US4929536A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Image reversal negative working O-napthoquinone diazide and cross-linking compound containing photoresist process with thermal curing
Assignee: EMD Performance Materials Corp
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Filing: 1988-11-08
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Granted: 1990-05-29
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Expires: 2008-11-08
Abstract
Abstract A process for converting a normally positive working photosensitive composition to a negative working composition is disclosed. One forms a composition containing an alkali soluble resin, a 1,2 quinone diazide-4-sulfonyl compound and an acid catalyzed crosslinker in a solvent mixture. After drying and imagewise exposing, the composition is baked and developed to produce a negative image. The image-reversal negative-working photoresists of this invention have superior storage stability and shelf life.
Inventors
- 👤 Mark A. Spak
- 👤 Donald Mammato
- 👤 Dana Durham
- 👤 Sangya Jain
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-03 05:55
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/004; G03F7/022; G03F7/0226; G03F7/26; G03F7/38; Y; Y10; Y10S; Y10S430/00; Y10S430/143; Y10S430/167; Y10S430/168
Claims Analysis
Total Claims: 17
Claim 1
Independent Claim
435 words
A process for preparing and using a negative working photographic element which consists essentially of, in order: (a) forming a composition which consists essentially of in admixture: (i) from about 1% to about 25% based on the weight of a the solid parts of the composition of a photosensitive composition comprising the condensation product of: I. A phenolic compound having the structure: ##STR37## wherein: R a is H, OH, halogen or lower alkyl, with at least two and not greater than six R a radicals being OH, and X is a single C--C bond, --O--, --S--, ##STR38## II. A 1,2 naphthoquinonediazide-4-sulfonic acid (Diazo I), and III. A 1,2 naphthoquinonediazide-5-sulfonic acid (Diazo II) or an organic acid of the formula W--R 3 , wherein W is ##STR39## or --SO 2 --V, V is halogen and R 3 is alkyl, aryl, substituted alkyl or substituted aryl; wherein the molar ratio of the amount of Diazo I reacted to the amount of Diazo II and/or organic acid reacted is the range of from about 1:1 to about 39:1; (ii) from about 75% to about 99% based on the weight of the solid parts of the composition of a novolak resin; and (iii) from about 0.5% to about 20% based on the weight of the solids parts of the composition of a crosslinking compound which, when in the presence of that amount and strength of the acid generated when said diazide is exposed to actinic radiation, is capable of crosslinking said resin under the application of the heating conditions of step (e), said crosslinking compound has the formula ##STR40## wherein R 1 , R 4 , R 5 , R 6 are independently H, (C 1 -C 6 )alkyl, (C 3 -C 6 )cycloalkyl, aryl, arylalkyl or OR 2 ; and R 2 , R 3 are independently H, (C 1 -C 6 )alkyl, (C 3 -C 6 )cycloalkyl, aryl or arylalkyl; and (iv) sufficient solvent to dissolve the foregoing composition components; and (b) coating said composition on a substrate; and (c) heating said coated substrate at a temperature of from about 20° to about 100° C. until substantially all of said solvent is dried off; and (d) imagewise exposing said composition to actinic, electron beam, ion beam or x-ray radiation; and (e) heating said coated substrate at a temperature of at least about 95° C. to about 160° C. for about 10 seconds or more to crosslink said resin; and (f) removing the unexposed non-image areas of said composition with a developer wherein the process is conducted in the absence of a flood exposure after heating step (e).
Claim 2
Dependent Claim
435 words
A process for preparing and using a negative working photographic element which consists essentially of, in order: (a) forming a composition which consists essentially of in admixture: (i) from about 1% to about 25% based on the weight of a the solid parts of the composition of a photosensitive composition comprising the condensation product of: I. A phenolic compound having the structure: ##STR37## wherein: R a is H, OH, halogen or lower alkyl, with at least two and not greater than six R a radicals being OH, and X is a single C--C bond, --O--, --S--, ##STR38## II. A 1,2 naphthoquinonediazide-4-sulfonic acid (Diazo I), and III. A 1,2 naphthoquinonediazide-5-sulfonic acid (Diazo II) or an organic acid of the formula W--R 3 , wherein W is ##STR39## or --SO 2 --V, V is halogen and R 3 is alkyl, aryl, substituted alkyl or substituted aryl; wherein the molar ratio of the amount of Diazo I reacted to the amount of Diazo II and/or organic acid reacted is the range of from about 1:1 to about 39:1; (ii) from about 75% to about 99% based on the weight of the solid parts of the composition of a novolak resin; and (iii) from about 0.5% to about 20% based on the weight of the solids parts of the composition of a crosslinking compound which, when in the presence of that amount and strength of the acid generated when said diazide is exposed to actinic radiation, is capable of crosslinking said resin under the application of the heating conditions of step (e), said crosslinking compound has the formula ##STR40## wherein R 1 , R 4 , R 5 , R 6 are independently H, (C 1 -C 6 )alkyl, (C 3 -C 6 )cycloalkyl, aryl, arylalkyl or OR 2 ; and R 2 , R 3 are independently H, (C 1 -C 6 )alkyl, (C 3 -C 6 )cycloalkyl, aryl or arylalkyl; and (iv) sufficient solvent to dissolve the foregoing composition components; and (b) coating said composition on a substrate; and (c) heating said coated substrate at a temperature of from about 20° to about 100° C. until substantially all of said solvent is dried off; and (d) imagewise exposing said composition to actinic, electron beam, ion beam or x-ray radiation; and (e) heating said coated substrate at a temperature of at least about 95° C. to about 160° C. for about 10 seconds or more to crosslink said resin; and (f) removing the unexposed non-image areas of said composition with a developer wherein the process is conducted in the absence of a flood exposure after heating step (e).
Claim 3
Dependent Claim
11 words
The process of claim 1 wherein said crosslinker is dimethylol paracresol.
Claim 4
Dependent Claim
13 words
The process of claim 1 wherein said crosslinker is methyl methoxy diphenyl ether.
Claim 5
Dependent Claim
27 words
The process of claim 1 wherein said crosslinker compound is one or more compounds selected from the group consisting of benzene, 1-methoxy-2,6-bis(hydroxymethyl-4-methyl-; phenol, 2,6-bis(methoxymethyl)-4-methyl-; and benzene, 1-methoxy-2,6-bis(methoxymethyl)-4-methyl-.
Claim 6
Dependent Claim
12 words
The process of claim 1 wherein said solvent comprises propylene glycolalkylether acetate.
Claim 7
Dependent Claim
34 words
The process of claim 1 wherein said substrate is selected from the group consisting of silicon, aluminum or polymeric resins, silicon dioxide, doped silicon dioxide, silicon nitride, tantalum, copper, polysilicon, ceramics and aluminum/copper mixtures.
Claim 8
Dependent Claim
33 words
The process of claim 1 wherein said composition further comprises one or more compounds selected from the group consisting of colorants, dyes, anti-striation agents, leveling agents, plasticizers, adhesion promoters, speed enhancers, and surfactants.
Claim 9
Dependent Claim
23 words
The process of claim 1 wherein said step (e) is conducted at a temperature of from about 95° C. to about 150° C.
Claim 10
Dependent Claim
20 words
The process of claim 8 wherein said step (e) is conducted for from about 10 seconds to about 90 seconds.
Claim 11
Dependent Claim
23 words
The process of claim 1 wherein said step (e) is conducted at a temperature of from about 112° C. to about 120° C.
Claim 12
Dependent Claim
20 words
The process of claim 10 wherein said step (e) is conducted for from about 10 seconds to about 90 seconds.
Claim 13
Dependent Claim
20 words
The process of claim 1 wherein said step (e) is conducted for from about 10 seconds to about 90 seconds.
Claim 14
Dependent Claim
13 words
The process of claim 1 wherein said developer is an aqueous alkaline solution.
Claim 15
Dependent Claim
15 words
The process of claim 13 wherein said developer comprises sodium hydroxide and/or tetramethyl ammonium hydroxide.
Claim 16
Dependent Claim
53 words
The process of claim 1 wherein said resin is a novolak, said crosslinker comprises dimethylol paracresol, said heating step (e) is conducted at a temperature of from about 112° C. to about 120° C. for up to 90 seconds, and said developer comprises an aqueous solution of sodium hydroxide and/or tetramethyl ammonium hydroxide.
Claim 17
Dependent Claim
21 words
The process of claim 1 wherein said condensation product is produced with both Diazo II and said organic acid as reactants.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 1993-05-28 | 1993-11-27 | 1994-05-29 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1997-05-28 | 1997-11-27 | 1998-05-29 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2001-05-28 | 2001-11-27 | 2002-05-29 | $7700.00 | Window Closed / Lapsed |