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US4935623A Expired / Lapsed US ⏱️ 0.0 years remaining

Production of energetic atom beams

Assignee: Suntory Ltd
•
Filing: 1989-06-08
•
Granted: 1990-06-19
•
Expires: 2009-06-08
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Abstract

Abstract Beams of energetic atoms are produced by furnishing a beam of energetic ionized clusters and disintegrating the clusters to produce a beam of energetic atoms. The energetic ionized clusters are provided by forming a beam containing uncharged particles, both clusters and atoms, ionized the particles, accelerating the particles, separating any unionized particles from the beam, and removing those particles outside a selected size range from the beam. The resulting energetic beam of ionized clusters is impacted against a cluster scattering plate so that the clusters break apart into unclustered atoms and ions. The ions are removed from the beam of unclustered atoms, which is available for use as needed. The atoms have energies dependent upon the cluster beam conditioning, but which are typically in the range of 1-10 electron volts per atom.

Inventors

  • 👤 Wolfgang Knauer

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-05 19:15
CPC Classifications
H; H05; H05H; H05H3/00; H05H3/02

Claims Analysis

Total Claims: 20
Claim 1
Independent Claim 37 words
A process for producing a beam of energetic atoms, comprising the steps of: providing a beam containing energetic ionized clusters; and disintegrating the clusters of the beam to produce the beam of energetic atoms and energetic ions.
Claim 2
Dependent Claim 37 words
A process for producing a beam of energetic atoms, comprising the steps of: providing a beam containing energetic ionized clusters; and disintegrating the clusters of the beam to produce the beam of energetic atoms and energetic ions.
Claim 3
Dependent Claim 41 words
The process of claim 1, wherein the step of providing includes the steps of: forming a beam containing uncharged clusters, ionizing the clusters of the beam, and accelerating the clusters of the beam to form the beam containing energetic ionized clusters.
Claim 4
Dependent Claim 60 words
The process of claim 1, wherein the step of providing includes the steps of: forming a beam of unionized particles, the particles including atoms and clusters, ionizing the particles of the beam, accelerating the particles of the beam to form the energetic beam of ionized particles, and separating any the unionized particles from the beam containing the energetic ionized clusters.
Claim 5
Dependent Claim 21 words
The process of claim 3, including the further step of: removing from the beam those particles outside a selected size range.
Claim 6
Dependent Claim 25 words
The process of claim 1, including the additional step, after the step of disintegrating, of separating the energetic ions from the beam of energetic atoms.
Claim 7
Dependent Claim 49 words
The process of claim 1, wherein the step of disintegrating includes the step of: directing the ionized clusters of the energetic beam against a cluster scattering plate that is inclined to the axis of the beam, whereupon the clusters disintegrate to form the energetic atoms and the energetic ions.
Claim 8
Dependent Claim 31 words
The process of claim 6, wherein the cluster scattering plate is inclined at an angle of greater than zero and less than about 20 degrees to the axis of the beam.
Claim 9
Dependent Claim 75 words
A process for producing a beam of energetic atoms, comprising the steps of: forming a beam containing uncharged clusters; ionizing the clusters of the beam; accelerating the clusters of the beam to form the beam containing energetic ionized clusters; and directing the ionized clusters of the energetic beam against a cluster scattering plate that is inclined to the axis of the beam, whereupon the clusters disintegrate to form the energetic atoms and the energetic ions.
Claim 10
Dependent Claim 75 words
A process for producing a beam of energetic atoms, comprising the steps of: forming a beam containing uncharged clusters; ionizing the clusters of the beam; accelerating the clusters of the beam to form the beam containing energetic ionized clusters; and directing the ionized clusters of the energetic beam against a cluster scattering plate that is inclined to the axis of the beam, whereupon the clusters disintegrate to form the energetic atoms and the energetic ions.
Claim 11
Dependent Claim 34 words
Apparatus for producing a beam of energetic atoms, comprising: a source of energetic ionized clusters; and means for disintegrating the clusters of the beam to form the beam of energetic atoms and energetic ions.
Claim 12
Dependent Claim 34 words
Apparatus for producing a beam of energetic atoms, comprising: a source of energetic ionized clusters; and means for disintegrating the clusters of the beam to form the beam of energetic atoms and energetic ions.
Claim 13
Dependent Claim 28 words
The apparatus of claim 9, further including means for supporting a target at a location such that the beam of energetic atoms and energetic ions impacts the target.
Claim 14
Dependent Claim 15 words
The apparatus of claim 9, further including a target supported in the means for supporting.
Claim 15
Dependent Claim 58 words
The apparatus of claim 9, wherein the source of energetic ionized clusters includes: a source of a beam of unionized particles, the particles including atoms and clusters, an ionizer including a cathode and an anode adjacent the beam path, and a pair of apertured plates through which the beam passes, the plates have an accelerating voltage applied thereto.
Claim 16
Dependent Claim 31 words
The apparatus of claim 12, further including: a deflection electrode that applies a field across the beam, so that the ionized particles are deflected and the unionized particles are not deflected.
Claim 17
Dependent Claim 27 words
The apparatus of claim 12, further including: a mass separator electrode that applies a retarding potential to the beam, after the beam has passed through the ionizer.
Claim 18
Dependent Claim 26 words
The apparatus of claim 9, wherein the means for disintegrating includes: at least one cluster scattering plate disposed to intercept the beam of energetic ionized clusters.
Claim 19
Dependent Claim 29 words
The apparatus of claim 15, wherein the angle between the plane of the cluster scattering plate and the beam is greater than zero and less than about 20 degrees.
Claim 20
Dependent Claim 23 words
The apparatus of claim 9, further including: means for separating the energetic ions from the energetic atoms produced by the means for disintegrating.

References Cited (Backward Citations)

US3466442A Cited
US3742219A Cited
US3700899A Cited
US3723741A Cited
US4713542A Cited
US4649273A Cited
US4734622A Cited
US4737637A Cited
US4833319A Cited
US4780608A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1993-06-18 1993-12-18 1994-06-19 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1997-06-18 1997-12-18 1998-06-19 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2001-06-18 2001-12-18 2002-06-19 $7700.00 Window Closed / Lapsed

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