US4912062A
Expired / Lapsed
US
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Method of eliminating bird's beaks when forming field oxide without nitride mask
Assignee: NXP USA Inc
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Filing: 1988-05-20
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Granted: 1990-03-27
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Expires: 2008-05-20
Abstract
Abstract A method of selectively forming a field oxide in a semiconductor device is provided by implanting a dopant into selected regions of a semiconductor substrate. A high concentration of dopant provides for an enhanced oxide growth rate. Another dopant may be implanted if necessary to provide a high field threshold voltage to prevent inversion. Annealing the semiconductor substrate and growing the oxide at a predetermined temperature will keep the high concentration of dopant in the semiconductor substrate, and thus maintain a state of enhanced oxide growth throughout the oxidation cycle. By taking advantage of enhanced oxidation, a mask, such as silicon nitride, is not required to prevent the substantial growth of oxide in the undoped region or active area.
Inventors
- 👤 Jaipal S. Verma
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 11:46
CPC Classifications
H; H10; H10P; H10P14/00; H10P14/60; H10P14/63; H10P14/6302; H10P14/6304; H10P14/6306; H10P14/6308; H10P14/6309; H10P14/61; H10P14/6322; H10P14/65; H10P14/6502; H10W; H10W10/00; H10W10/01; H10W10/011; H10W10/012; H10W10/0125; H10W10/10; H10W10/13
Claims Analysis
Total Claims: 16
Claim 1
Independent Claim
178 words
A method of forming a field oxide on a selected region of a semiconductor substrate of a first conductivity type without using a silicon nitride mask, comprising the steps of: adding a first dopant to a preselected region of the semiconductor substrate thereby providing at least one doped region and at least one undoped region, wherein the first dopant determines a threshold voltage in the doped region; adding a second dopant to the preselected region of the semiconductor substrate, the concentration of the second dopant exceeding a thermal solid solubility limit of the second dopant in the semiconductor substrate, wherein the second dopant is at a shallower depth in the semiconductor substrate than the first dopant; and forming an oxide layer at a pressure of about one atmosphere or less on the semiconductor substrate wherein the oxide forms in the doped region at a faster rate than in the updoped region due to enhanced oxidation caused by the second dopant to form the field oxide in a manner to minimize encroachment of field oxide into the undoped region.
Claim 2
Independent Claim
178 words
A method of forming a field oxide on a selected region of a semiconductor substrate of a first conductivity type without using a silicon nitride mask, comprising the steps of: adding a first dopant to a preselected region of the semiconductor substrate thereby providing at least one doped region and at least one undoped region, wherein the first dopant determines a threshold voltage in the doped region; adding a second dopant to the preselected region of the semiconductor substrate, the concentration of the second dopant exceeding a thermal solid solubility limit of the second dopant in the semiconductor substrate, wherein the second dopant is at a shallower depth in the semiconductor substrate than the first dopant; and forming an oxide layer at a pressure of about one atmosphere or less on the semiconductor substrate wherein the oxide forms in the doped region at a faster rate than in the updoped region due to enhanced oxidation caused by the second dopant to form the field oxide in a manner to minimize encroachment of field oxide into the undoped region.
Claim 3
Dependent Claim
19 words
The method of claim 1 wherein the first dopant is of the same conductivity type as the semiconductor substrate.
Claim 4
Dependent Claim
21 words
The method of claim 1 wherein the forming of the oxide layer is performed at a temperature less than 950° C.
Claim 5
Independent Claim
200 words
A method for forming a field oxide on a selected region of a semiconductor substrate of a first conductivity type, comprising the steps of: providing a thin layer of oxide on the semiconductor substrate; adding a first dopant to a preselected region of the semiconductor substrate thereby providing at least one doped region and at least one undoped region, wherein the first dopant determines a threshold voltage in the doped region; adding a second dopant to the preselected region of the semiconductor substrate, the concentration of the second dopant exceeding a thermal solid solubility limit of the second dopant in the semiconductor substrate, wherein the second dopant is at a shallower depth in the semiconductor substrate than the first dopant; annealing the semiconductor substrate at a pressure of about one atmosphere or less and at approximately 600° C.; and forming an oxide layer on the semiconductor substrate at a temperature higher than 600° C., so that the oxide forms in the doped region at a faster rate than in the undoped region due to enhanced oxidation caused by the second dopant to form the field oxide in a manner to minimize encroachment of the field oxide into the undoped region.
Claim 6
Independent Claim
200 words
A method for forming a field oxide on a selected region of a semiconductor substrate of a first conductivity type, comprising the steps of: providing a thin layer of oxide on the semiconductor substrate; adding a first dopant to a preselected region of the semiconductor substrate thereby providing at least one doped region and at least one undoped region, wherein the first dopant determines a threshold voltage in the doped region; adding a second dopant to the preselected region of the semiconductor substrate, the concentration of the second dopant exceeding a thermal solid solubility limit of the second dopant in the semiconductor substrate, wherein the second dopant is at a shallower depth in the semiconductor substrate than the first dopant; annealing the semiconductor substrate at a pressure of about one atmosphere or less and at approximately 600° C.; and forming an oxide layer on the semiconductor substrate at a temperature higher than 600° C., so that the oxide forms in the doped region at a faster rate than in the undoped region due to enhanced oxidation caused by the second dopant to form the field oxide in a manner to minimize encroachment of the field oxide into the undoped region.
Claim 7
Dependent Claim
19 words
The method of claim 4 wherein the first dopant is of the same conductivity type as the semiconductor substrate.
Claim 8
Dependent Claim
23 words
The method of claim 4 wherein the forming of the oxide layer is done at a temperature between 700° C. and 950° C.
Claim 9
Independent Claim
215 words
A method of growing a field oxide on a selected region of a semiconductor substrate comprising the steps of: providing a thin layer of oxide on the semiconductor substrate; forming a masking layer on the oxide with at least one opening in the mask; implanting a first dopant through the opening to the semiconductor substrate thereby providing at least one doped region and at least one undoped region, wherein the first dopant determines a threshold voltage in the doped region; implanting a second dopant through the opening to the semiconductor substrate, the concentration of the second dopant exceeding a thermal solid solubility limit in the semiconductor substrate, wherein the second dopant is at a shallower depth in the semiconductor substrate than the first dopant; removing the masking layer; annealing the semiconductor substrate at a low temperature of approximately 600° C.; and growing an oxide layer on the semiconductor substrate by wet oxidation at a pressure of about one atmosphere or less and at a temperature higher than 600° C., so that the oxide forms in the doped region at a faster rate than in the undoped region due to enhanced oxidation caused by the second dopant to form the field oxide in a manner to minimize encroachment of the field oxide into the undoped region.
Claim 10
Independent Claim
215 words
A method of growing a field oxide on a selected region of a semiconductor substrate comprising the steps of: providing a thin layer of oxide on the semiconductor substrate; forming a masking layer on the oxide with at least one opening in the mask; implanting a first dopant through the opening to the semiconductor substrate thereby providing at least one doped region and at least one undoped region, wherein the first dopant determines a threshold voltage in the doped region; implanting a second dopant through the opening to the semiconductor substrate, the concentration of the second dopant exceeding a thermal solid solubility limit in the semiconductor substrate, wherein the second dopant is at a shallower depth in the semiconductor substrate than the first dopant; removing the masking layer; annealing the semiconductor substrate at a low temperature of approximately 600° C.; and growing an oxide layer on the semiconductor substrate by wet oxidation at a pressure of about one atmosphere or less and at a temperature higher than 600° C., so that the oxide forms in the doped region at a faster rate than in the undoped region due to enhanced oxidation caused by the second dopant to form the field oxide in a manner to minimize encroachment of the field oxide into the undoped region.
Claim 11
Dependent Claim
66 words
The method of claim 7 wherein the first dopant is boron implanted with a dose of approximately 4×10 15 atoms/cm 2 to a depth of approximately one-half of the desired oxide thickness to be grown in the doped region, and the second dopant is arsenic implanted with a dose of approximately 1×10 16 atoms/cm 2 to a depth substantially near the surface of the semiconductor substrate.
Claim 12
Dependent Claim
32 words
The method of claim 7 wherein the growing of the oxide layer is done at a temperature range of approximately 800° C. to 850° C., at a pressure of substantially one atmosphere.
Claim 13
Dependent Claim
22 words
The method of claim 7 wherein the thickness of the oxide grown in the doped region is approximately 7,000 to 10,000 angstroms.
Claim 14
Dependent Claim
35 words
The method of claim 7 including removing a predetermined thickness of oxide over both the doped and the undoped regions so that there is no oxide left in the undoped region of the semiconductor substrate.
Claim 15
Independent Claim
132 words
A method of forming a field oxide layer on a selected region of a semiconductor substrate without using a silicon nitride mask, comprising the steps of: adding a dopant of a type that enhances oxide growth rate to a field region of the semiconductor substrate thereby providing at least one doped region and at least one undoped region, wherein the dopant concentration in the doped region exceeds the thermal solid solubility of the dopant in the semiconductor substrate, at a pressure of about one atmosphere or less and; forming an oxide layer on the semiconductor substrate wherein the oxide forms in the doped region at a faster rate than in the undoped region to form the field oxide in a manner to minimize encroachment of the field oxide into the undoped region.
Claim 16
Independent Claim
132 words
A method of forming a field oxide layer on a selected region of a semiconductor substrate without using a silicon nitride mask, comprising the steps of: adding a dopant of a type that enhances oxide growth rate to a field region of the semiconductor substrate thereby providing at least one doped region and at least one undoped region, wherein the dopant concentration in the doped region exceeds the thermal solid solubility of the dopant in the semiconductor substrate, at a pressure of about one atmosphere or less and; forming an oxide layer on the semiconductor substrate wherein the oxide forms in the doped region at a faster rate than in the undoped region to form the field oxide in a manner to minimize encroachment of the field oxide into the undoped region.
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