Automatic wafer mounting device

Claim 2

A wafer mounting device comprising: carrying means for transferring wafers, and adhering the wafers one by one onto a polishing plate; spin chuck means which is provided for upward and downward movement for receiving wafers from the carrying means during the upward movement thereof, turning the wafers at an upward position of the spin chuck means, and replacing wafers to said carrying means during the downward movement; an adhesive agent coating means provided at an upper portion of said spin chuck means for dripping adhesive agent on to said wafers; a reverse chuck means for inverting the side of the wafers on which adhesive agent is coated and for ejecting outwardly said wafers from the carrying means; and means for holding said polishing plate at a predetermined place so as to adhere the wafers ejected from said carrying means in inverted position onto a surface of said polishing plate.

Claim 3

A wafer mounting device in accordance with claim 1, wherein said carrying means is selectively moveable to a position for receiving the wafers, a position provided with said adhesive agent coating means and a position provided with said reverse chuck means.

Claim 4

A wafer mounting device in accordance with claim 2, wherein interval spaces between the position for receiving the wafers, the position provided with the adhesive agent coating means and the position provided with the reverse chuck means are provided at a nearly equal distance apart.

Claim 5

A wafer mounting device in accordance with claim 1, wherein said reverse chuck means inverts the individual wafers during transference of said wafers.

Claim 6

A wafer mounting device in accordance with claim 1, wherein each said wafer is placed oriented flat on the carrying means.

Claim 7

A wafer mounting device in accordance with claim 1, wherein said polishing plate is held on the holding means under a heated condition.

Claim 8

A wafer mounting device in accordance with claim 6, further including means for prior to adhering the wafers heating said polishing plate gradually.

Claim 9

A wafer mounting device in accordance with claim 1, further including means for transferring said polishing plate onto the holding means after mounting of the wafers thereon.

Claim 10

A wafer mounting device in accordance with claim 1, wherein said holding means includes means to press the wafers mounted on the polishing plate.

Claim 11

A wafer mounting device in accordance with claim 1, wherein said polishing plate has narrow grooves or small holes on the surface thereof.

Claim 12

Apparatus for automatically mounting wafers on a polishing surface of individual polishing plates in preparation for being polished thereon comprising, means for supplying a multiplicity of wafers and automatically delivering them individually successively, orientation means for receiving the delivered individual wafers successively and orienting them individually to a horizontal position in which they are to be carried, carrier means reciprocable for transporting the wafers spaced from each other, a first wafer holding unit reciprocable cylically forwardly to receive and releasably hold the oriented wafers individually successively and rearwardly for delivering the wafers successively onto said carrier means, an adhesive coating unit for receiving the individual wafers successively therein and applying an adhesive coating on a surface thereof, a spin chuck having a second wafer holding unit rotatably driven selectively and reciprocable cylically forwardly and rearwardly for removing the wafers individually from the carrier means during forward movement and introducing each wafer individually into said adhesive coating unit and releasably holding each wafer therein during the cooling of adhesive on a surface thereof and during rearward movement replacing coating wafers individually on the carrier means with the adhesive coated surface thereof exposed; a reverse chuck having a third holding unit reciprocable cyclically forwardly and rearwardly for removing the wafers individually successively from the carrier means during forward movement and releasably holding the wafers thereon with the adhesive coated surface exposed during rearward movement for subsequently adhering each wafer on the polishing surface of a respective polishing plate, the reverse chuck having means for moving it cyclically to position the reverse chuck in a position for removing the wafers individually successively from the carrier means and after removal shifting the reverse chuck relative to the carrier means to a position in readiness for mounting the wafers successively on the respective polishing plate and then returning the reverse chuck to said position for removing the wafers from the carrier means, the reverse chuck having a mounting arm cylically rotated for rotating the reverse chuck and said third holding unit thereof in an arc for inverting the position of the individual wafers and mounting the wafers individually with the adhesive coated surface disposed on the polishing surface of the respective polishing plates for adhering them thereon, and means for indexing the individual polishing plates in timed relationship with the cylical reversing of the individual wafers for mounting the wafers adhered on a respective polishing plate in positions spaced from each other with an exposed surface thereof opposite to the adhesive coated surface in readiness for polishing thereof.

Claim 13

Apparatus for automatically mounting wafers on a polishing surface of individual polishing plates in preparation for being polished thereon comprising, means for supplying a multiplicity of wafers and automatically delivering them individually successively, orientation means for receiving the delivered individual wafers successively and orienting them individually to a horizontal position in which they are to be carried, carrier means reciprocable for transporting the wafers spaced from each other, a first wafer holding unit reciprocable cylically forwardly to receive and releasably hold the oriented wafers individually successively and rearwardly for delivering the wafers successively onto said carrier means, an adhesive coating unit for receiving the individual wafers successively therein and applying an adhesive coating on a surface thereof, a spin chuck having a second wafer holding unit rotatably driven selectively and reciprocable cylically forwardly and rearwardly for removing the wafers individually from the carrier means during forward movement and introducing each wafer individually into said adhesive coating unit and releasably holding each wafer therein during the cooling of adhesive on a surface thereof and during rearward movement replacing coating wafers individually on the carrier means with the adhesive coated surface thereof exposed; a reverse chuck having a third holding unit reciprocable cyclically forwardly and rearwardly for removing the wafers individually successively from the carrier means during forward movement and releasably holding the wafers thereon with the adhesive coated surface exposed during rearward movement for subsequently adhering each wafer on the polishing surface of a respective polishing plate, the reverse chuck having means for moving it cyclically to position the reverse chuck in a position for removing the wafers individually successively from the carrier means and after removal shifting the reverse chuck relative to the carrier means to a position in readiness for mounting the wafers successively on the respective polishing plate and then returning the reverse chuck to said position for removing the wafers from the carrier means, the reverse chuck having a mounting arm cylically rotated for rotating the reverse chuck and said third holding unit thereof in an arc for inverting the position of the individual wafers and mounting the wafers individually with the adhesive coated surface disposed on the polishing surface of the respective polishing plates for adhering them thereon, and means for indexing the individual polishing plates in timed relationship with the cylical reversing of the individual wafers for mounting the wafers adhered on a respective polishing plate in positions spaced from each other with an exposed surface thereof opposite to the adhesive coated surface in readiness for polishing thereof.

Claim 14

Apparatus for automatically mounting wafers on a polishing surface of individual polishing plates, in accordance with claim 11, in which said wafers are planar, and in which said orientation means comprises means for orienting the wafers for flat surfaces thereof to be disposed horizontal during carrying thereof.

Claim 15

Apparatus for automatically mounting wafers on a polishing surface of individual polishing plates according to claim 11, in which said spin chuck comprises means for spinning the second holding unit thereof during coating of the individual wafers with an adhesive on said surface thereof, whereby the adhesive uniformly coats said surface of the individual wafers.

Claim 16

Appartus for automatically mounting wafers on a mounting surface of individual polishing plates according to claim 13, further including means on the spin chuck for applying a detergent on a surface of the individual wafers opposite to the surface on which an adhesive is applied.

Claim 17

Apparatus for automatically mounting wafers on a polishing surface of individual polishing plates according to claim 11, further including heating means for gradually heating the polishing surface of the polishing plates in preparation for adhering the wafers thereon.

Claim 18

Apparatus for automatically mounting wafers on a polishing surface of individual polishing plates, according to claim 15, in which said heating means comprises a heat lamp.

Claim 19

Apparatus for automatically mounting wafers on a polishing surface of individual polishing plates according to claim 11, further including means for pressing the individual wafers into the polishing surface of the polishing plates when the wafers are mounted thereon for better adhering the wafers thereon.

Claim 20

Apparatus for automatically mounting wafers on a polishing surface of individual polishing plates according to claim 11, including means for heating the exposed surface of the wafers when mounted on the polishing surface of the individual polishing plates to drive off solvents therefrom.

Claim 21

Apparatus for automatically mounting wafers on a polishing surface of individual polishing plates according to claim 11, in which each of said first, second and third holding units comprises a suction device for developing a vacuum suction for releasably holding the individual wafers thereon and removing the vacuum suction to release the individual wafers when placed on the carrier means and mounted on the polishing surface of a respective polishing plate.