US4903437A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Slicing machine for cutting semiconductor material
Assignee: Mitsubishi Materials Corp
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Filing: 1988-07-25
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Granted: 1990-02-27
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Expires: 2008-07-25
Abstract
Abstract Slicing machine having a handle to be driven manually to generate command pulses. By revolving the handle, a feedtable is moved at the operator's command, enabling the positioning of a semiconductor material at the right position to start slicing. The thickness of the first wafer cut off from the material as well as other wafers, has a predetermined thickness, so that no wafer is wasted.
Inventors
- 👤 Yutaka Kubotera
- 👤 Kazunari Akiyama
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 06:18
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/04; H10P72/0428; G; G05; G05B; G05B19/00; G05B19/02; G05B19/18; G05B19/19; G05B19/21; G05B19/23; B; B28; B28D; B28D5/00; B28D5/02; B28D5/022; B28D5/024; G05B2219/00; G05B2219/30; G05B2219/35; G05B2219/35459; G05B2219/36; G05B2219/36383; G05B2219/50; G05B2219/50084
Claims Analysis
Total Claims: 9
Claim 1
Independent Claim
134 words
A slicing machine for cutting semiconductor material into wafers, having a feedtable to be adapted to carry thereon a semiconductor material to be cut, a carrying mechanism which moves the feedtable, a driving circuit which drives the carrying mechanism according to command pulses, a main controller which feeds the command pulses to the driving circuit, and a detection means which detects the position of the feedtable and outputs position data, wherein said slicing machine comprises: (a) a handle operatively connected to the feedtable so as to move the feedtable manually; (b) a manual pulse generator which produces a series of pulses according to the rotation of the handle; and (c) a manual pulse controller which transforms the said series of pulses into the command pulses, and supplies the command pulses to the driving circuit.
Claim 2
Dependent Claim
134 words
A slicing machine for cutting semiconductor material into wafers, having a feedtable to be adapted to carry thereon a semiconductor material to be cut, a carrying mechanism which moves the feedtable, a driving circuit which drives the carrying mechanism according to command pulses, a main controller which feeds the command pulses to the driving circuit, and a detection means which detects the position of the feedtable and outputs position data, wherein said slicing machine comprises: (a) a handle operatively connected to the feedtable so as to move the feedtable manually; (b) a manual pulse generator which produces a series of pulses according to the rotation of the handle; and (c) a manual pulse controller which transforms the said series of pulses into the command pulses, and supplies the command pulses to the driving circuit.
Claim 3
Dependent Claim
97 words
A slicing machine of claim 1, wherein said manual pulse controller comprises: (a) an up-down counter for counting the difference between the number of output pulses of the manual pulse generator and the number of the command pulses; (b) a ROM for storing a predetermined pattern for correlating the output of the up-down counter with the frequency of the command pulses, and producing data which determines the frequency of the command pulses in response to the output of the up-down counter; and (c) a means for oscillating the command pulses according to the output of the ROM.
Claim 4
Dependent Claim
35 words
A slicing machine of claim 2, wherein said manual pulse controller further comprises a divider for dividing the frequency of the command pulses and feeds its output to an input terminal of the up-down counter.
Claim 5
Dependent Claim
23 words
A slicing machine of claim 3, further comprising a selecting switch connected to the divider for selecting a dividing ratio of the divider.
Claim 6
Dependent Claim
65 words
A slicing machine of claim 1, further comprising a non-volatile memory to store the position data of the feedtable, a means to write the position data into the non-volatile memory at the moment when an externally supplied electric power is turned off, and a means to retrieve the position data from the non-volatile memory to the detection means when the electric power is turned on.
Claim 7
Dependent Claim
31 words
A slicing machine of claim 5, wherein said detection means comprises a rotary-encoder to detect the position of the feedtable and an up-down counter to count output pulses of the rotary-encoder.
Claim 8
Dependent Claim
16 words
A slicing machine of claim 6, further comprising a reset switch for clearing the up-down counter.
Claim 9
Dependent Claim
21 words
A slicing machine of claim 7, further comprising a display means to display the position data retrieved from the non-volatile memory.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1993-02-26 | 1993-08-28 | 1994-02-27 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1997-02-26 | 1997-08-28 | 1998-02-27 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2001-02-26 | 2001-08-28 | 2002-02-27 | $7700.00 | Window Closed / Lapsed |