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US4998549A Expired / Lapsed US ⏱️ 0.0 years remaining

Megasonic cleaning apparatus

Assignee: DEVELOPMENT SPECIALISTS Inc
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Filing: 1988-11-16
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Granted: 1991-03-12
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Expires: 2008-11-16
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Abstract

Abstract A transducer array for use in a megansonic cleaning system including a transmitter element made of a material which will efficiently transmit megasonic energy when bonded to one conductive surface of a transducer. In one form, the transmitter and the transducer are flat plates. In another form, a flat transducer is bonded to a solid semi-cylindrical transmitter which causes the megasonic energy pattern to diverge. In another form, the transmitter is a semi-cylindrical shell or is tubular, and the transducer is bonded to and curved to conform to the transmitter. The transducer extends about 120°, and produces a straight line of sight diverging energy pattern.

Inventors

  • 👤 Mario E. Bran

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-30 17:53
CPC Classifications
B; B08; B08B; B08B3/00; B08B3/04; B08B3/10; B08B3/12; B06; B06B; B06B1/00; B06B1/02; B06B1/06; B06B1/0607; B06B3/00

Claims Analysis

Total Claims: 24
Claim 1
Independent Claim 248 words
A static megasonic cleaning system, comprising: a container for cleaning solution and components to be cleaned by megasonic energy; a megasonic transducer array including a transmitter having an interior surface exposed to the interior of the container and a surface not exposed to the interior of the container, and a transducer bonded to said not exposed surface, said transmitter being adapted to oscillate at a frequency for propagating megasonic energy and being of a material that will efficiently transmit said energy into said container, and said material being hard, durable and relatively inert so as to be able to withstand exposure to cleaning solutions in the container without contaminating the solution; a source of megasonic energy connected to said transducer to cause said transducer and said transmitter to transmit megasonic energy into the interior of the container, said transmitter being formed to disperse the megasonic energy into a diverging pattern greater in width than that of the transducer, so that said components can be cleaned by said energy without moving the components during the cleaning operation, said container being sized to minimize the amount of cleaning solution needed to immerse the components; and said transmitter has a thin walled, curved configuration with a convex surface being said exposed surface and a concave surface being said not exposed surface, and said transducer has a thin walled curved shape with a convex surface bonded to the concave surface of the transmitter and has a concave surface spaced from the transmitter.
Claim 2
Dependent Claim 248 words
A static megasonic cleaning system, comprising: a container for cleaning solution and components to be cleaned by megasonic energy; a megasonic transducer array including a transmitter having an interior surface exposed to the interior of the container and a surface not exposed to the interior of the container, and a transducer bonded to said not exposed surface, said transmitter being adapted to oscillate at a frequency for propagating megasonic energy and being of a material that will efficiently transmit said energy into said container, and said material being hard, durable and relatively inert so as to be able to withstand exposure to cleaning solutions in the container without contaminating the solution; a source of megasonic energy connected to said transducer to cause said transducer and said transmitter to transmit megasonic energy into the interior of the container, said transmitter being formed to disperse the megasonic energy into a diverging pattern greater in width than that of the transducer, so that said components can be cleaned by said energy without moving the components during the cleaning operation, said container being sized to minimize the amount of cleaning solution needed to immerse the components; and said transmitter has a thin walled, curved configuration with a convex surface being said exposed surface and a concave surface being said not exposed surface, and said transducer has a thin walled curved shape with a convex surface bonded to the concave surface of the transmitter and has a concave surface spaced from the transmitter.
Claim 3
Dependent Claim 12 words
The system of claim 1, wherein said transmitter has a semi-cylindrical configuration.
Claim 4
Dependent Claim 12 words
The system of claim 2, wherein said transducer extends circumferentially about 120°.
Claim 5
Dependent Claim 12 words
The system of claim 1, wherein said transmitter has a tubular shape.
Claim 6
Dependent Claim 13 words
The system of claim 4, wherein said transducer extends circumferentially about 120 °.
Claim 7
Dependent Claim 26 words
The system of claim 4, wherein the ends of said tubular transmitter are closed so as to permit said array to be immersed in said container.
Claim 8
Dependent Claim 24 words
The system of claim 4, wherein the ends of said tubular transducer extend through the side walls of said container and are sealed thereto.
Claim 9
Dependent Claim 21 words
The system of claim 7, including electrical leads connected to said transducer and extending out through an end of said transmitter.
Claim 10
Dependent Claim 30 words
The system of claim 1, wherein said transmitter has a semi-cylindrical shape and said transducer extends circumferentially about 120 ° and is centered between the circumferential edges of said transmitter.
Claim 11
Dependent Claim 234 words
A static megasonic cleaning system, comprising: a container for cleaning solution and components to be cleaned by megasonic energy; a megasonic transducer array including a transmitter having an interior surface exposed to the interior of the container and a surface not exposed to the interior of the container, and a transducer bonded to said not exposed surface, said transmitter being adapted to oscillate at a frequency for propagating megasonic energy and being of a material that will efficiently transmit said energy into said container, and said material being hard, durable and relatively inert so as to be able to withstand exposure to cleaning solutions in the container without contaminating the solution; a source of megasonic energy connected to said transducer to cause said transducer and said transmitter to transmit megasonic energy into the interior of the container, said transmitter being formed to disperse the megasonic energy into a diverging pattern greater in width than that of the transducer, so that said components can be cleaned by said energy without moving; and said transmitter has a thin walled, curved configuration with a convex surface being said exposed surface, and a concave surface being said not exposed surface, and said transducer has a thin walled, curved shape with a convex surface bonded to the concave surface of the transmitter and has a concave surface spaced from the transmitter, said transmitter being made of quartz or sapphire.
Claim 12
Dependent Claim 234 words
A static megasonic cleaning system, comprising: a container for cleaning solution and components to be cleaned by megasonic energy; a megasonic transducer array including a transmitter having an interior surface exposed to the interior of the container and a surface not exposed to the interior of the container, and a transducer bonded to said not exposed surface, said transmitter being adapted to oscillate at a frequency for propagating megasonic energy and being of a material that will efficiently transmit said energy into said container, and said material being hard, durable and relatively inert so as to be able to withstand exposure to cleaning solutions in the container without contaminating the solution; a source of megasonic energy connected to said transducer to cause said transducer and said transmitter to transmit megasonic energy into the interior of the container, said transmitter being formed to disperse the megasonic energy into a diverging pattern greater in width than that of the transducer, so that said components can be cleaned by said energy without moving; and said transmitter has a thin walled, curved configuration with a convex surface being said exposed surface, and a concave surface being said not exposed surface, and said transducer has a thin walled, curved shape with a convex surface bonded to the concave surface of the transmitter and has a concave surface spaced from the transmitter, said transmitter being made of quartz or sapphire.
Claim 13
Dependent Claim 89 words
A transducer array for a megasonic cleaning system, comprising: a transducer having an arcuate convex surface and an arcuate concave surface, said transducer being adapted to propagate megasonic energy in a diverging pattern from a megasonic source applied to the transducer; and an arcuate energy transmitter being made of a material which will efficiently transmit megasonic energy, said transmitter having a concave surface bonded to the convex surface of said transducer, and a convex surface remote from said transducer adapted to transmit the megasonic diverging energy from the transducer.
Claim 14
Dependent Claim 89 words
A transducer array for a megasonic cleaning system, comprising: a transducer having an arcuate convex surface and an arcuate concave surface, said transducer being adapted to propagate megasonic energy in a diverging pattern from a megasonic source applied to the transducer; and an arcuate energy transmitter being made of a material which will efficiently transmit megasonic energy, said transmitter having a concave surface bonded to the convex surface of said transducer, and a convex surface remote from said transducer adapted to transmit the megasonic diverging energy from the transducer.
Claim 15
Dependent Claim 12 words
The array of claim 11, wherein said transmitter has a semi-cylindrical configuration.
Claim 16
Dependent Claim 13 words
The array of claim 12, wherein said transducer extends circumferentially about 120 °.
Claim 17
Dependent Claim 12 words
The array of claim 11, wherein said transmitter has a tubular shape.
Claim 18
Dependent Claim 13 words
The array of claim 14, wherein said transducer extends circumferentially about 120 °.
Claim 19
Dependent Claim 26 words
The array of claim 14, wherein the ends of said tubular transmitter are closed so as to permit said array to be immersed in a container.
Claim 20
Dependent Claim 28 words
The array of claim 14, wherein the ends of said tubular transducer are adapted to extend through the side walls of said container and to be sealed thereto.
Claim 21
Dependent Claim 20 words
The array of claim 11, including electrical leads connected to said transducer and extending out the ends of said transmitter.
Claim 22
Dependent Claim 29 words
The array of claim 11, wherein said transmitter has a semi-cylindrical shape and said transducer extends circumferentially about 120° and is centered between the circumferential edges of said transmitter.
Claim 23
Dependent Claim 97 words
A transducer array for a megasonic cleaning system, comprising: a transducer having an arcuate convex surface and an arcuate concave surface, said transducer being adapted to propagate megasonic energy in a diverging pattern from a megasonic source applied to the transducer; and an arcuate energy transmitter being made of a material which will efficiently transmit megasonic energy, said transmitter having a concave surface bonded to the convex surface of said transducer, and a convex surface remote from said transducer adapted to transmit the megasonic diverging energy from the transducer, said transmitter being made of quartz or sapphire.
Claim 24
Dependent Claim 97 words
A transducer array for a megasonic cleaning system, comprising: a transducer having an arcuate convex surface and an arcuate concave surface, said transducer being adapted to propagate megasonic energy in a diverging pattern from a megasonic source applied to the transducer; and an arcuate energy transmitter being made of a material which will efficiently transmit megasonic energy, said transmitter having a concave surface bonded to the convex surface of said transducer, and a convex surface remote from said transducer adapted to transmit the megasonic diverging energy from the transducer, said transmitter being made of quartz or sapphire.

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1994-03-11 1994-09-10 1995-03-12 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1998-03-11 1998-09-10 1999-03-12 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2002-03-11 2002-09-10 2003-03-12 $7700.00 Window Closed / Lapsed

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