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US5027077A Expired / Lapsed US ⏱️ 0.0 years remaining

Humidity measuring apparatus

Assignee: Seiko Epson Corp
•
Filing: 1989-08-22
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Granted: 1991-06-25
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Expires: 2009-08-22
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Abstract

Abstract A humidity sensing apparatus which includes a humidity sensor which detects humidity as a function of impedance is provided. A reference resistor has a predetermined resistance value. A charge switching circuit selectively couples one of the reference resistor or the humidity sensor in series with a reference capacitor which has a predetermined capacitance. A voltage judging circuit determines whether the terminal voltage of the reference capacitor is high or low. A charge/discharge switch selectively charges and discharges the reference capacitor in accordance with the output of the voltage judging circuit. A sensor direction switching circuit inverts the direction of current flowing through the humidity sensor during charging of the reference capacitor. An oscillation frequency counter counts the number of charge/discharge cycles which are repeated during a predetermined time period. A humidity sensor resistance value calculating circuit calculates the resistance value of the humidity sensor in accordance with the number of repeated charge/discharge cycles when the reference capacitor is coupled to the reference resistor for charging and the number of repeated charge/discharge cycles when the reference capacitor is coupled to the humidity sensor during charging. A humidity determining circuit determines the humidity from the resistance value of the humidity sensor calculated by the humidity sensor resistance value calculating circuit.

Inventors

  • 👤 Michio Yanagisawa
  • 👤 Masahisa Ikejiri
  • 👤 Hajime Miyazaki
  • 👤 Tsukasa Muranaka
  • 👤 Kunihiro Inoue
  • 👤 Shouichi Uchiyama

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-04 23:28
CPC Classifications
G; G01; G01N; G01N27/00; G01N27/02; G01N27/04; G01N27/12; G01N27/121; G01N27/122

Claims Analysis

Total Claims: 22
Claim 1
Independent Claim 201 words
A humidity measuring apparatus comprising: humidity sensor means for sensing humidity as a function of resistance; a reference resistor having a predetermined resistance value; a reference capacitor having a predetermined capacitance; charge switching means for selectively coupling one of said reference resistor or said humidity sensor means in series to said reference capacitor to charge said reference capacitor; voltage judging means for determining whether the terminal voltage of the reference capacitor is at about a predetermined high voltage (H) or at about a predetermined low voltage (L); charge/discharge switching means for selectively charging and discharging said reference capacitor in accordance with the output of said voltage judging means producing an oscillating charge/discharge cycle in response to the output of the voltage judging means; sensor direction switching means coupled to said charge/discharge switching means for inverting the direction of current flowing through said humidity sensor means during at least a portion of the period said reference capacitor is charged through said humidity sensor means in response to the output of the charge/discharge switching means; determining means coupled to said voltage judging means for determining the resistive value of said humidity sensor means and said humidity as a function of the charge/discharge cycle.
Claim 2
Dependent Claim 201 words
A humidity measuring apparatus comprising: humidity sensor means for sensing humidity as a function of resistance; a reference resistor having a predetermined resistance value; a reference capacitor having a predetermined capacitance; charge switching means for selectively coupling one of said reference resistor or said humidity sensor means in series to said reference capacitor to charge said reference capacitor; voltage judging means for determining whether the terminal voltage of the reference capacitor is at about a predetermined high voltage (H) or at about a predetermined low voltage (L); charge/discharge switching means for selectively charging and discharging said reference capacitor in accordance with the output of said voltage judging means producing an oscillating charge/discharge cycle in response to the output of the voltage judging means; sensor direction switching means coupled to said charge/discharge switching means for inverting the direction of current flowing through said humidity sensor means during at least a portion of the period said reference capacitor is charged through said humidity sensor means in response to the output of the charge/discharge switching means; determining means coupled to said voltage judging means for determining the resistive value of said humidity sensor means and said humidity as a function of the charge/discharge cycle.
Claim 3
Dependent Claim 117 words
A humidity measuring apparatus of claim 1, wherein said humidity determining means comprises: oscillation frequency counter means for counting the number of charge/discharge cycles of said reference capacitor which are repeated during a predetermined time period; humidity sensor resistance value calculating means for calculating a resistance value for said humidity sensor means in accordance with said number of repeated charge/discharge cycles when said reference capacitor is coupled to the reference resistor for charging and said number of repeated charge/discharge cycles when said reference capacitor is coupled to said humidity sensor for charging; and humidity identifying means for identifying the humidity from said resistance value of said humidity sensor calculated by said humidity sensor resistance value calculating means.
Claim 4
Dependent Claim 19 words
The humidity measuring apparatus of claim 1, wherein the sensor direction switching means inverts the direction of current periodically.
Claim 5
Dependent Claim 39 words
The humidity measuring apparatus of claim 3, wherein the sensor direction switching means inverts the direction of current that flows in the humidity sensor means in each direction determined in response to the output of the voltage judging means.
Claim 6
Dependent Claim 36 words
The humidity measuring apparatus of claim 1, further comprising a discharge resistor coupled to said charge/discharge switching means, said discharge resistor providing a load resistance for said reference capacitor during the discharge of said reference capacitor.
Claim 7
Dependent Claim 117 words
The humidity measuring apparatus of claim 1, wherein said humidity sensor means includes a first terminal and a second terminal, said humidity sensor means and said reference resistor being electrically connected to said charge switching means for alternative connection to the reference capacitor, said sensor direction switching means further comprising a first switch connected to said first terminal of said humidity sensor means and a second switch connected to said second terminal of said humidity sensor means, said sensor direction switching means inverting the direction of current flowing through said humidity sensor by switching the electrical connection of said charge switching means and said humidity sensor means between said first and second terminals of said humidity sensor.
Claim 8
Dependent Claim 42 words
The humidity measuring apparatus of claim 6, wherein said sensor direction switching means further includes flip flop means clocked by the output of said voltage judging means, said first and second switches being actuated by an output from said flip flop means.
Claim 9
Dependent Claim 20 words
The humidity measuring apparatus of claim 7, wherein said voltage judging means comprises a logic inverting gate having hysteresis properties.
Claim 10
Dependent Claim 25 words
The humidity measuring apparatus of claim 1, wherein said charge/discharging switching means, said sensor direction switching means and said charge switching means include analog switches.
Claim 11
Dependent Claim 52 words
The humidity measuring apparatus of claim 1, wherein said humidity sensor includes an insulating substrate; a pair of electrodes formed on said insulating substrate; a porous silica film including carbon particles formed on an exposed surface of said insulating substrate and electrode; and a silica film formed on said porous silica film.
Claim 12
Dependent Claim 58 words
The humidity measuring apparatus of claim 10, wherein said electrodes are Cr and include a terminal portion for connection to a lead electrode, said terminal portion further including a layer of Au formed on each Cr electrode, a layer of NiCr formed on the layer of Au and a layer of Au formed on the layer of NiCr.
Claim 13
Dependent Claim 30 words
The humidity measuring apparatus of claim 10, wherein a silica sol used in forming said porous silica film contains between about 1 and 4 weight % of said carbon particles.
Claim 14
Dependent Claim 21 words
The humidity measuring apparatus of claim 12, wherein said porous silica film contains about 2.5 weight % of said carbon particles.
Claim 15
Dependent Claim 21 words
The humidity measuring apparatus of claim 12, wherein the amount of carbon particles is selected to provide a stable humidity sensor.
Claim 16
Dependent Claim 20 words
The humidity measuring apparatus of claim 12, wherein the amount of carbon particles is selected to provide accurate humidity measurements.
Claim 17
Dependent Claim 29 words
The humidity apparatus of claim 12, wherein said silica sol containing carbon particles is formed by dispersing silica particles and carbon particles in a hydrolyzed solution of silicon alkoxide.
Claim 18
Dependent Claim 13 words
The humidity measuring apparatus of claim 10, wherein the insulating substrate is alumina.
Claim 19
Dependent Claim 33 words
The humidity measuring apparatus of claim 10, wherein said porous silica film containing carbon particles is produced by forming a silica sol including carbon particles into a film and heat treating said film.
Claim 20
Dependent Claim 14 words
The humidity measuring apparatus of claim 10, wherein the electrodes are interleaved comb electrodes.
Claim 21
Independent Claim 62 words
A method of avoiding electrolysis in a humidity or temperature sensor comprising the step of alternatively charging and discharging a capacitor through a moisture sensitive humidity or temperature sensor and through a reference resistor, and periodically changing the direction of charging current through the humidity or temperature sensor in accordance with the charge/discharge cycle of the charging and discharging of said capacitor.
Claim 22
Independent Claim 62 words
A method of avoiding electrolysis in a humidity or temperature sensor comprising the step of alternatively charging and discharging a capacitor through a moisture sensitive humidity or temperature sensor and through a reference resistor, and periodically changing the direction of charging current through the humidity or temperature sensor in accordance with the charge/discharge cycle of the charging and discharging of said capacitor.

References Cited (Backward Citations)

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USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1994-06-24 1994-12-24 1995-06-25 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1998-06-24 1998-12-24 1999-06-25 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2002-06-24 2002-12-24 2003-06-25 $7700.00 Window Closed / Lapsed

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