US4943148A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Silicon wafer holder
Assignee: Micron Technology Inc
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Filing: 1988-10-20
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Granted: 1990-07-24
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Expires: 2008-10-20
Abstract
Abstract A holder for positioning silicon wafers on a microscope stage for uniform and repeatable viewing under the microscope. The holder comprises a circumferential rib having an arc of from about 60°-180° diametrically opposed to a radially aligned slit within which a bracket member is positioned. Actuation of the bracket member pushes against a major flat on the silicon wafer, causing the leading edge of the wafer to bear against the abutment. The holder, or platen, is provided with calibration standards on a circumferential edge portion, and is also provided with at least one access port permitting access to the underside of the wafer with vacuum wands.
Inventors
- 👤 Carl W. Mondragon
- 👤 David A. Sperry
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-04 18:11
CPC Classifications
G; G02; G02B; G02B21/00; G02B21/32; Y; Y10; Y10S; Y10S414/00; Y10S414/135; Y10S414/141
Claims Analysis
Total Claims: 18
Claim 1
Independent Claim
120 words
A holder for microscopically observing a generally circular, planar wafer, comprising: (a) a substantially circular platen having a planar surface adapted to receive said wafer and having a diameter greater than a diameter of said wafer; (b) a circumferential rib extending around at least a portion of a periphery of said platen, said rib being raised above the planar surface of said platen; (c) a radially aligned slot provided in the planar surface of said platen and diametrically opposed to said circumferential rib; and (d) a bracket abutting against a major flat of the wafer and sliding radially within the radially aligned slot, such that a circumferential arc of the wafer is in substantially uniform contact with the circumferential rib.
Claim 2
Dependent Claim
120 words
A holder for microscopically observing a generally circular, planar wafer, comprising: (a) a substantially circular platen having a planar surface adapted to receive said wafer and having a diameter greater than a diameter of said wafer; (b) a circumferential rib extending around at least a portion of a periphery of said platen, said rib being raised above the planar surface of said platen; (c) a radially aligned slot provided in the planar surface of said platen and diametrically opposed to said circumferential rib; and (d) a bracket abutting against a major flat of the wafer and sliding radially within the radially aligned slot, such that a circumferential arc of the wafer is in substantially uniform contact with the circumferential rib.
Claim 3
Dependent Claim
34 words
The holder as recited in claim 1, wherein when said wafer is securely affixed in the holder, the wafer is uniformly centered on said platen to a tolerance of less than about 150 microns.
Claim 4
Dependent Claim
23 words
The holder as recited in claim 1, wherein the circumferential rib is provided in an arc of from about 60° to about 180°.
Claim 5
Dependent Claim
23 words
The holder as recited in claim 3, wherein the circumferential rib is provided in an arc of from about 120° to about 140°.
Claim 6
Dependent Claim
22 words
The holder as recited in claim 1, wherein the platen is provided with a circumferential portion imprinted with standards for microscopic calibration.
Claim 7
Dependent Claim
132 words
A holder for microscopically observing a generally circular planar wafer having a plurality of semiconductor chips imprinted thereon, comprising: (a) a substantially circular platen having a planar surface adapted to receive said wafer and having a diameter greater than a diameter of said wafer and a circumferential rib extending around at least a portion of a periphery of said platen, said rib being raised above the planar surface of said platen; (b) a radially aligned slot diametrically opposed to said circumferential rib provided in the planar surface of said platen and a bracket adapted to slide radially within said slot; and (c) said wafer having a major flat such that the bracket abuts against the major flat and forces a circumferential rib when the bracket slides radially within the radially aligned slot.
Claim 8
Dependent Claim
132 words
A holder for microscopically observing a generally circular planar wafer having a plurality of semiconductor chips imprinted thereon, comprising: (a) a substantially circular platen having a planar surface adapted to receive said wafer and having a diameter greater than a diameter of said wafer and a circumferential rib extending around at least a portion of a periphery of said platen, said rib being raised above the planar surface of said platen; (b) a radially aligned slot diametrically opposed to said circumferential rib provided in the planar surface of said platen and a bracket adapted to slide radially within said slot; and (c) said wafer having a major flat such that the bracket abuts against the major flat and forces a circumferential rib when the bracket slides radially within the radially aligned slot.
Claim 9
Dependent Claim
44 words
The holder as recited in claim 6, wherein said wafer comprises a silicon wafer having a major flat, the circumferential arc of said wafer being diametrically opposed to said major flat and being equivalent to the arc of the circumferential rib of said platen.
Claim 10
Dependent Claim
23 words
The holder as recited in claim 6, wherein the circumferential rib is provided in an arc of from about 60° to about 180°.
Claim 11
Dependent Claim
23 words
The holder as recited in claim 8, wherein the circumferential abutment is provided in an arc of from about 120° to about 140°.
Claim 12
Dependent Claim
23 words
The holder as recited in claim 6, wherein the platen comprises a circumferential edge portion having calibration standards imprinted thereon for microscopic calibration.
Claim 13
Dependent Claim
140 words
A holder for microscopically observing a generally circular planar wafer having a plurality of semiconductor chips imprinted thereon, comprising: (a) a substantially circular platen having a planar surface adapted to receive said wafer and having a radius greater than the radius of said wafer and a circumferential rib extending around the periphery of said platen in an arc of from about 60° to about 180°, said rib being raised above the planar surface of said platen; (b) a radially aligned slot provided in the planar surface of said platen and a bracket adapted to slide radially within said slot; and (c) said wafer having a major flat such that the bracket abuts against the major flat and forces the circumferential arc of the wafer into contact with the circumferential rib when the bracket slides radially within the radially aligned slot.
Claim 14
Dependent Claim
140 words
A holder for microscopically observing a generally circular planar wafer having a plurality of semiconductor chips imprinted thereon, comprising: (a) a substantially circular platen having a planar surface adapted to receive said wafer and having a radius greater than the radius of said wafer and a circumferential rib extending around the periphery of said platen in an arc of from about 60° to about 180°, said rib being raised above the planar surface of said platen; (b) a radially aligned slot provided in the planar surface of said platen and a bracket adapted to slide radially within said slot; and (c) said wafer having a major flat such that the bracket abuts against the major flat and forces the circumferential arc of the wafer into contact with the circumferential rib when the bracket slides radially within the radially aligned slot.
Claim 15
Dependent Claim
22 words
The holder as recited in claim 11, wherein the circumferential abutment is provided in an arc of from 120° to about 140°.
Claim 16
Dependent Claim
34 words
The holder as recited in claim 11, wherein when said wafer is securely affixed in the holder, the wafer is uniformly centered on said platen to a tolerance of less than about 150 microns.
Claim 17
Dependent Claim
24 words
The holder as recited in claim 11, wherein the platen comprises a circumferential edge portion provided with calibration standards imprinted thereon for microscopic calibration.
Claim 18
Dependent Claim
30 words
The holder as recited in claim 11, wherein the platen includes at least one access port providing access to place the wafer on and remove the wafer from the platen.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1993-07-23 | 1994-01-22 | 1994-07-24 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1997-07-23 | 1998-01-22 | 1998-07-24 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2001-07-23 | 2002-01-22 | 2002-07-24 | $7700.00 | Window Closed / Lapsed |