US4934788A
Expired / Lapsed
US
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Deposition of gradient index coatings using coevaporation with rate control
Assignee: Teledyne Scientific and Imaging LLC
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Filing: 1987-03-20
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Granted: 1990-06-19
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Expires: 2007-03-20
Abstract
Abstract A method of depositing an optical coating with a predetermined refractive index n and a thickness d, using a first source material having a refractive index n H greater than n and a known rate of deposition r H and a second source material having a refractive index n L less than n and a variable rate of deposition r L , requires calculating the deposition rate r L according to the equation ##EQU1## and depositing the first source material at the rate r H and the second source material at the rate r L for a time interval T=d/(r H +r L ). A method of depositing a gradient index optical coating with a predetermined refractive index profile n(d) which is a function of depth d in the coating uses a first source material having a refractive index n H and a known rate of deposition r H and a second source material having a refractive index n L and a variable rate of deposition r L . The method includes the steps of setting the initial depth d to 0, then calculating the deposition rate r L (d) for the depth d according to the equation. ##EQU2## The first source material is then deposited at the rate r H and the second source material at the rate r L (d) for a time interval Δt. At the end of the time interval, the depth d is updated by adding an amount Δd=(r H +r L (d)) Δt. The steps of calculating, depositing, and updating are repeated until the predetermined refractive index profile is achieved.
Inventors
- 👤 William H. Southwell
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 12:06
CPC Classifications
G; G02; G02B; G02B5/00; G02B5/20; G02B5/28; G02B5/285; C; C03; C03C; C03C17/00; C03C17/001; C03C17/002; G02B1/00; G02B1/10; G02B1/11; G02B1/113; G02B1/115; G02B5/289
Claims Analysis
Total Claims: 12
Claim 1
Independent Claim
103 words
A method of depositing an optical coating with a predetermined refractive index n and a thickness d, using a first source material having a refractive index n H greater than n and a known rate of deposition r H and a second source material having a refractive index n L less than n and a variable rate of deposition r L , comprising the steps of: calculating the deposition rate r L according to the equation ##EQU12## depositing the first source material at the rate r H and the second source material at the rate r L for a time interval T=d/(r.sub.H +r.sub.L).
Claim 2
Independent Claim
103 words
A method of depositing an optical coating with a predetermined refractive index n and a thickness d, using a first source material having a refractive index n H greater than n and a known rate of deposition r H and a second source material having a refractive index n L less than n and a variable rate of deposition r L , comprising the steps of: calculating the deposition rate r L according to the equation ##EQU12## depositing the first source material at the rate r H and the second source material at the rate r L for a time interval T=d/(r.sub.H +r.sub.L).
Claim 3
Dependent Claim
19 words
The method of claim 1, wherein the known rate of deposition r H is a constant rate of deposition.
Claim 4
Dependent Claim
104 words
An optical coating with a predetermined refractive index n and a thickness d, made by the method of depositing a first source material having a refractive index n H greater than n and a known rate of deposition r H and a second source material having a refractive index n L less than n and a variable rate of deposition r L , comprising the steps of: calculating the deposition rate r L according to the equation ##EQU13## depositing the first source material at the rate r H and the second source material at the rate r L for a time interval T=d/(r.sub.H +r.sub.L).
Claim 5
Dependent Claim
104 words
An optical coating with a predetermined refractive index n and a thickness d, made by the method of depositing a first source material having a refractive index n H greater than n and a known rate of deposition r H and a second source material having a refractive index n L less than n and a variable rate of deposition r L , comprising the steps of: calculating the deposition rate r L according to the equation ##EQU13## depositing the first source material at the rate r H and the second source material at the rate r L for a time interval T=d/(r.sub.H +r.sub.L).
Claim 6
Dependent Claim
19 words
The method of claim 2, wherein the known rate of deposition r H is a constant rate of deposition.
Claim 7
Independent Claim
147 words
A method of depositing a gradient index optical coating with a predetermined refractive index profile n(d) which is a function of depth d in the coating, using a first source material having a refractive index n H and a known rate of deposition r H and a second source material having a refractive index n L and a variable rate of deposition r L , comprising the steps of: setting the initial depth d to 0; calculating the deposition rate r L (d) for the depth d according to the equation ##EQU14## depositing the first source material at the rate r H and the second source material at the rate r L (d) for a time interval Δt; updating the depth d by adding an amount Δd=(r.sub.H +r.sub.L (d)) Δt; and repeating the steps of calculating, depositing, and updating until the predetermined refractive index profile is achieved.
Claim 8
Independent Claim
147 words
A method of depositing a gradient index optical coating with a predetermined refractive index profile n(d) which is a function of depth d in the coating, using a first source material having a refractive index n H and a known rate of deposition r H and a second source material having a refractive index n L and a variable rate of deposition r L , comprising the steps of: setting the initial depth d to 0; calculating the deposition rate r L (d) for the depth d according to the equation ##EQU14## depositing the first source material at the rate r H and the second source material at the rate r L (d) for a time interval Δt; updating the depth d by adding an amount Δd=(r.sub.H +r.sub.L (d)) Δt; and repeating the steps of calculating, depositing, and updating until the predetermined refractive index profile is achieved.
Claim 9
Dependent Claim
19 words
The method of claim 5, wherein the known rate of deposition r H is a constant rate of deposition.
Claim 10
Dependent Claim
148 words
A gradient index optical coating with a predetermined refractive index profile n(d) which is a function of depth d in the coating, made by the method of depositing a first source material having a refractive index n H and a known rate of deposition r H and a second source material having a refractive index n L and a variable rate of deposition r L , comprising the steps of: setting the initial depth d to 0; calculating the deposition rate r L (d) for the depth d according to the equation ##EQU15## depositing the first source material at the rate r H and the second source material at the rate r L (d) for a time interval Δt; updating the depth d by adding an amount Δd=(r.sub.H +r.sub.L (d)) Δt; and repeating the steps of calculating, depositing, and updating until the predetermined refractive index profile is achieved.
Claim 11
Dependent Claim
148 words
A gradient index optical coating with a predetermined refractive index profile n(d) which is a function of depth d in the coating, made by the method of depositing a first source material having a refractive index n H and a known rate of deposition r H and a second source material having a refractive index n L and a variable rate of deposition r L , comprising the steps of: setting the initial depth d to 0; calculating the deposition rate r L (d) for the depth d according to the equation ##EQU15## depositing the first source material at the rate r H and the second source material at the rate r L (d) for a time interval Δt; updating the depth d by adding an amount Δd=(r.sub.H +r.sub.L (d)) Δt; and repeating the steps of calculating, depositing, and updating until the predetermined refractive index profile is achieved.
Claim 12
Dependent Claim
19 words
The coating of claim 7, wherein the known rate of deposition r H is a constant rate of deposition.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1993-06-18 | 1993-12-18 | 1994-06-19 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1997-06-18 | 1997-12-18 | 1998-06-19 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2001-06-18 | 2001-12-18 | 2002-06-19 | $7700.00 | Window Closed / Lapsed |