US4977330A
Expired / Lapsed
US
⏱️ 0.0 years remaining
In-line photoresist thickness monitor
Assignee: SC TECHNOLOGY Inc 2450 ARMSTRONG STREET LIVERMORE CA 94550
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Filing: 1989-02-13
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Granted: 1990-12-11
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Expires: 2009-02-13
Abstract
Abstract An in-line photoresist thickness measuring device wherein a plurality of projection optical fibers are disposed over a wafer processing track for illuminating portions of a wafer as the wafer proceeds along the track. The light scattered back from each illuminated portion is detected by a corresponding plurality of pickup optical fibers and communicated to an optical fiber multiplexer. The multiplexer sequentially selects the optical signal from each pickup optical fiber and communicates the light from the selected pickup optical fiber to a spectrometer. The spectrometer simultaneously diffuses the scattered light into a plurality of light bands, each light band having a different wavelength. The plurality of light bands are projected in parallel onto a pin diode array which acts as a photodetector. The electrical signals generated by each pin diode in response to the incident light bands are communicated to a processor which calculates resist thickness for each illuminated portion of the wafer. The average and standard deviation values for the thickness data may be calculated as well.
Inventors
- 👤 Tom W. Batchelder
- 👤 Kenneth M. Sautter
- 👤 Gary H. Memovich
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 16:05
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/70; G03F7/70483; G01; G01B; G01B11/00; G01B11/02; G01B11/06; G01B11/0616; G01B11/0625
Claims Analysis
Total Claims: 13
Claim 1
Independent Claim
172 words
In a device for transporting a semiconductor wafer along a path from a first location to a second location and for coating the wafer with a layer of photoresist as it travels along the path, an apparatus for measuring the thickness of the photoresist layer comprising: illuminating means, disposed in close proximity to the path for illuminating a portion of the wafer as it travels along the path: light receiving means, disposed in close proximity to the path, for receiving the light scattered back from the illuminated portion of the wafer; light diffusing means, coupled to the light receiving means, for simultaneously diffusing the scattered light into a plurality of light bands having different wavelengths: light detecting means, disposed in close proximity to the diffusing means, for simultaneously detecting each light band and for providing a corresponding plurality of electrical signals in response thereto; and calculating means, coupled to the light detecting means, for calculating the thickness of photoresist at the illuminated portion of the wafer from the plurality of electrical signals.
Claim 2
Dependent Claim
172 words
In a device for transporting a semiconductor wafer along a path from a first location to a second location and for coating the wafer with a layer of photoresist as it travels along the path, an apparatus for measuring the thickness of the photoresist layer comprising: illuminating means, disposed in close proximity to the path for illuminating a portion of the wafer as it travels along the path: light receiving means, disposed in close proximity to the path, for receiving the light scattered back from the illuminated portion of the wafer; light diffusing means, coupled to the light receiving means, for simultaneously diffusing the scattered light into a plurality of light bands having different wavelengths: light detecting means, disposed in close proximity to the diffusing means, for simultaneously detecting each light band and for providing a corresponding plurality of electrical signals in response thereto; and calculating means, coupled to the light detecting means, for calculating the thickness of photoresist at the illuminated portion of the wafer from the plurality of electrical signals.
Claim 3
Dependent Claim
28 words
The apparatus according to claim 1 wherein the light detecting means comprises a plurality of spaced apart pin diodes, each pin diode detecting one of the light bands.
Claim 4
Dependent Claim
61 words
The apparatus according to claim 1 wherein the illuminating means comprises: a light source; an optical fiber optically coupled to the light source for communicating light emitted therefrom; and a bracket disposed in close proximity to the path and coupled to an end of the optical fiber for directing light emitted from the end of the optical fiber onto the wafer.
Claim 5
Dependent Claim
76 words
The apparatus according to claim 3 wherein the bracket is stationarily disposed in close proximity to the path and directs the light emitted from the end of the optical fiber toward the path, and further comprising wafer positioning means, disposed in close proximity to the bracket, for momentarily stopping the wafer at a first location in close proximity to the bracket so that the light emitted from the optical fiber illuminates a spot on the wafer.
Claim 6
Dependent Claim
48 words
The apparatus according to claim 4 wherein the wafer positioning means moves the wafer from the first location and stops the wafer at a second location in close proximity to the bracket, so that the light emitted from the optical fiber illuminates a different spot on the wafer.
Claim 7
Dependent Claim
26 words
The apparatus according to claim 1 wherein the light detecting means comprises a plurality of spaced apart sensors, each sensor detecting one of the light bands.
Claim 8
Dependent Claim
67 words
The apparatus according to claim 6 wherein the illuminating means comprises: a light source; a plurality of projection optical fibers optically coupled to the light source for communicating light emitted therefrom; and a bracket disposed in close proximity to the path and coupled to free ends of the plurality of optical fibers for directing light emitted from the free ends of the optical fibers onto the wafer.
Claim 9
Dependent Claim
35 words
The apparatus according to claim 7 wherein the light receiving means comprises a plurality of pickup optical fibers, each pickup optical fiber being optically coupled for receiving scattered-back light from an associated projection optical fiber.
Claim 10
Dependent Claim
33 words
The apparatus according to claim 8 wherein the light receiving means further comprises light multiplexing means for selectively communicating the light from one of the pickup optical fibers to the light diffusing means.
Claim 11
Dependent Claim
105 words
The apparatus according to claim 9 wherein the light multiplexing means further comprises: a mirror having first and second focal points; an optical fiber optically coupled to the first focal point and to the light diffusing means for communicating light focused at the first focal point to the light diffusing means; and positioning means for positioning the mirror so that the second focal point is optically coupled to a selected one of the pickup optical fibers so that the light from the selected pickup optical fiber passes from the first focal point to the second focal point and is communicated to the light diffusing means.
Claim 12
Dependent Claim
106 words
The apparatus according to claim 10 wherein the plurality of optical fibers have free ends disposed in close proximity to and facing the mirror the plurality of pickup optical fibers being oriented in a circle, the circle having a radius equal to the distance between the first and second focal points, the first focal point being disposed in the center of the circle and wherein the positioning means comprises rotating means, coupled to the mirror, for rotating the mirror about the first focal point so that the second focal point progressively aligns with the free end of each pickup optical fiber for receiving light emitted therefrom.
Claim 13
Dependent Claim
13 words
The apparatus according to claim 11 wherein the mirror is an elliptical mirror.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1993-12-10 | 1994-06-11 | 1994-12-11 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1997-12-10 | 1998-06-11 | 1998-12-11 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2001-12-10 | 2002-06-11 | 2002-12-11 | $7700.00 | Window Closed / Lapsed |