US4933714A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Apparatus and method for reproducing a pattern in an annular area
Assignee: SVG LITHOGRAPHY Inc A CORP OF
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Filing: 1989-06-20
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Granted: 1990-06-12
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Expires: 2009-06-20
Abstract
Abstract A master disk is positioned such that a radial portion thereof is within a restricted field having good imagery of an optical projection system. A second blank disk is positioned such that the image location extends along a radial portion thereof. As the two disks are rotated synchronously a pattern in an annular area is formed on the blank disk replicating the master. Good imagery of the pattern is obtained with a simple system having an image field less than the size of the object being reproduced.
Inventors
- 👤 Jere D. Buckley
- 👤 Daniel N. Galburt
- 👤 Charles Karatzas
- 👤 Harry Sewell
- 👤 Frits Zernike
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 11:52
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/70; G03F7/70058; G03F7/70075; G03F7/70216; G03F7/70233; G03F7/70358; G03F7/70366
Claims Analysis
Total Claims: 6
Claim 1
Independent Claim
158 words
A device for reproducing patterns in an annular area comprising: a concave primary mirror; a convex secondary mirror of smaller radius of curvature than said primary mirror with its center of curvature substantially at the center of curvature of said primary mirror, said primary and secondary mirrors forming projection optics having an object and an image location, said image location forming an arcuate segment of a ring-field of good correction of said projection optics, said arcuate segment extending the entire radial length from the smaller inner diameter to the larger outer diameter of the annular area; a partial master, said master being stationary and positioned at the object location and containing thereon a portion of an annular pattern along the length thereof; an illumination source for projecting the image of said master; and rotating means for rotating an actinic annular blank through said image location such that said partial master exposes an annular pattern on said annular blank.
Claim 2
Independent Claim
158 words
A device for reproducing patterns in an annular area comprising: a concave primary mirror; a convex secondary mirror of smaller radius of curvature than said primary mirror with its center of curvature substantially at the center of curvature of said primary mirror, said primary and secondary mirrors forming projection optics having an object and an image location, said image location forming an arcuate segment of a ring-field of good correction of said projection optics, said arcuate segment extending the entire radial length from the smaller inner diameter to the larger outer diameter of the annular area; a partial master, said master being stationary and positioned at the object location and containing thereon a portion of an annular pattern along the length thereof; an illumination source for projecting the image of said master; and rotating means for rotating an actinic annular blank through said image location such that said partial master exposes an annular pattern on said annular blank.
Claim 3
Independent Claim
118 words
A device for reproducing annular patterns in an annular area comprising: a ring-field projection system having a ring-field; at least two stationary partial masters positioned within an object arcuate portion of said ring-field at at least two object locations, said at least two stationary masters each having a portion of an annular pattern thereon; at least two actinic annular blanks each having a radial portion thereon extending within an image arcuate portion of said ring-field at at least two image locations; and rotation means, associated with said at least two actinic annular blanks, for rotating said at least two actinic annular blanks; whereby an annular pattern is exposed on each of said at least two actinic annular blanks.
Claim 4
Independent Claim
118 words
A device for reproducing annular patterns in an annular area comprising: a ring-field projection system having a ring-field; at least two stationary partial masters positioned within an object arcuate portion of said ring-field at at least two object locations, said at least two stationary masters each having a portion of an annular pattern thereon; at least two actinic annular blanks each having a radial portion thereon extending within an image arcuate portion of said ring-field at at least two image locations; and rotation means, associated with said at least two actinic annular blanks, for rotating said at least two actinic annular blanks; whereby an annular pattern is exposed on each of said at least two actinic annular blanks.
Claim 5
Dependent Claim
38 words
A device for reproducing annular patterns in an annular area as in claim 2 further comprising: means for providing a constant exposure on each of said actinic annular blanks at each of said at least two image locations.
Claim 6
Dependent Claim
35 words
A device as in claim 2 wherein: said means for providing a constant exposure comprises an opaque material having a varying width transparent slit therein positioned on each of said at least two stationary masters.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1993-06-11 | 1993-12-11 | 1994-06-12 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1997-06-11 | 1997-12-11 | 1998-06-12 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2001-06-11 | 2001-12-11 | 2002-06-12 | $7700.00 | Window Closed / Lapsed |