPC Classifications
G; G03; G03F; G03F1/00; G03F1/22; G03F7/00; G03F7/70; G03F7/70691; G03F7/70783; G21; G21K; G21K5/00; G21K5/04
Claims Analysis
Total Claims: 23
Claim 1
Independent Claim
57 words
An X-ray mask comprising: a membrane formed of a material which transmits X-rays; a mask pattern formed on said membrane, said mask pattern being made of an X-ray absorbing material; and a supporting frame formed of a material which is mechanically deformed in response to the application of an external signal, said supporting frame supporting said membrane.
Claim 2
Dependent Claim
57 words
An X-ray mask comprising: a membrane formed of a material which transmits X-rays; a mask pattern formed on said membrane, said mask pattern being made of an X-ray absorbing material; and a supporting frame formed of a material which is mechanically deformed in response to the application of an external signal, said supporting frame supporting said membrane.
Claim 3
Dependent Claim
18 words
An X-ray mask according to claim 1, wherein said supporting frame is annular and includes a central opening.
Claim 4
Dependent Claim
19 words
An X-ray mask according to claim 2, wherein said mask pattern is disposed on said membrane opposite said opening.
Claim 5
Dependent Claim
16 words
An X-ray mask according to claim 1, wherein said membrane is bonded to said supporting frame.
Claim 6
Dependent Claim
20 words
An X-ray mask according to claim 1, wherein said supporting frame is mechanically deformed in response to an electric field.
Claim 7
Dependent Claim
17 words
An X-ray mask according to claim 1, wherein said supporting frame is formed of an electrostriction material.
Claim 8
Dependent Claim
23 words
An X-ray mask according to claim 6, further including an electric field application means for applying an electric field to said supporting frame.
Claim 9
Dependent Claim
36 words
An X-ray mask according to claim 7, wherein said electric field application means includes first electrode means formed on said membrane, and second electrode means formed on said supporting frame, for forming an electric field therebetween.
Claim 10
Dependent Claim
22 words
An X-ray mask according to claim 8, wherein said first and second electrode means are annular and aligned with said supporting frame.
Claim 11
Dependent Claim
35 words
An X-ray mask according to claim 9, wherein said first electrode means includes a plurality of electrodes radially separated from each other, said second electrode means being an electrode common to said first electrode means.
Claim 12
Dependent Claim
30 words
An X-ray mask according to claim 10, including a power source device for selectively applying voltages between said individual electrodes of said first electrode means and said second electrode means.
Claim 13
Dependent Claim
35 words
An X-ray mask according to claim 9, wherein said second electrode means includes a plurality of electrodes radially separated from each other, said first electrode means being an electrode common to said second electrode means.
Claim 14
Dependent Claim
30 words
An X-ray mask according to claim 12, including a power source device for selectively applying voltages between said individual electrodes of said second electrode means and said first electrode means.
Claim 15
Dependent Claim
20 words
An X-ray mask according to claim 1, wherein said supporting frame is mechanically deformed in response to a magnetic field.
Claim 16
Dependent Claim
17 words
An X-ray mask according to claim 1, wherein said supporting frame is made of a magnetostriction material.
Claim 17
Dependent Claim
23 words
An X-ray mask according to claim 15, further including a magnetic field applying means for applying a magnetic field to said supporting frame.
Claim 18
Dependent Claim
28 words
An X-ray mask according to claim 16, wherein said magnetic field applying means includes a plurality of electromagnetic coil pairs with said supporting frame interposed between said pairs.
Claim 19
Dependent Claim
122 words
An exposure method comprising the steps of: disposing an X-ray mask above a substrate in alignment therewith, said X-ray mask having a membrane formed of a material which transmits X-rays, a mask pattern formed on the surface of said membrane, said mask pattern being made of an X-ray absorbing material, and a supporting frame formed of a material which is mechanically deformed in response to the application of an external signal, said supporting frame supporting said membrane; correcting distortion in said mask pattern of an mask by the application of said external signal to said supporting frame of said mask; and irradiating said substrate with X-rays through said mask so as to transfer said mask pattern of said mask to said substrate.
Claim 20
Dependent Claim
122 words
An exposure method comprising the steps of: disposing an X-ray mask above a substrate in alignment therewith, said X-ray mask having a membrane formed of a material which transmits X-rays, a mask pattern formed on the surface of said membrane, said mask pattern being made of an X-ray absorbing material, and a supporting frame formed of a material which is mechanically deformed in response to the application of an external signal, said supporting frame supporting said membrane; correcting distortion in said mask pattern of an mask by the application of said external signal to said supporting frame of said mask; and irradiating said substrate with X-rays through said mask so as to transfer said mask pattern of said mask to said substrate.
Claim 21
Dependent Claim
53 words
An exposure method according to claim 18, further including steps of: irradiating said substrate with rays of light through said mask so as to irradiate a first alignment mark provided on said mask and a second alignment mark provided on said substrate; and measuring the intensity of the light reflected by said substrate.
Claim 22
Dependent Claim
37 words
An exposure method according to claim 19, including correcting distortion in said mask pattern of said mask by applying an external signal to said supporting frame of said mask in response to the intensity of reflected light.
Claim 23
Dependent Claim
26 words
An exposure method according to claim 19, including aligning said mask and said substrate by moving said substrate in response to the intensity of reflected light.
References Cited (Backward Citations)
JPS62122216A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 1992-12-11 | 1993-06-12 | 1993-12-12 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1996-12-11 | 1997-06-12 | 1997-12-12 | $3760.00 | Window Closed / Lapsed |
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