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US5032892A Expired / Lapsed US ⏱️ 0.0 years remaining

Depletion mode chip decoupling capacitor

Assignee: Micron Technology Inc
•
Filing: 1989-12-20
•
Granted: 1991-07-16
•
Expires: 2009-12-20
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Abstract

Abstract An integrated cirucuit is provided with a depletion mode filter capacitor, which reduces voltage spiking, while at the same time avoiding latchup problems caused by the capacitor. The depletion mode capacitor has a barrier layer which is doped to an opposite conductivity type as the integrated circuit's substrate, achieved by doping to provide an opposite difference from four valence electrons as the substrate. The barrier is formed as a part of a CMOS process, in a manner which avoids additional process steps. The capacitor is formed with one node connected to ground or substrate, and the other node directly to a power bus. The capacitor is located on open space available on the whole siliocn chip (memory as well as logic chip), particularly directly underneath the metal power bus to achieve an on-chip power bus decoupling capacitor wth capacitance in excess of 0.001 μF.

Inventors

  • 👤 Wen-Foo Chern
  • 👤 Ward M. Parkinson
  • 👤 Thomas M. Trent
  • 👤 Kevin G. Duesman
  • 👤 James E. O'Toole

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-02 19:11
CPC Classifications
H; H10; H10D; H10D84/00; H10D84/201; H10D84/204; H10D84/212; H10D89/00; H10D89/211; H05; H05K; H05K1/00; H05K1/02; H05K1/0213; H05K1/0216; H05K1/023; H05K1/0231

Claims Analysis

Total Claims: 44
Claim 1
Independent Claim 402 words
A semiconductor circuit device in which a plurality of active circuit devices are arrayed on a semiconductive substrate in a CMOS configuration, and a plurality of conductive lines extend along the substrate between the active devices and external connection points on the die containing the semiconductor substrate, within a package containing external connection conductors extending within the package from the external connection points and having a significant inductive characteristics, characterized by: a) at least one well consisting of a material of opposite conductivity type as the substrate, achieved by doping to provide an opposite difference from four valence electrons as the substrate; b) a capacitor defined by an active area of the substrate and a polysilicon layer; c) the capacitor being provided with a barrier to substrate, the barrier consisting of a material of opposite conductivity type as the substrate, achieved by providing said capacitor within said well which had been doped to provide an opposite difference from four valence electrons as the substrate, whereby said doped well forms said barrier, the barrier being located in the substrate under the polysilicon layer of the capacitor and under the active area of the substrate at the capacitor as latchup protection; d) the capacitor occupying a space defined by a plurality of the conductive lines; e) the capacitor being in electrical communication with at least one of said lines, wherein the capacitor is located on the substrate in an area which is unoccupied by said active circuit devices, wherein one node is tied directly to substrate and the other node to one of said plurality of conductive lines as an on-chip power bus decoupling capacitor, thereby adding filter capacitance to the semiconductor circuit device in order to provide protection from voltage transients which may occur at the external connection points as a result of said inductive characteristics of the external connection conductors; f) said conductive lines being circuit busses for circuits on the semiconductor device; g) said conductive lines being metal conductors; h) one of said conductive lines being maintained at a regulated potential; i) an additional capacitor located on the substrate in an area which is unoccupied by said active circuit device and connected in series with said capacitor in electrical communication with said conductive line which is maintained at the regulated potential; and j) the additional capacitor sharing a common electrode plate which extends across said unoccupied area between the two capacitors.
Claim 2
Dependent Claim 402 words
A semiconductor circuit device in which a plurality of active circuit devices are arrayed on a semiconductive substrate in a CMOS configuration, and a plurality of conductive lines extend along the substrate between the active devices and external connection points on the die containing the semiconductor substrate, within a package containing external connection conductors extending within the package from the external connection points and having a significant inductive characteristics, characterized by: a) at least one well consisting of a material of opposite conductivity type as the substrate, achieved by doping to provide an opposite difference from four valence electrons as the substrate; b) a capacitor defined by an active area of the substrate and a polysilicon layer; c) the capacitor being provided with a barrier to substrate, the barrier consisting of a material of opposite conductivity type as the substrate, achieved by providing said capacitor within said well which had been doped to provide an opposite difference from four valence electrons as the substrate, whereby said doped well forms said barrier, the barrier being located in the substrate under the polysilicon layer of the capacitor and under the active area of the substrate at the capacitor as latchup protection; d) the capacitor occupying a space defined by a plurality of the conductive lines; e) the capacitor being in electrical communication with at least one of said lines, wherein the capacitor is located on the substrate in an area which is unoccupied by said active circuit devices, wherein one node is tied directly to substrate and the other node to one of said plurality of conductive lines as an on-chip power bus decoupling capacitor, thereby adding filter capacitance to the semiconductor circuit device in order to provide protection from voltage transients which may occur at the external connection points as a result of said inductive characteristics of the external connection conductors; f) said conductive lines being circuit busses for circuits on the semiconductor device; g) said conductive lines being metal conductors; h) one of said conductive lines being maintained at a regulated potential; i) an additional capacitor located on the substrate in an area which is unoccupied by said active circuit device and connected in series with said capacitor in electrical communication with said conductive line which is maintained at the regulated potential; and j) the additional capacitor sharing a common electrode plate which extends across said unoccupied area between the two capacitors.
Claim 3
Dependent Claim 50 words
Semiconductor circuit device as described in claim 1, further characterized by: a) the barrier being obtained by using an n-well definition step in a CMOS process; b) the semiconductor substrate being p-type silicon; and c) the barrier being a layer of substrate which is counterdoped sufficiently to be n-type silicon.
Claim 4
Dependent Claim 50 words
Semiconductor circuit device as described in claim 1, further characterized by: a) the barrier being obtained by using a p-well definition step in a CMOS process; b) the semiconductor substrate being n-type silicon; and c) the barrier being a layer of substrate which is counterdoped sufficiently to be p-type silicon.
Claim 5
Dependent Claim 57 words
Semiconductor circuit device as described in claim 1, further characterized by: the capacitor being in electrical communication between two of said conductive lines, wherein both of said lines remains in electrical communication with the external connection points, and wherein the capacitor filters inductively induced transients on the semiconductor device during the operation of the semiconductor circuit device.
Claim 6
Dependent Claim 48 words
Semiconductor circuit device as described in claim 1, further characterized by: the semiconductor circuit device including a randomly accessed memory array, in which stored data is communicated by high and low state signals and said capacitor is connected between a V SS circuit and a V CC circuit.
Claim 7
Dependent Claim 44 words
Semiconductor circuit device as described in claim 1, further characterized by: a) said active circuit devices and said conductive lines being located on a face side of the substrate of the semiconductor circuit device; and b) said capacitor being located on the face side.
Claim 8
Dependent Claim 31 words
Semiconductor circuit device as described in claim 6, further characterized by: said capacitor being located on a portion of the semiconductor circuit device which is at a perimeter of the substrate.
Claim 9
Dependent Claim 39 words
Semiconductor circuit device as described in claim 1, further characterized by: said capacitor being located on a portion of the semiconductor circuit device which is in a border area between adjacent regions of active circuitry on the semiconductor device.
Claim 10
Dependent Claim 17 words
Semiconductor circuit device as described in claim 1, further characterized by: said capacitors being depletion mode capacitors.
Claim 11
Dependent Claim 362 words
A semiconductor dynamic random access memory (DRAM) circuit device in which a plurality of active circuit devices are arrayed on a semiconductive substrate and a plurality of conductive lines extend along the substrate between the active devices and external connection points on the die, containing the semiconductor substrate, within a package containing external connection conductors extending within the package from the external connection points and having a significant inductive characteristics, characterized by: a) a voltage regulator circuit; b) a regulated conductive line extending along the substrate between an active device and the voltage regulator circuit; c) at least one well consisting of a material of opposite conductivity type as the substrate, achieved by doping to provide an opposite difference from four valence electrons as the substrate; d) a capacitor defined by an active area of the substrate and a polysilicon layer; e) the capacitor being provided with a barrier to substrate, the barrier consisting of a material of opposite conductivity type as the substrate, achieved by providing said capacitor within said well which had been doped to provide an opposite difference from four valence electrons as the substrate, whereby said doped well forms said barrier; f) the capacitor occupying a space defined by a plurality of the conductive lines; g) the capacitor being in electrical communication with said regulated conductive line, wherein the capacitor is located on the substrate in an area which is unoccupied by said active circuit devices, wherein one node is tied directly to substrate and the other node to the regulated conductive line as an on-chip power bus decoupling capacitor, thereby adding filter capacitance to the semiconductor circuit device in order to provide protection from voltage transients which may occur at the external connection points as a result of said inductive characteristics of the external connection conductors; h) an additional capacitor located on the substrate in an area which is unoccupied by said active circuit device and connected in series with said capacitor in electrical communication with said regulated conductive line; i) the additional capacitor sharing a common electrode plate which extends across said unoccupied area between the two capacitors; and j) said capacitors being depletion mode capacitors.
Claim 12
Dependent Claim 362 words
A semiconductor dynamic random access memory (DRAM) circuit device in which a plurality of active circuit devices are arrayed on a semiconductive substrate and a plurality of conductive lines extend along the substrate between the active devices and external connection points on the die, containing the semiconductor substrate, within a package containing external connection conductors extending within the package from the external connection points and having a significant inductive characteristics, characterized by: a) a voltage regulator circuit; b) a regulated conductive line extending along the substrate between an active device and the voltage regulator circuit; c) at least one well consisting of a material of opposite conductivity type as the substrate, achieved by doping to provide an opposite difference from four valence electrons as the substrate; d) a capacitor defined by an active area of the substrate and a polysilicon layer; e) the capacitor being provided with a barrier to substrate, the barrier consisting of a material of opposite conductivity type as the substrate, achieved by providing said capacitor within said well which had been doped to provide an opposite difference from four valence electrons as the substrate, whereby said doped well forms said barrier; f) the capacitor occupying a space defined by a plurality of the conductive lines; g) the capacitor being in electrical communication with said regulated conductive line, wherein the capacitor is located on the substrate in an area which is unoccupied by said active circuit devices, wherein one node is tied directly to substrate and the other node to the regulated conductive line as an on-chip power bus decoupling capacitor, thereby adding filter capacitance to the semiconductor circuit device in order to provide protection from voltage transients which may occur at the external connection points as a result of said inductive characteristics of the external connection conductors; h) an additional capacitor located on the substrate in an area which is unoccupied by said active circuit device and connected in series with said capacitor in electrical communication with said regulated conductive line; i) the additional capacitor sharing a common electrode plate which extends across said unoccupied area between the two capacitors; and j) said capacitors being depletion mode capacitors.
Claim 13
Dependent Claim 26 words
Semiconductor circuit device as described in claim 10, further characterized by: the barrier being located under said polysilicon layer which defines the capacitor, as latchup protection.
Claim 14
Dependent Claim 35 words
Semiconductor circuit device as described in claim 10, further characterized by: a) the semiconductor substrate being p-type silicon; and b) the barrier being a layer of substrate which is counterdoped sufficiently to be n-type silicon.
Claim 15
Dependent Claim 35 words
Semiconductor circuit device as described in claim 10, further characterized by: a) the semiconductor substrate being n-type silicon; and b) the barrier being a layer of substrate which is counterdoped sufficiently to be p-type silicon.
Claim 16
Dependent Claim 17 words
Semiconductor circuit device as described in claim 10, further characterized by: said conductive lines being metal conductors.
Claim 17
Dependent Claim 44 words
Semiconductor circuit device as described in claim 14, further characterized by: a) said active circuit devices and said conductive lines being located on a face side of the substrate of the semiconductor circuit device; and b) said capacitor being located on the face side.
Claim 18
Dependent Claim 31 words
Semiconductor circuit device as described in claim 15, further characterized by: said capacitor being located on a portion of the semiconductor circuit device which is at a perimeter of the substrate.
Claim 19
Dependent Claim 36 words
Semiconductor circuit device as described in claim 15, further characterized by: said capacitor being located on a portion of the semiconductor circuit device which is in a border area of active circuitry on the semiconductor device.
Claim 20
Dependent Claim 208 words
A semiconductor circuit device in which a plurality of active circuit devices are arrayed on a semiconductive substrate, characterized by: a) at least one well consisting of a material of opposite conductivity type as the substrate, achieved by doping to provide an opposite difference from four valence electrons as the substrate; b) a capacitor defined by an active area of the substrate and a polysilicon layer; c) the capacitor being provided with a barrier to substrate, the barrier consisting of a material of opposite conductivity type as the substrate, achieved by providing said capacitor within said well which had been doped to provide an opposite difference from four valence electrons as the substrate, whereby said doped well forms said barrier; d) the barrier being located in the substrate under the polysilicon layer of the capacitor and under the active area of the substrate at the capacitor as latchup protection; e) an additional capacitor located on the substrate in an are which is unoccupied by said active circuit device and connected in series with said capacitor in electrical communication with a conductive line which is maintained at a regulated potential; and the additional capacitor sharing a common electrode plate which extends across said unoccupied area between the two capacitors.
Claim 21
Dependent Claim 208 words
A semiconductor circuit device in which a plurality of active circuit devices are arrayed on a semiconductive substrate, characterized by: a) at least one well consisting of a material of opposite conductivity type as the substrate, achieved by doping to provide an opposite difference from four valence electrons as the substrate; b) a capacitor defined by an active area of the substrate and a polysilicon layer; c) the capacitor being provided with a barrier to substrate, the barrier consisting of a material of opposite conductivity type as the substrate, achieved by providing said capacitor within said well which had been doped to provide an opposite difference from four valence electrons as the substrate, whereby said doped well forms said barrier; d) the barrier being located in the substrate under the polysilicon layer of the capacitor and under the active area of the substrate at the capacitor as latchup protection; e) an additional capacitor located on the substrate in an are which is unoccupied by said active circuit device and connected in series with said capacitor in electrical communication with a conductive line which is maintained at a regulated potential; and the additional capacitor sharing a common electrode plate which extends across said unoccupied area between the two capacitors.
Claim 22
Dependent Claim 50 words
Semiconductor circuit device as described in claim 18, further characterized by: a) the barrier being obtained by using an n-well definition step in a CMOS process; b) the semiconductor substrate being p-type silicon; and c) the barrier being a layer of substrate which is counterdoped sufficiently to be n-type silicon.
Claim 23
Dependent Claim 50 words
Semiconductor circuit device as described in claim 18, further characterized by: a) the barrier being obtained by using a p-well definition step in a CMOS process; b) the semiconductor substrate being n-type silicon; and c) the barrier being a layer of substrate which is counterdoped sufficiently to be p-type silicon.
Claim 24
Dependent Claim 31 words
Semiconductor circuit device as described in claim 18, further characterized by: said capacitor being located on a portion of the semiconductor circuit device which is at a perimeter of the substrate.
Claim 25
Dependent Claim 17 words
Semiconductor circuit device as described in claim 18, further characterized by: said capacitors being depletion mode capacitors.
Claim 26
Dependent Claim 373 words
A semiconductor circuit device in which a plurality of active circuit devices are arrayed on a semiconductive substrate in a CMOS configuration, and a plurality of conductive lines extend along the substrate between the active devices and external connection points on the die containing the semiconductor substrate, within a package containing external connection conductors extending within the package from the external connection points and having a significant inductive characteristics, characterized by: a) said conductive lines being circuit busses for circuits on the semiconductor device; b) said conductive lines being metal conductors; c) one of said conductive lines being maintained at a regulated potential; d) at least one well consisting of a material of opposite conductivity type as the substrate, achieved by doping to provide an opposite difference from four valence electrons as the substrate; e) a capacitor defined by an active area of the substrate and a polysilicon layer; f) the capacitor being provided with a barrier to substrate, the barrier consisting of a material of opposite conductivity type as the substrate, achieved by providing said capacitor within said well which had been doped to provide an opposite difference from four valence electrons as the substrate, whereby said doped well forms said barrier; g) the capacitor occupying a space defined by a plurality of the conductive lines; h) the capacitor being in electrical communication with at least one of said lines, wherein the capacitor is located on the substrate in an area which is unoccupied by said active circuit devices, wherein one node is tied directly to substrate and the other node to one of said plurality of conductive lines as an on-chip power bus decoupling capacitor, thereby adding filter capacitance to the semiconductor circuit device in order to provide protection from voltage transients which may occur at the external connection points as a result of said inductive characteristics of the external connection conductors; and i) an additional capacitor located on the substrate in an area which is unoccupied by said active circuit device and connected in series with said capacitor in electrical communication with said conductive line which is maintained at the regulated potential, the additional capacitor sharing a common electrode plate which extends across said unoccupied area between the two capacitors.
Claim 27
Dependent Claim 373 words
A semiconductor circuit device in which a plurality of active circuit devices are arrayed on a semiconductive substrate in a CMOS configuration, and a plurality of conductive lines extend along the substrate between the active devices and external connection points on the die containing the semiconductor substrate, within a package containing external connection conductors extending within the package from the external connection points and having a significant inductive characteristics, characterized by: a) said conductive lines being circuit busses for circuits on the semiconductor device; b) said conductive lines being metal conductors; c) one of said conductive lines being maintained at a regulated potential; d) at least one well consisting of a material of opposite conductivity type as the substrate, achieved by doping to provide an opposite difference from four valence electrons as the substrate; e) a capacitor defined by an active area of the substrate and a polysilicon layer; f) the capacitor being provided with a barrier to substrate, the barrier consisting of a material of opposite conductivity type as the substrate, achieved by providing said capacitor within said well which had been doped to provide an opposite difference from four valence electrons as the substrate, whereby said doped well forms said barrier; g) the capacitor occupying a space defined by a plurality of the conductive lines; h) the capacitor being in electrical communication with at least one of said lines, wherein the capacitor is located on the substrate in an area which is unoccupied by said active circuit devices, wherein one node is tied directly to substrate and the other node to one of said plurality of conductive lines as an on-chip power bus decoupling capacitor, thereby adding filter capacitance to the semiconductor circuit device in order to provide protection from voltage transients which may occur at the external connection points as a result of said inductive characteristics of the external connection conductors; and i) an additional capacitor located on the substrate in an area which is unoccupied by said active circuit device and connected in series with said capacitor in electrical communication with said conductive line which is maintained at the regulated potential, the additional capacitor sharing a common electrode plate which extends across said unoccupied area between the two capacitors.
Claim 28
Dependent Claim 17 words
Semiconductor circuit device as described in claim 23, further characterized by: said capacitors being depletion mode capacitors.
Claim 29
Dependent Claim 50 words
Semiconductor circuit device as described in claim 23, further characterized by: a) the barrier being obtained by using an n-well definition step in a CMOS process; b) the semiconductor substrate being p-type silicon; and c) the barrier being a layer of substrate which is counterdoped sufficiently to be n-type silicon.
Claim 30
Dependent Claim 50 words
Semiconductor circuit device as described in claim 23, further characterized by: a) the barrier being obtained by using a p-well definition step in a CMOS process; b) the semiconductor substrate being n-type silicon; and c) the barrier being a layer of substrate which is counterdoped sufficiently to be p-type silicon.
Claim 31
Dependent Claim 57 words
Semiconductor circuit device as described in claim 23, further characterized by: the capacitors being in electrical communication between two of said conductive lines, wherein both of said lines remains in electrical communication with the external connection points, and wherein the capacitors filter inductively induced transients on the semiconductor device during the operation of the semiconductor circuit device.
Claim 32
Dependent Claim 46 words
Semiconductor circuit device as described in claim 23, further characterized by: the semiconductor circuit device including a randomly accessed memory array, in which stored data is communicated by high and low state signals and said capacitors are connected between a VSS circuit and a VCC circuit.
Claim 33
Dependent Claim 44 words
Semiconductor circuit device as described in claim 23, further characterized by: a) said active circuit devices and said conductive lines being located on a face side of the substrate of the semiconductor circuit device; and b) said capacitors being located on the face side.
Claim 34
Dependent Claim 31 words
Semiconductor circuit device as described in claim 29, further characterized by: said capacitors being located on a portion of the semiconductor circuit device which is at a perimeter of the substrate.
Claim 35
Dependent Claim 39 words
Semiconductor circuit device as described in claim 23, further characterized by: said capacitors being located on a portion of the semiconductor circuit device which is in a border area between adjacent regions of active circuitry on the semiconductor device.
Claim 36
Dependent Claim 360 words
A semiconductor circuit device in which a plurality of active circuit devices are arrayed on a semiconductive substrate in a CMOS configuration, and a plurality of conductive lines extend along the substrate between the active devices and external connection points on the die containing the semiconductor substrate, within a package containing external connection conductors extending within the package from the external connection points and having a significant inductive characteristics, characterized by: a) said conductive lines being circuit busses for circuits on the semiconductor device; b) said conductive lines being metal conductors; c) said conductive lines being maintained at a regulated potential; d) at least one well consisting of a material of opposite conductivity type as the substrate, achieved by doping to provide an opposite difference from four valence electrons as the substrate; e) a capacitor defined by an active area of the substrate and a polysilicon layer; f) the capacitor being provided with a barrier to substrate, the barrier consisting of a material of opposite conductivity type as the substrate, achieved by providing said capacitor within said well which had been doped to provide an opposite difference from four valence electrons as the substrate, whereby said doped well forms said barrier; g) the capacitor occupying a space defined by a plurality of the conductive lines; h) the capacitor being in electrical communication with at least one of said lines, wherein the capacitor is located on the substrate in an area which is unoccupied by said active circuit devices, wherein one node is tied directly to substrate and the other node to one of said plurality of conductive lines as an on-chip power bus decoupling capacitor, thereby adding filter capacitance to the semiconductor circuit device in order to provide protection from voltage transients which may occur at the external connection points as a result of said inductive characteristics of the external connection conductors; i) an additional capacitor located on the substrate in an area which is unoccupied by said active circuit device and connected in series with said capacitor in electrical communication with said conductive line which is maintained at the regulated potential; and j) said capacitors being depletion mode capacitors.
Claim 37
Dependent Claim 360 words
A semiconductor circuit device in which a plurality of active circuit devices are arrayed on a semiconductive substrate in a CMOS configuration, and a plurality of conductive lines extend along the substrate between the active devices and external connection points on the die containing the semiconductor substrate, within a package containing external connection conductors extending within the package from the external connection points and having a significant inductive characteristics, characterized by: a) said conductive lines being circuit busses for circuits on the semiconductor device; b) said conductive lines being metal conductors; c) said conductive lines being maintained at a regulated potential; d) at least one well consisting of a material of opposite conductivity type as the substrate, achieved by doping to provide an opposite difference from four valence electrons as the substrate; e) a capacitor defined by an active area of the substrate and a polysilicon layer; f) the capacitor being provided with a barrier to substrate, the barrier consisting of a material of opposite conductivity type as the substrate, achieved by providing said capacitor within said well which had been doped to provide an opposite difference from four valence electrons as the substrate, whereby said doped well forms said barrier; g) the capacitor occupying a space defined by a plurality of the conductive lines; h) the capacitor being in electrical communication with at least one of said lines, wherein the capacitor is located on the substrate in an area which is unoccupied by said active circuit devices, wherein one node is tied directly to substrate and the other node to one of said plurality of conductive lines as an on-chip power bus decoupling capacitor, thereby adding filter capacitance to the semiconductor circuit device in order to provide protection from voltage transients which may occur at the external connection points as a result of said inductive characteristics of the external connection conductors; i) an additional capacitor located on the substrate in an area which is unoccupied by said active circuit device and connected in series with said capacitor in electrical communication with said conductive line which is maintained at the regulated potential; and j) said capacitors being depletion mode capacitors.
Claim 38
Dependent Claim 50 words
Semiconductor circuit device as described in claim 32, further characterized by: a) the barrier being obtained by using an n-well definition step in a CMOS process; b) the semiconductor substrate being p-type silicon; and c) the barrier being a layer of substrate which is counterdoped sufficiently to be n-type silicon.
Claim 39
Dependent Claim 50 words
Semiconductor circuit device as described in claim 32, further characterized by: a) the barrier being obtained by using a p-well definition step in a CMOS process; b) the semiconductor substrate being n-type silicon; and c) the barrier being a layer of substrate which is counterdoped sufficiently to be p-type silicon.
Claim 40
Dependent Claim 57 words
Semiconductor circuit device as described in claim 32, further characterized by: the capacitors being in electrical communication between two of said conductive lines, wherein both of said lines remains in electrical communication with the external connection points, and wherein the capacitors filter inductively induced transients on the semiconductor device during the operation of the semiconductor circuit device.
Claim 41
Dependent Claim 46 words
Semiconductor circuit device as described in claim 32, further characterized by: the semiconductor circuit device including a randomly accessed memory array, in which stored data is communicated by high and low state signals and said capacitors are connected between a VSS circuit and a VCC circuit.
Claim 42
Dependent Claim 44 words
Semiconductor circuit device as described in claim 32, further characterized by: a) said active circuit devices and said conductive lines being located on a face side of the substrate of the semiconductor circuit device; and b) said capacitors being located on the face side.
Claim 43
Dependent Claim 31 words
Semiconductor circuit device as described in claim 37, further characterized by: said capacitors being located on a portion of the semiconductor circuit device which is at a perimeter of the substrate.
Claim 44
Dependent Claim 39 words
Semiconductor circuit device as described in claim 32, further characterized by: said capacitors being located on a portion of the semiconductor circuit device which is in a border area between adjacent regions of active circuitry on the semiconductor device.

References Cited (Backward Citations)

US4164751A Cited
US4317686A Cited
US4604639A Cited
US4427989A Cited
JPS5877251A Cited
US4780846A Cited
US4670861A Cited
US4701884A Cited
US4737830A Cited
JPS6410663A Cited
US4879631A Cited

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