US4889588A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Plasma etch isotropy control
Assignee: Motorola Solutions Inc
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Filing: 1989-05-01
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Granted: 1989-12-26
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Expires: 2009-05-01
Abstract
Abstract A tapered profile is obtained in oxide etched in a plasma glow discharge by switching the RF power between the side and lower electrodes in a tri-electrode reactor. The etch is isotropic while the RF power is applied to the side electrode and is anisotropic when the RF power is applied to the lower electrode.
Inventors
- 👤 Gianni O. Fior
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 13:39
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/32; H01J37/32009; H01J37/32082; H01J37/32431; H01J37/32532; H01J37/32568; H10; H10P; H10P50/00; H10P50/20; H10P50/28; H10P50/282; H10P50/283; H01J2237/00; H01J2237/32; H01J2237/33; H01J2237/334; H01J2237/3343; H01J2237/3344; H01J2237/3345
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
79 words
In a method for treating a semiconductor wafer subjected to a plasma glow discharge in a tri-electrode reactor having top, side, and lower electrodes, the improvement comprising: placing a wafer to be treated on said lower electrode; applying RF power only between the top and side electrodes of said reactor to cause an isotropic etch of said wafer; and applying RF power between the top and lower electrodes of said reactor to cause an anisotropic etch of said wafer.
Claim 2
Dependent Claim
79 words
In a method for treating a semiconductor wafer subjected to a plasma glow discharge in a tri-electrode reactor having top, side, and lower electrodes, the improvement comprising: placing a wafer to be treated on said lower electrode; applying RF power only between the top and side electrodes of said reactor to cause an isotropic etch of said wafer; and applying RF power between the top and lower electrodes of said reactor to cause an anisotropic etch of said wafer.
Claim 3
Dependent Claim
21 words
The method as set forth in claim 1 wherein said lower electrode is connected to a source of pulsed RF power.
Claim 4
Dependent Claim
28 words
The method as set forth in claim 2 and further comprising the step of alternately connecting said RF power to said side electrode and to said lower electrode.
Claim 5
Dependent Claim
74 words
In a method for etching an oxide layer on a semiconductor wafer subjected to a plasma glow discharge in a tri-electrode reactor having top, side, and lower electrodes, the improvement comprising: applying RF power between the top and side electrodes of said reactor to cause an isotropic etch of said oxide layer; and applying RF power between the top and lower electrodes of said reactor to cause an anisotropic etch of said oxide layer.
Claim 6
Dependent Claim
74 words
In a method for etching an oxide layer on a semiconductor wafer subjected to a plasma glow discharge in a tri-electrode reactor having top, side, and lower electrodes, the improvement comprising: applying RF power between the top and side electrodes of said reactor to cause an isotropic etch of said oxide layer; and applying RF power between the top and lower electrodes of said reactor to cause an anisotropic etch of said oxide layer.
Claim 7
Dependent Claim
77 words
In apparatus for etching an oxide layer on a semiconductor wafer in a plasma glow discharge sustained by RF power in a gas contained within a reactor chamber; wherein said reactor has two, parallel plate electrodes of which one is connected to RF ground; a third, sidewall electrode enclosing at least a portion of the region between the other two electrodes; wherein the improvement comprises: means for alternately connecting RF power to said second and third electrodes.
Claim 8
Dependent Claim
77 words
In apparatus for etching an oxide layer on a semiconductor wafer in a plasma glow discharge sustained by RF power in a gas contained within a reactor chamber; wherein said reactor has two, parallel plate electrodes of which one is connected to RF ground; a third, sidewall electrode enclosing at least a portion of the region between the other two electrodes; wherein the improvement comprises: means for alternately connecting RF power to said second and third electrodes.
Claim 9
Dependent Claim
62 words
The apparatus as set forth in claim 5 and further comprising a source of RF power and wherein said means for connecting comprises switch means for connecting said source of RF power alternately to the second and third electrodes to cause said etch to be alternately anisotropic and isotropic, thereby causing a tapered sidewall in the etched portion of said oxide layer.
Claim 10
Dependent Claim
35 words
The apparatus as set forth in claim 5 and further comprising two sources of RF power connected one each to said second and third electrodes, wherein said sources of RF power are of different frequencies.
References Cited (Backward Citations)
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| 3.5 Years (Year 4) | 1992-12-25 | 1993-06-26 | 1993-12-26 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1996-12-25 | 1997-06-26 | 1997-12-26 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2000-12-25 | 2001-06-26 | 2001-12-26 | $7700.00 | Window Closed / Lapsed |