US5023109A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Deposition of synthetic diamonds
Assignee: General Atomics Corp
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Filing: 1989-09-06
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Granted: 1991-06-11
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Expires: 2009-09-06
Abstract
Abstract Synthetic diamond crystals and films are deposited on a pair of uniformly spaced apart facing plates made of silicon, molybdenum or boron in elemental, nitride or carbide form. The plates are suitably supported within a totally thermally insulated chamber where a pressure of about 10 torr or less is maintained in the form of an atmosphere which includes a carbon source and a major portion of hydrogen, and preferably includes oxygen in equal amount to the carbon. By supplying sufficient microwave power to create a plasma and a uniform temperature of about 950° C. at the plate surfaces, diamond crystals economically grow on the surfaces of the facing plates. Preferably, either the plates or the backing sections thereof have a relatively high thermal conductivity so as to maintain a uniform temperature across the entire plate surface areas.
Inventors
- 👤 Jack Chin
- 👤 Robert R. Goforth
- 👤 Tihiro Ohkawa
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 13:02
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/22; C23C16/26; C23C16/27; C23C16/274; C23C16/277; C23C16/44; C23C16/50; C23C16/511; C30; C30B; C30B25/00; C30B25/02; C30B25/10; C30B25/105; C30B29/00; C30B29/02; C30B29/04; H; H01; H01J; H01J37/00; H01J37/32; H01J37/32431; H01J37/32458; H01J37/32522; H01J37/32532; H01J37/3255; H01J37/32715; H01J37/32724
Claims Analysis
Total Claims: 21
Claim 1
Independent Claim
138 words
Apparatus for depositing a synthetic diamond film, which apparatus comprises a pair of facing plate means each having front and rear surfaces, said front surfaces being spaced apart from each other to define a region therebetween, means for maintaining a pressure of between about 1 torr and about 100 torr within said defined region, means for supplying a gaseous mixture containing a major portion of hydrogen and a minor portion of a carbon source to said defined region, and means for generating a plasma in said defined region in a manner so as to heat both said front plate surfaces to a relatively uniform temperature, surrounding region exterior of said plate means being thermally insulated to maintain said uniform temperature whereby the deposition of films of synthetic diamond crystals upon said front surfaces of plate means is promoted.
Claim 2
Dependent Claim
138 words
Apparatus for depositing a synthetic diamond film, which apparatus comprises a pair of facing plate means each having front and rear surfaces, said front surfaces being spaced apart from each other to define a region therebetween, means for maintaining a pressure of between about 1 torr and about 100 torr within said defined region, means for supplying a gaseous mixture containing a major portion of hydrogen and a minor portion of a carbon source to said defined region, and means for generating a plasma in said defined region in a manner so as to heat both said front plate surfaces to a relatively uniform temperature, surrounding region exterior of said plate means being thermally insulated to maintain said uniform temperature whereby the deposition of films of synthetic diamond crystals upon said front surfaces of plate means is promoted.
Claim 3
Dependent Claim
26 words
Apparatus in accordance with claim 1 wherein said front surfaces are substantially uniformly spaced apart a distance of between about 4 mm. and about 4 cm.
Claim 4
Dependent Claim
15 words
Apparatus in accordance with claim 1 wherein said plate means have relatively high thermal conductivity.
Claim 5
Dependent Claim
25 words
Apparatus in accordance with claim 1 wherein said plate means have front surfaces formed of a refractory metal or metalloid in elemental or compound form.
Claim 6
Dependent Claim
25 words
Apparatus in accordance with claim 3 wherein said front surfaces are formed of silicon, molybdenum or boron, or of a carbide or a nitride thereof.
Claim 7
Dependent Claim
29 words
Apparatus in accordance with claim 1 wherein said plate means includes a backing section means having a thermal conductivity of at least about 100 watts per m 2 (°C/m).
Claim 8
Dependent Claim
28 words
Apparatus in accordance with claim 1 wherein said surrounding region contains thermal insulation in the form of ceramic material substantially free of voids of 2 mm. or larger.
Claim 9
Dependent Claim
12 words
Apparatus in accordance with claim 7 wherein said thermal insulation is silica.
Claim 10
Dependent Claim
20 words
Apparatus in accordance with claim 1 wherein said surrounding region is thermally insulated by vacuum-creating means which prevents heat-convection therethrough.
Claim 11
Dependent Claim
36 words
Apparatus in accordance with claim 1 wherein means is provided for controlling said plasma-generating means so that a substantially uniform substrate temperature between about 925° C. and about 975° C. is achieved across said front surfaces.
Claim 12
Dependent Claim
14 words
Apparatus in accordance with claim 1 wherein said plates means are substantially flat plates.
Claim 13
Dependent Claim
32 words
Apparatus in accordance with claim 11 wherein said flat plates are elongated in one direction and enclosed within a tubular chamber having an axis parallel to the planes of said plate means.
Claim 14
Dependent Claim
30 words
Apparatus in accordance with claim 12 wherein ceramic thermal insulation is provided which occupies substantially the entire region between said plate means and the interior surface of said tubular chamber.
Claim 15
Dependent Claim
62 words
Apparatus in accordance with claim 12 wherein said plasma-generating means is a microwave generator, wherein a waveguide for focusing microwave power is disposed in surrounding relationship to said tubular chamber and provides a peak electrical field along said axis of said chamber and wherein the electric field vectors which result therefrom are oriented normal to said front surfaces of said flat plates.
Claim 16
Independent Claim
119 words
A method for depositing a synthetic diamond film, which method comprises providing a zone defined by a pair of facing plates having front surfaces which are spaced apart from each other, maintaining a pressure of between about 1 torr and about 100 torr within said zone, supplying a gaseous mixture containing a major portion of hydrogen and a minor portion of a carbon source to said zone, thermally insulating the region surrounding said zone and said plates, and generating a microwave plasma in said zone between said front plate surfaces in a manner to maintain both said front surfaces at relatively uniform temperatures, whereby the plasma causes deposition of films of synthetic diamond crystals upon said plate front surfaces.
Claim 17
Independent Claim
119 words
A method for depositing a synthetic diamond film, which method comprises providing a zone defined by a pair of facing plates having front surfaces which are spaced apart from each other, maintaining a pressure of between about 1 torr and about 100 torr within said zone, supplying a gaseous mixture containing a major portion of hydrogen and a minor portion of a carbon source to said zone, thermally insulating the region surrounding said zone and said plates, and generating a microwave plasma in said zone between said front plate surfaces in a manner to maintain both said front surfaces at relatively uniform temperatures, whereby the plasma causes deposition of films of synthetic diamond crystals upon said plate front surfaces.
Claim 18
Dependent Claim
33 words
A method in accordance with claim 15 wherein said zone is defined by said front surfaces which are substantially uniformly spaced apart a distance of between about 4 mm. and about 4 cm.
Claim 19
Dependent Claim
19 words
A method in accordance with claim 15 wherein said gaseous mixture contains about equal percentages of carbon and oxygen.
Claim 20
Dependent Claim
14 words
A method in accordance with claim 17 wherein said carbon source is a hydrocarbon.
Claim 21
Dependent Claim
29 words
A method in accordance with claim 15 wherein said plates are backed with sections having relatively high thermal conductivity to positively guard against thermal gradients along said plate surfaces.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1994-06-10 | 1994-12-10 | 1995-06-11 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1998-06-10 | 1998-12-10 | 1999-06-11 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2002-06-10 | 2002-12-10 | 2003-06-11 | $7700.00 | Window Closed / Lapsed |