Vacuum pump

Claim 2

A vacuum pump comprising a housing having a suction port, an exhaust path, a rotor rotatably supported inside said housing, means for elevating a temperature and pressure of a process gas sucked from said suction port from compression of the process gas, means for discharging the process gas from said exhaust path reduced in pressure to near the atmospheric pressure, means for preventing adhesion of the solid reaction product in the discharging means including heating means disposed in said exhaust path for heating the solid reaction product.

Claim 3

The vacuum pump according to claim 1, wherein said heating means includes a heating member fixed to said housing in such a manner so as to be positioned inside said exhaust path.

Claim 4

The vacuum pump according to claim 1, wherein said heating means is disposed on an inner surface of said exhaust path.

Claim 5

The vacuum pump according to claim 3, wherein said heating means includes a tubular member arranged in said exhaust path so as to allow the process gas to flow into said tubular member and having, in a sidewall portion thereof, a space filled with a high temperature fluid extending in an axial direction of said tubular member.

Claim 6

The vacuum pump according to claim 3, wherein said heating means includes a tubular member arranged in said exhaust path so as to allow the gas to flow into said tubular member and having, in a side wall portion thereof, and extending in an axial direction of said tubular member a space filled with a high temperature fluid.

Claim 7

A vacuum pump comprising a housing including a suction port and an exhaust path, a rotor rotatably supported inside said housing, and means for sequentially compressing a process gas sucked from said suction path and discharging the same from said exhaust path at a pressure near to atmospheric pressure, the improvement comprising: a solid reaction product prevention means including a heating means and a temperature detector means for detecting a temperature of said heating means, said heating means and said temperature detector means being disposed in said exhaust path; a heat source connected to said heating means; means for adjusting a supply quantity of said heat source; a temperature setter; and control means for controlling said heat supply quantity adjustment means by a set temperature from said temperature setter and a detected temperature from said temperature detector means so that reaction products of the process gas are prevented from adhering to the exhaust path.

Claim 8

A vacuum pump comprising a housing including a suction port and an exhaust path, a rotor rotatably supported inside said housing, and means for sequentially compressing a process gas sucked from said suction path and discharging the same from said exhaust path at a pressure near to atmospheric pressure, the improvement comprising: a solid reaction product prevention means including a heating means and a temperature detector means for detecting a temperature of said heating means, said heating means and said temperature detector means being disposed in said exhaust path; a heat source connected to said heating means; means for adjusting a supply quantity of said heat source; a temperature setter; and control means for controlling said heat supply quantity adjustment means by a set temperature from said temperature setter and a detected temperature from said temperature detector means so that reaction products of the process gas are prevented from adhering to the exhaust path.

Claim 9

The vacuum pump according to claim 6, wherein said heating means includes a heating member fixed to said housing in such a manner so as to be positioned inside said exhaust path.

Claim 10

The vacuum pump according to claim 6, wherein said heating means is disposed on an inner surface of said exhaust path.

Claim 11

The vacuum pump according to claim 8, wherein said heating means includes a tubular heating member.

Claim 12

The vacuum pump according to claim 8, wherein said heating portion is a tubular member forming a part of said exhaust path and having a space into which a high temperature fluid is supplied.

Claim 13

The vacuum pump according to one of claims 6, 7, 8 or 9, wherein said heat source includes an electrical power source and said heat supply quantity adjustment means includes a variable resistor.

Claim 14

The vacuum pump according to one of claim 6, 7, 8 or 9, wherein said means for sequentially compressing includes a plurality of vanes arranged to form multiple compression stages in cooperation with a stator dispored in said housing, whereby the process gas is sequentially compressed and discharged from said exhaust path.

Claim 15

A vacuum pump comprising a housing including a suction port, an exhaust path, a rotor rotatably supported inside said housing, and means for compressing a gas sucked from said suction port and for discharging the compressed gas from said exhaust path near to the atmosphere, the improvement comprising: means for preventing adhesion of a solid reaction product of the process gas including a heating means and temperature detector means for detecting a temperature of said heating means, each being disposed in said exhaust path, said heating means is disposed on an inner surface of said exhaust path; a heat source connected to said heating means, said heat source is a high temperature fluid source, said heating means includes a tubular member having a space into which a high temperature fluid from said high temperature fluid source is supplied; means for adjusting a supply quantity of said heat source including a valve means; a temperature setter; and control means for controlling said heat supply quantity adjustment means by a set temperature from said temperature setter and a detected temperature from said temperature detector means.

Claim 16

A vacuum pump comprising a housing including a suction port, an exhaust path, a rotor rotatably supported inside said housing, and means for compressing a gas sucked from said suction port and for discharging the compressed gas from said exhaust path near to the atmosphere, the improvement comprising: means for preventing adhesion of a solid reaction product of the process gas including a heating means and temperature detector means for detecting a temperature of said heating means, each being disposed in said exhaust path, said heating means is disposed on an inner surface of said exhaust path; a heat source connected to said heating means, said heat source is a high temperature fluid source, said heating means includes a tubular member having a space into which a high temperature fluid from said high temperature fluid source is supplied; means for adjusting a supply quantity of said heat source including a valve means; a temperature setter; and control means for controlling said heat supply quantity adjustment means by a set temperature from said temperature setter and a detected temperature from said temperature detector means.

Claim 17

A vacuum pump for treatment of a process gas, the vacuum pump comprising means for sequentially compressing the process gas and discharge means for discharging the compressed gas elevated in temperature and pressure while allowing said compressed process gas to be cooled and to be reduced in pressure to around atmospheric pressure, means for preventing adhesion of a solid reaction product of a process gas comprising a heating means provided on said discharge means for preventing the compressed process gas passing through said discharge means from being cooled thereby preventing the solid reaction products of said process gas from adhering to said discharge means.

Claim 18

A vacuum pump for treatment of a process gas, the vacuum pump comprising means for sequentially compressing the process gas and discharge means for discharging the compressed gas elevated in temperature and pressure while allowing said compressed process gas to be cooled and to be reduced in pressure to around atmospheric pressure, means for preventing adhesion of a solid reaction product of a process gas comprising a heating means provided on said discharge means for preventing the compressed process gas passing through said discharge means from being cooled thereby preventing the solid reaction products of said process gas from adhering to said discharge means.