US4954371A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Flash evaporation of monomer fluids
Assignee: Spectrum Control Inc
•
Filing: 1987-07-07
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Granted: 1990-09-04
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Expires: 2007-07-07
Abstract
Abstract A method for continuously supplying a uniform vapor of a polymerizable and/or cross-linkable material. A continuous liquid flow of said material is supplied at a temperature below both the decomposition temperature and the polymerization temperature of said material and atomized into a continuous flow of liquid droplets having a particle size from about 1 to about 50 microns. The droplets are continuously vaporized upon contact with a heated surface which is maintained at a temperature at or above the boiling point for said material, but below the temperature at which said droplets would undergo pyrolysis before vaporizing. The vapor may be deposited onto a substrate and subsequently polymerized or cross-linked.
Inventors
- 👤 Angelo Yializis
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 23:59
CPC Classifications
B; B05; B05D; B05D1/00; B05D1/60; B01; B01D; B01D1/00; B01D1/16; B01D3/00; B01D3/06; C; C23; C23C; C23C16/00; C23C16/44; C23C16/448; C23C16/4486; H; H01; H01G; H01G4/00; H01G4/002; H01G4/018; H01G4/06; H01G4/14; H01G4/145
Claims Analysis
Total Claims: 28
Claim 1
Independent Claim
93 words
A method for continuously supplying a uniform vapor of a polymerizable material, said method comprising: supplying a continuous liquid flow of said material at a temperature below both the decomposition temperature and the polymerization temperature of said material; continuously atomizing the liquid flow into a continuous flow of liquid droplets; and continuously vaporizing said liquid droplets by causing said droplets to contact a heated surface which is maintained at a temperature at or above the boiling point for said material, but below the temperature at which said droplets would undergo pyrolysis before vaporizing.
Claim 2
Independent Claim
93 words
A method for continuously supplying a uniform vapor of a polymerizable material, said method comprising: supplying a continuous liquid flow of said material at a temperature below both the decomposition temperature and the polymerization temperature of said material; continuously atomizing the liquid flow into a continuous flow of liquid droplets; and continuously vaporizing said liquid droplets by causing said droplets to contact a heated surface which is maintained at a temperature at or above the boiling point for said material, but below the temperature at which said droplets would undergo pyrolysis before vaporizing.
Claim 3
Independent Claim
132 words
A method for depositing onto a substrate a layer of polymerizable material, said material being characterized by the fact that it is chemically unstable at or below its boiling point, said method comprising: vaporizing said material by continuously placing droplets of said material into contact with a heated surface which is maintained at a temperature at or above the boiling point for said material, but below the temperature at which said droplets would undergo pyrolysis before vaporizing; maintaining at least a portion of said substrate at a temperature which is below the boiling point of said material and in a region which is at a lower pressure than said vaporized material, to provide a positive flow of vaporized material toward said substrate; and directing the flow of vaporized material onto said substrate.
Claim 4
Independent Claim
132 words
A method for depositing onto a substrate a layer of polymerizable material, said material being characterized by the fact that it is chemically unstable at or below its boiling point, said method comprising: vaporizing said material by continuously placing droplets of said material into contact with a heated surface which is maintained at a temperature at or above the boiling point for said material, but below the temperature at which said droplets would undergo pyrolysis before vaporizing; maintaining at least a portion of said substrate at a temperature which is below the boiling point of said material and in a region which is at a lower pressure than said vaporized material, to provide a positive flow of vaporized material toward said substrate; and directing the flow of vaporized material onto said substrate.
Claim 5
Dependent Claim
23 words
The method of claim 2 wherein the substrate is maintained in a region which is at a pressure below about 10 -1 Torr
Claim 6
Dependent Claim
26 words
The method of claim 2 wherein the material is polymerizable and cross-linkable and also comprising the step of polymerizing and cross-linking the material on said substrate.
Claim 7
Dependent Claim
21 words
The method of claim 4 wherein the material is polymerized and cross-linked throughout its thickness by use of electron beam curing.
Claim 8
Independent Claim
145 words
A method for depositing a layer of a polymerizable material on a substrate comprising: supplying a continuous liquid flow of said material at a temperature below both the decomposition and the polymerization temperature of said material; continuously atomizing said liquid flow into a continuous flow of liquid droplets; continuously vaporizing said liquid droplets by causing said droplets to contact a heated surface which is maintained at a temperature at or above the boiling point for said material but below the temperature at which said droplets would undergo pyrolysis before vaporizing; maintaining at least a portion of said substrate at a temperature which is below the boiling point of said material and in a region which is at a lower pressure than said vaporized material, to provide a positive flow of vaporized material toward said substrate; and directing the flow of vaporized material onto said substrate.
Claim 9
Independent Claim
145 words
A method for depositing a layer of a polymerizable material on a substrate comprising: supplying a continuous liquid flow of said material at a temperature below both the decomposition and the polymerization temperature of said material; continuously atomizing said liquid flow into a continuous flow of liquid droplets; continuously vaporizing said liquid droplets by causing said droplets to contact a heated surface which is maintained at a temperature at or above the boiling point for said material but below the temperature at which said droplets would undergo pyrolysis before vaporizing; maintaining at least a portion of said substrate at a temperature which is below the boiling point of said material and in a region which is at a lower pressure than said vaporized material, to provide a positive flow of vaporized material toward said substrate; and directing the flow of vaporized material onto said substrate.
Claim 10
Dependent Claim
23 words
The method of claim 6 wherein the substrate is maintained in a region which is at a pressure below about 10 -1 Torr.
Claim 11
Dependent Claim
26 words
The method of claim 6 wherein the material is polymerizable and cross-linkable and also comprising the step of polymerizing or cross-linking the material on said substrate.
Claim 12
Dependent Claim
21 words
The method of claim 8 wherein the material is polymerized and/or cross-linked throughout its thickness by use of electron beam curing.
Claim 13
Independent Claim
123 words
A method for continuously supplying a uniform vapor of a polymerizable material, said method comprising: providing a liquid supply of said material, at a temperature below both the decomposition temperature and the polymerization temperature of said material, to a drop just contacting a flat face of a disk; rotating the disk so that a fluid film is pulled on the face free from the drop and a continuous flow of liquid droplets is thrown from the periphery of the disk; and continuously vaporizing said liquid droplets by causing said droplets to contact a heated surface which is maintained at a temperature at or above the boiling point for said material, but below the temperature at which said droplets would undergo pyrolysis before vaporizing.
Claim 14
Independent Claim
123 words
A method for continuously supplying a uniform vapor of a polymerizable material, said method comprising: providing a liquid supply of said material, at a temperature below both the decomposition temperature and the polymerization temperature of said material, to a drop just contacting a flat face of a disk; rotating the disk so that a fluid film is pulled on the face free from the drop and a continuous flow of liquid droplets is thrown from the periphery of the disk; and continuously vaporizing said liquid droplets by causing said droplets to contact a heated surface which is maintained at a temperature at or above the boiling point for said material, but below the temperature at which said droplets would undergo pyrolysis before vaporizing.
Claim 15
Dependent Claim
65 words
A method according to claim 10 also comprising the steps of: maintaining at least a portion of a substrate at a temperature which is below the boiling point of said material and in a region which is at a lower pressure than said vaporized material, to provide a positive flow of vaporized material toward said substrate; and directing the flow vaporized material onto said substrate.
Claim 16
Dependent Claim
24 words
A method according to claim 11 wherein the substrate is maintained in a region which is at a pressure below about 10 -1 Torr.
Claim 17
Dependent Claim
27 words
A method according to claim 11 wherein the material is polymerizable and cross-linkable and also comprising the step of polymerizing and cross-linking the material on said substrate.
Claim 18
Dependent Claim
20 words
A method according to claim 13 wherein the material is polymerized and cross-linked throughout its thickness by use of radiation.
Claim 19
Dependent Claim
16 words
A method according to claim 14 wherein the source of radiation is an electron beam gun.
Claim 20
Independent Claim
121 words
A method for continuously supplying a uniform vapor of a polymerizable material, said method comprising: providing a liquid supply of said material, at a temperature below both the decomposition temperature and the polymerization temperature of said material, to an end surface at a tip of an ultrasonic vibration device; ultrasonically vibrating said device so that the material supplied to the end surface coats the end surface and is dispersed in droplets from the periphery of the end surface; and continuously vaporizing said liquid droplets by causing said droplets to contact a heated surface which is maintained at a temperature at or above the boiling point for said material, but below the temperature at which said droplets would undergo pyrolysis before vaporizing.
Claim 21
Independent Claim
121 words
A method for continuously supplying a uniform vapor of a polymerizable material, said method comprising: providing a liquid supply of said material, at a temperature below both the decomposition temperature and the polymerization temperature of said material, to an end surface at a tip of an ultrasonic vibration device; ultrasonically vibrating said device so that the material supplied to the end surface coats the end surface and is dispersed in droplets from the periphery of the end surface; and continuously vaporizing said liquid droplets by causing said droplets to contact a heated surface which is maintained at a temperature at or above the boiling point for said material, but below the temperature at which said droplets would undergo pyrolysis before vaporizing.
Claim 22
Dependent Claim
18 words
A method according to claim 16 wherein the ultrasonic vibration device is fixedly mounted at a nodal point.
Claim 23
Dependent Claim
37 words
A method according to claim 17 wherein the end surface is positioned with respect to the mounting of the device so as to be at the maximum amplitude of motion for the device while it is vibrating.
Claim 24
Dependent Claim
66 words
A method according to claim 16 also comprising the steps of: maintaining at least a portion of a substrate at a temperature which is below the boiling point of said material and in a region which is at a lower pressure then said vaporized material, to provide a positive flow of vaporized material toward said substrate; and directing the flow of vaporized material onto said substrate.
Claim 25
Dependent Claim
24 words
A method according to claim 19 wherein the substrate is maintained in a region which is at a pressure below about 10 -1 Torr.
Claim 26
Dependent Claim
27 words
A method according to claim 19 wherein the material is polymerizable and cross-linkable and also comprising the step of polymerizing and cross-linking the material on said substrate.
Claim 27
Dependent Claim
20 words
A method according to claim 21 wherein the material is polymerized and cross-linked throughout its thickness by use of radiation.
Claim 28
Dependent Claim
16 words
A method according to claim 22 wherein the source of radiation is an electron beam gun.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1993-09-03 | 1994-03-05 | 1994-09-04 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1997-09-03 | 1998-03-05 | 1998-09-04 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2001-09-03 | 2002-03-05 | 2002-09-04 | $7700.00 | Window Closed / Lapsed |