US4895616A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method for making thin film orthogonal microsensor for air flow
Assignee: Honeywell Inc
•
Filing: 1989-04-24
•
Granted: 1990-01-23
•
Expires: 2009-04-24
Abstract
Abstract A microbridge air flow sensor which has a sealed etched cavity beneath the silicon nitride diaphragm so that the cavity is not susceptible to contamination from residual films or other material accumulating within the cavity. The cavity thermally isolates the heater and detectors which are encapsulated in the diaphragm. The cavity is fabricated by front side etching of the silicon wafer. Narrow slots are made through the silicon nitride diaphragm to expose a thin film (400 angstrom) rectangle of aluminum. A first etch removes the aluminum leaving a 400 angstrom very shallow cavity under the diaphragm. Anisotropic etch is then introduced into the shallow cavity to etch the silicon pit.
Inventors
- 👤 Robert E. Higashi
- 👤 James O. Holmen
- 👤 Steven D. James
- 👤 Robert G. Johnson
- 👤 Jeffrey A. Ridley
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 18:34
CPC Classifications
G; G01; G01F; G01F1/00; G01F1/68; G01F1/684; G01F1/6845; H; H10; H10P; H10P50/00; H10P50/69; H10P50/691; H01; H01H; H01H1/00; H01H1/0036; H01H2001/0089
Claims Analysis
Total Claims: 14
Claim 1
Independent Claim
213 words
A process for fabricating a thin film microsensor for air flow comprising the steps of: providing a single crystal (100) silicon wafer having a planar surface, and having a 110 direction; depositing and delineating a rectangular area of a thin film layer of sacrificial selectively etchable material on the silicon surface; depositing a thin film of silicon nitride on the selectively etchable material and the rest of the silicon surface, the film being thicker than the thickness of the sacrificial material; depositing and delineating a thin film of electrically resistive material on the silicon nitride to form desired circuit elements such as detector resistors, circuit resistors and a heater resistor, said heater resistor and detector resistors being located over said sacrificial material area; depositing a thin film of silicon nitride over the resistive material and the previous silicon nitride; cutting narrow slots through the silicon nitride to the sacrificial material layer, the slots being near the sacrificial material layer edges; introducing selective etch through the slots to etch out the sacrificial material layer leaving a thin cavity in its place; introducing an anisotropic etch through the slots and cavity to anisotropically etch a thermal isolation pit in the silicon wafer; and applying and delineating polyimide film over slots to close off the slots.
Claim 2
Dependent Claim
213 words
A process for fabricating a thin film microsensor for air flow comprising the steps of: providing a single crystal (100) silicon wafer having a planar surface, and having a 110 direction; depositing and delineating a rectangular area of a thin film layer of sacrificial selectively etchable material on the silicon surface; depositing a thin film of silicon nitride on the selectively etchable material and the rest of the silicon surface, the film being thicker than the thickness of the sacrificial material; depositing and delineating a thin film of electrically resistive material on the silicon nitride to form desired circuit elements such as detector resistors, circuit resistors and a heater resistor, said heater resistor and detector resistors being located over said sacrificial material area; depositing a thin film of silicon nitride over the resistive material and the previous silicon nitride; cutting narrow slots through the silicon nitride to the sacrificial material layer, the slots being near the sacrificial material layer edges; introducing selective etch through the slots to etch out the sacrificial material layer leaving a thin cavity in its place; introducing an anisotropic etch through the slots and cavity to anisotropically etch a thermal isolation pit in the silicon wafer; and applying and delineating polyimide film over slots to close off the slots.
Claim 3
Dependent Claim
22 words
The process according to claim 1 in which the thin film layer of sacrificial selectively etchable material is a selectively etchable metal.
Claim 4
Dependent Claim
17 words
The process according to claim 2 in which the thin film of selectively etchable metal is aluminum.
Claim 5
Dependent Claim
21 words
The process according to claim 3 in which the delineated rectangular area of aluminum is about 325 microns on a side.
Claim 6
Dependent Claim
29 words
The process according to claim 1 in which the delineated rectangular area of a thin film layer of sacrificial selectively etchable material is about 325 microns on a side.
Claim 7
Dependent Claim
16 words
The process according to claim 1 in which the narrow slots are about 2-4 microns wide.
Claim 8
Dependent Claim
18 words
The process according to claim 1 in which the thin film of resistive material is a resistive metal.
Claim 9
Dependent Claim
13 words
The process according to claim 7 in which the resistive metal is platinum.
Claim 10
Dependent Claim
24 words
The process according to claim 1 in which the critical edge of the selectively etchable material delineation is oriented orthogonally to the <110> direction.
Claim 11
Dependent Claim
204 words
A process for fabricating a thin film microsensor for airflow comprising the steps of: providing a single crystal (100) silicon wafer having a planar surface, and having a <110> direction; sputter depositing and delineating a 400 angstrom thick layer of sacrificial aluminum on the silicon surface, the critical edge of the aluminum delineation being oriented orthogonally to the <110> direction; sputter depositing about 5000 angstroms of silicon nitride on the aluminum and the rest of the silicon surface; depositing and delineating about 800 angstroms of platinum on the silicon nitride to form desired circuit elements such as detector resistors, circuit resistors and a heater resistor, said heater resistor and detector resistors being located over said aluminum; sputter depositing about 5000 angstroms of silicon nitride over the platinum and the previous silicon nitride; cutting narrow slots through the silicon nitride to the aluminum layer, the slots being near but spaced from the aluminum edges; introducing acid etch through the slots to etch out the sacrificial aluminum leaving a 400 angstrom high cavity; introducing KOH anisotropic etch through the slots and cavity to anisotropically etch a thermal isolation pit in the silicon wafer; and applying and delineating polyimide film over slots to close off the slots.
Claim 12
Dependent Claim
204 words
A process for fabricating a thin film microsensor for airflow comprising the steps of: providing a single crystal (100) silicon wafer having a planar surface, and having a <110> direction; sputter depositing and delineating a 400 angstrom thick layer of sacrificial aluminum on the silicon surface, the critical edge of the aluminum delineation being oriented orthogonally to the <110> direction; sputter depositing about 5000 angstroms of silicon nitride on the aluminum and the rest of the silicon surface; depositing and delineating about 800 angstroms of platinum on the silicon nitride to form desired circuit elements such as detector resistors, circuit resistors and a heater resistor, said heater resistor and detector resistors being located over said aluminum; sputter depositing about 5000 angstroms of silicon nitride over the platinum and the previous silicon nitride; cutting narrow slots through the silicon nitride to the aluminum layer, the slots being near but spaced from the aluminum edges; introducing acid etch through the slots to etch out the sacrificial aluminum leaving a 400 angstrom high cavity; introducing KOH anisotropic etch through the slots and cavity to anisotropically etch a thermal isolation pit in the silicon wafer; and applying and delineating polyimide film over slots to close off the slots.
Claim 13
Dependent Claim
23 words
The process according to claim 10 in which the delineated layer of aluminum covers a square area about 325 microns on a side.
Claim 14
Dependent Claim
16 words
The process according to claim 10 in which the narrow slots are about 2-4 microns wide.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1993-01-22 | 1993-07-24 | 1994-01-23 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1997-01-22 | 1997-07-24 | 1998-01-23 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2001-01-22 | 2001-07-24 | 2002-01-23 | $7700.00 | Window Closed / Lapsed |