US5056922A — Method and apparatus for monitoring the surface p…

Claim 1

Independent Claim 168 words

An optical inspecting apparatus for monitoring the surface profile of a moving workpiece at different positions along said workpiece, comprising at least one optical unit including: a light projecting system for illuminating discrete points on a first surface of said workpiece by projecting more than one discrete coplanar light beams, each of said light beams having an elliptically shaped cross section with a longer axis being perpendicular to a longitudinal axis of a single one-dimensional detector; and light detecting means for imaging said illuminated points on said first surface, said light detecting means including an objective lens for gathering light beams reflected from said first surface, and said single one-dimensional detector having detecting elements disposed in one line array, the longitudinal axis of said detector being coplanar with said more than one coplanar light beams, said detecting elements being elongated in a direction perpendicular to the longitudinal axis of said detector, said detector having an output indicative of the surface profile at different positions along said first surface.

Claim 2

Dependent Claim 168 words

An optical inspecting apparatus for monitoring the surface profile of a moving workpiece at different positions along said workpiece, comprising at least one optical unit including: a light projecting system for illuminating discrete points on a first surface of said workpiece by projecting more than one discrete coplanar light beams, each of said light beams having an elliptically shaped cross section with a longer axis being perpendicular to a longitudinal axis of a single one-dimensional detector; and light detecting means for imaging said illuminated points on said first surface, said light detecting means including an objective lens for gathering light beams reflected from said first surface, and said single one-dimensional detector having detecting elements disposed in one line array, the longitudinal axis of said detector being coplanar with said more than one coplanar light beams, said detecting elements being elongated in a direction perpendicular to the longitudinal axis of said detector, said detector having an output indicative of the surface profile at different positions along said first surface.

Claim 3

Dependent Claim 59 words

An optical inspecting apparatus according to claim 1, wherein said light projecting system comprises optical projecting means for projecting said more than one discrete coplanar light beams so that discrete coplanar light beams projected onto peripheral portions of said first surface have a higher intensity than discrete coplanar light beams projected onto the central portion of said first surface.

Claim 4

Dependent Claim 92 words

An optical inspecting apparatus according to claim 2, wherein said optical projecting means comprise: a collimated light source for projecting a unique light beam; more than one sequentially spaced mirrors having different reflecting surfaces characterized by different reflective properties so that said discrete coplanar light beams projected onto peripheral portions of said first surface have a higher intensity than discrete coplanar light beams projected onto the central portion of said first surface, each mirror having also an appropriately chosen angle so that the distance between each of said discrete points is regular.

Claim 5

Dependent Claim 116 words

An optical inspecting apparatus according to claim 2, wherein said optical projecting means comprise: a laser source for projecting a laser beam; diffractive means for diffracting said laser beam in a diverging pattern of light beams; and reflecting means having two reflecting surfaces for receiving light beams from said diffractive means and projecting discrete coplanar light beams having a higher intensity onto peripheral portions of said first surface than discrete coplanar light beams projected onto the central portion of said first surface, said reflecting surfaces being positioned so that the central light beams of said pattern are projected onto said peripheral portions and the peripheral light beams of said pattern are projected onto said central portion.

Claim 6

Dependent Claim 65 words

An optical inspecting apparatus according to claim 1, wherein at least one optical unit monitors the surface profile of said first surface on one side of said workpiece, and at least one optical unit monitors the surface profile of a second surface on the opposite side of said workpiece so that the thickness of said workpiece can be monitored along certain portions of said workpiece.

Claim 7

Dependent Claim 35 words

An optical inspecting apparatus according to claim 5, wherein said first surface is monitored along the whole length of the workpiece, and said second surface is also monitored along the whole length of the workpiece.

Claim 8

Dependent Claim 18 words

An optical inspecting apparatus according to claim 6, wherein each optical unit projects six discrete coplanar light beams.

Claim 9

Dependent Claim 66 words

An optical inspecting apparatus according to claim 5, wherein one of said at least one optical unit is directed above one lateral edge of said workpiece, said apparatus further comprising a light source directed below said one lateral edge for providing a brightly illuminated background against which the contour of said one lateral edge is recorded by the light detecting means of said one optical unit.

Claim 10

Dependent Claim 37 words

An optical inspecting apparatus according to claim 8, wherein said light source is an elongated lamp, said lamp being elongated in a direction perpendicular to the direction in which said workpiece moves, and along said second surface.

Claim 11

Dependent Claim 158 words

An optical inspecting method for monitoring the surface profile of a moving workpiece at different positions along said workpiece, comprising the following steps: a) projecting more than one discrete coplanar light beams onto discrete points of a first surface of said workpiece, each of said light beams having an elliptically-shaped cross-section with a longer axis perpendicular to a longitudinal axis of a single one-dimensional detector; b) gathering light beams reflected from said first surface by means of an objective lens; c) detecting each of said light beams gathered in step b) by means of said single one-dimensional detector having detecting elements disposed in one line array, the longitudinal axis of said detector being coplanar with said more than one coplanar light beams, said detecting elements being elongated in a direction perpendicular to the longitudinal axis of said detector; and d) generating an output from said detector, indicative of the surface profile at different positions along said first surface.

Claim 12

Dependent Claim 158 words

An optical inspecting method for monitoring the surface profile of a moving workpiece at different positions along said workpiece, comprising the following steps: a) projecting more than one discrete coplanar light beams onto discrete points of a first surface of said workpiece, each of said light beams having an elliptically-shaped cross-section with a longer axis perpendicular to a longitudinal axis of a single one-dimensional detector; b) gathering light beams reflected from said first surface by means of an objective lens; c) detecting each of said light beams gathered in step b) by means of said single one-dimensional detector having detecting elements disposed in one line array, the longitudinal axis of said detector being coplanar with said more than one coplanar light beams, said detecting elements being elongated in a direction perpendicular to the longitudinal axis of said detector; and d) generating an output from said detector, indicative of the surface profile at different positions along said first surface.

Claim 13

Dependent Claim 67 words

A method according to claim 10, wherein the step a) of projecting comprises the step of varying the intensity of each of said more than one discrete light beams projected in view of one another so that discrete coplanar light beams projected onto peripheral portions of said first surface have a higher intensity than discrete coplanar light beams projected onto the central portion of said first surface.

Claim 14

Dependent Claim 173 words

An optical inspecting method according to claim 10, wherein: said step a) further comprises a step of projecting more than one discrete coplanar light beams onto discrete points of a second surface of said workpiece, said second surface being opposite to said first surface; said step b) further comprises a step of gathering light beams reflected from said second surface by means of a second objective lens; said step c) further comprises a step of detecting each of said light beams gathered in step b) from said second surface by means of a second single one-dimensional detector having detecting elements disposed in one line array, the longitudinal axis of said second detector being coplanar with said more than one coplanar light beams projected onto said second surface; and said step d) further comprises a step of generating an output from said second detector, indicative of the surface profile at different positions along said first and second surfaces so that the thickness of said workpiece between said first and second surfaces can be evaluated.

Claim 15

Dependent Claim 94 words

An optical inspecting method according to claim 10, wherein said first surface is adjacent to one lateral edge of said workpiece, said method further comprising the steps of: i) providing on one side of said workpiece a brightly illuminated background against which the contour of said one lateral edge can be recorded; ii) detecting light emitted from said contour on the other side of said workpiece; iii) generating electrical signals responsive to the light detected during step (ii), said electrical signals generated during step (iii) being indicative of the contour of said lateral edge.

Annuity Stage	Window Opens	Payment Deadline	Surcharge Period Until	Estimated Fee	Status
3.5 Years (Year 4)	1994-10-14	1995-04-15	1995-10-15	$2000.00	Window Closed / Lapsed
7.5 Years (Year 8)	1998-10-14	1999-04-15	1999-10-15	$3760.00	Window Closed / Lapsed
11.5 Years (Year 12)	2002-10-14	2003-04-15	2003-10-15	$7700.00	Window Closed / Lapsed

Method and apparatus for monitoring the surface profile of a moving workpiece

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