US4906347A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Dry-etching apparatus
Assignee: Panasonic Holdings Corp
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Filing: 1988-08-04
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Granted: 1990-03-06
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Expires: 2008-08-04
Abstract
Abstract The magnetron dry-etching apparatus has, behind its anode electrode (1) facing an object to be etched positioned on a cathode electrode (2), a rotatable magnet assembly comprising at least one pair of rotatable permanent magnets (12) of narrow-pie-shape, fixed on a common yoke (14) so that different polarity magnetic poles (N and S) are disposed side by side; whereby a uniform magnetic field is formed on a wafer (8) on the cathode (2) upon rotation of said magnet assembly, thereby assuring uniform etching even upon change of gas pressure of other etching conditions.
Inventors
- 👤 Kazuyuki Tomita
- 👤 Masuo Tanno
- 👤 Yasuo Tanaka
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 23:11
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/04; H10P72/0402; H10P72/0418; H10P72/0421; H01; H01J; H01J37/00; H01J37/32; H01J37/32431; H01J37/32623; H01J37/3266; H01J37/32532; H01J37/32669; H01J37/32798; H01J37/32816; H01J37/32834
Claims Analysis
Total Claims: 2
Claim 1
Independent Claim
173 words
A dry-etching apparatus comprising; an etching chamber containing a cathode electrode for placing a workpiece substrate thereon, an anode electrode installed in parallel arrangement to said cathode electrode with a gap inbetween, means for applying R. F. power across said cathode electrode and said anode electrode, means for supplying reaction gas to said etching chamber, and means for evacuating said etching chamber to predetermined pressure, a rotary permanent magnet assembly located behind said anode electrode and having means for rotation in a plane parallel to said anode electrode and comprising a plurality of pairs of narrow-pie-shaped permanent magnets fixed to a yoke in a manner such that different polarity magnetic poles are disposed side by side on both sides of a radial line originating from the center of said rotation, with the apexes of said narrow-pie-shaped permanent magnets at the center, a plurality of pairs of said narrow-pie-shaped permanent magnets being arranged in a manner such that the same polarity magnetic poles of adjacent pairs are disposed side by side on said yoke.
Claim 2
Dependent Claim
173 words
A dry-etching apparatus comprising; an etching chamber containing a cathode electrode for placing a workpiece substrate thereon, an anode electrode installed in parallel arrangement to said cathode electrode with a gap inbetween, means for applying R. F. power across said cathode electrode and said anode electrode, means for supplying reaction gas to said etching chamber, and means for evacuating said etching chamber to predetermined pressure, a rotary permanent magnet assembly located behind said anode electrode and having means for rotation in a plane parallel to said anode electrode and comprising a plurality of pairs of narrow-pie-shaped permanent magnets fixed to a yoke in a manner such that different polarity magnetic poles are disposed side by side on both sides of a radial line originating from the center of said rotation, with the apexes of said narrow-pie-shaped permanent magnets at the center, a plurality of pairs of said narrow-pie-shaped permanent magnets being arranged in a manner such that the same polarity magnetic poles of adjacent pairs are disposed side by side on said yoke.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1993-03-05 | 1993-09-04 | 1994-03-06 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1997-03-05 | 1997-09-04 | 1998-03-06 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2001-03-05 | 2001-09-04 | 2002-03-06 | $7700.00 | Window Closed / Lapsed |